System, method and computer program product for measuring gas concentration

    公开(公告)号:US11333631B2

    公开(公告)日:2022-05-17

    申请号:US16347598

    申请日:2017-11-06

    申请人: Ball Wave Inc.

    摘要: System and method for measuring a gas concentration are provided. A ball sensor generates a collimated beam of a surface acoustic wave including fundamental wave of first frequency and harmonic wave of second frequency, which propagates through a orbital path on piezoelectric ball while passing through sensitive film to adsorb a target gas. Temperature control unit controls ball temperature of the ball sensor. Signal processing unit transmits a burst signal to sensor electrode of the ball sensor to excite the collimated beam, receives burst signals after the collimated beam has propagated a predetermined number of