公开(公告)号：US6070468A

公开(公告)日：2000-06-06

申请号：US842381

申请日：1997-04-23

申请人： Fahrettin Levent Degertekin ,  Abdullah Atalar ,  B. T. Khuri-Yakub

发明人： Fahrettin Levent Degertekin ,  Abdullah Atalar ,  B. T. Khuri-Yakub

IPC分类号： G01N29/02 ,  G10K11/28 ,  G10K11/36 ,  G10K15/04 ,  G01N29/24

CPC分类号： G01N29/022 ,  G10K11/28 ,  G10K11/36 ,  G10K15/04 ,  G01N2291/0421 ,  G01N2291/0428

摘要： A method is disclosed for selecting characteristics (i.e. thickness-frequency product, length and material) of leakage plates used in ultrasonic transducers that transfer ultrasonic energy via leakage to fluid media with low acoustic impedances. High leakage efficiency and wide bandwidths are achieved by exciting the low order antisymmetric Lamb wave mode (A0) at the selected frequency in the leakage plate. Various actuator configurations that can be used to excite and detect the A0 mode in the leakage plate are described. Some embodiments employ reflector structures to intercept the leaky waves and reform them into beams normal to the plane of the leakage plate.

摘要翻译： 公开了一种用于选择在超声波换能器中使用的泄漏板的特性（即厚度 - 频率乘积，长度和材料）的方法，该超声换能器通过泄漏将超声波能量传递到具有低声阻抗的流体介质。 通过在泄漏板中激励选定频率的低阶反对称兰姆波模式（A0）来实现高泄漏效率和宽带宽。 描述了可用于激发和检测泄漏板中的A0模式的各种致动器配置。 一些实施例采用反射器结构来拦截泄漏波并将其重新变换成垂直于泄漏板的平面的光束。

公开(公告)号：US5257544A

公开(公告)日：1993-11-02

申请号：US824001

申请日：1992-01-22

申请人： B. T. Khuri-Yakub ,  Chung-Kao Hsieh

发明人： B. T. Khuri-Yakub ,  Chung-Kao Hsieh

IPC分类号： G01H13/00 ,  G01N29/12 ,  G01N29/24 ,  G01N29/30

CPC分类号： G01H13/00 ,  G01N29/12 ,  G01N29/2418 ,  G01N29/30 ,  G01N2291/0421 ,  G01N2291/0422 ,  G01N2291/265 ,  G01N2291/2696

摘要： The present invention provides for an inspection system and method for detecting defects in test objects which includes means for generating expansion inducing energy focused upon the test object at a first location, such expansion being allowed to contract, thereby causing pressure wave within and on the surface of the test object. Such expansion inducing energy may be provided by, for example, a laser beam or ultrasonic energy. At a second location, the amplitudes and phases of the acoustic waves are detected and the resonant frequencies' quality factors are calculated and compared to predetermined quality factor data, such comparison providing information of whether the test object contains a defect. The inspection system and method also includes means for mounting the bearing ball for inspection.

摘要翻译： 本发明提供一种用于检测被检物体中的缺陷的检查系统和方法，其包括用于在第一位置产生聚焦在被检物体上的膨胀引发能量的装置，这样的膨胀被允许收缩，从而在表面和表面上产生压力波 的测试对象。 这种膨胀诱导能量可以通过例如激光束或超声能量来提供。 在第二位置，检测声波的幅度和相位，并且计算谐振频率的质量因子并将其与预定的品质因数数据进行比较，这样的比较提供了测试对象是否包含缺陷的信息。 检查系统和方法还包括用于安装用于检查的轴承球的装置。

公开(公告)号：US06295247B1

公开(公告)日：2001-09-25

申请号：US09411784

申请日：1999-10-01

申请人： B. T. Khuri-Yakub ,  F. Levent Degertekin

发明人： B. T. Khuri-Yakub ,  F. Levent Degertekin

IPC分类号： H04R1700

CPC分类号： H03H9/125 ,  B06B1/0292 ,  H03H9/46

摘要： A micromachined capacitive ultrasonic transducer is used to generate and detect Rayleigh, Lamb, and bulk waves in a solid substrate. The transducer contains a substrate with a conductive back electrode, a support material on the substrate, a membrane supported above the substrate by the support material, and a conductive film on the membrane. The support material contains parallel edges defining elongated gaps over which the membrane is supported. Unsupported free regions of the membrane above the gaps are vibrated by applying an electrical signal between the conductive film and conductive back electrode, and stresses are coupled into the substrate at the attachment edges of the membrane. Acoustic modes of the substrate are excited by the stresses, and ultrasonic waves propagate in a direction perpendicular to the parallel edges. By properly choosing the membrane width, material, and thickness, the gap separation distance, and the support material height and thickness, a particular acoustic mode can be selected for a required operating frequency. The gaps may be separated by a distance equal to the wavelength or half-wavelength of the desired acoustic mode. Alternately, the gaps may be grouped, with each group separated by a wavelength or half-wavelength. The transducer can be used in many applications, including filtering and chemical sensing.

摘要翻译： 微机电容式超声换能器用于在固体基底中产生和检测瑞利，羔羊和体波。 传感器包含具有导电背电极的基板，基板上的支撑材料，通过支撑材料支撑在基板上的膜，以及膜上的导电膜。 支撑材料包含限定细长间隙的平行边缘，膜被支撑在该间隙上。 通过在导电膜和导电背电极之间施加电信号来振动间隙上方的膜的不受支撑的自由区域，并且应力在膜的附着边缘耦合到衬底中。 衬底的声学模式被应力激发，超声波在垂直于平行边缘的方向上传播。 通过适当选择膜宽度，材料和厚度，间隙间隔距离和支撑材料的高度和厚度，可以为所需的工作频率选择特定的声学模式。 间隙可以分开等于所需声学模式的波长或半波长的距离。 或者，可以将间隙分组，每组被波长或半波长分开。 传感器可用于许多应用，包括过滤和化学传感。

公开(公告)号：US5271274A

公开(公告)日：1993-12-21

申请号：US745005

申请日：1991-08-14

申请人： B. T. Khuri-Yakub ,  Sanjay Bhardwaj ,  Krishna Saraswat

发明人： B. T. Khuri-Yakub ,  Sanjay Bhardwaj ,  Krishna Saraswat

IPC分类号： G01B17/02 ,  G01N29/07 ,  G01N29/12 ,  G01N29/10 ,  G01N29/24

CPC分类号： G01N29/12 ,  G01B17/025 ,  G01N29/07 ,  G01N2291/0231 ,  G01N2291/0237 ,  G01N2291/02854 ,  G01N2291/044 ,  G01N2291/101

摘要： A system and method is disclosed for measuring thickness of at least one film on a substrate by propagating an acoustic wave through the film on a substrate such that echo waves are generated and received by a transducer. An output signal is generated and processed to give a thickness value. The thickness valve is obtained from the time lapse between the propagated wave and receipt of the echo wave; by the frequency domain of the echo wave; or the phase of the echo wave.

摘要翻译： 公开了一种系统和方法，用于通过在基板上传播声波通过膜，从而通过传感器产生和接收回波来测量衬底上的至少一个膜的厚度。 产生并处理输出信号以给出厚度值。 厚度阀是从传播波与回波之间的时间间隔获得的; 通过回波的频域; 或回波的相位。

公开(公告)号：US06182510B2

公开(公告)日：2001-02-06

申请号：US09568659

申请日：2000-05-10

申请人： Fred E. Stanke ,  B. T. Khuri-Yakub ,  Hung Pham ,  Talat Hasan

发明人： Fred E. Stanke ,  B. T. Khuri-Yakub ,  Hung Pham ,  Talat Hasan

IPC分类号： G01N2918

CPC分类号： G01N29/46 ,  G01N29/041 ,  G01N29/07 ,  G01N29/449 ,  G01N2291/02854 ,  G01N2291/02881 ,  G01N2291/0423 ,  G01N2291/0427 ,  G01N2291/044 ,  G01N2291/102 ,  G01N2291/2698

摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.

摘要翻译： 公开了用于表征可支持声波的半导体晶片或其它测试对象的装置和方法。 源和接收换能器被配置成各种布置以分别激发和检测要表征的晶片中的声波（例如，兰姆波）。 表示检测到的波的信号被数字处理并用于计算与晶片中的波速相关的测量集。 提供了表征灵敏度，其描述不同的感兴趣的晶片特性随着声波传播的变化而变化。 使用在所有晶片特性已知的建立时间计算的表征灵敏度和测量集，以及当至少一个特性未知时的一个或多个处理时间，可以确定设置和处理时间之间的晶片特性的扰动。 通过晶片校准程序改进表征精度，其中针对每个被表征的晶片确定对已知条件的测量偏移。 公开了一种用于校正由于相对于晶片的优选结晶轴的波传播方向引起的声波速度的各向异性的装置和技术。 还描述了一种用于使用单个换能器来测量晶片温度的装置和技术，其温度与晶片的温度和可选的谐振器结构相关。 对于在夹持晶片时发生的表征步骤，描述了一种卡盘结构，其减小卡盘干扰晶片中的波的可能性。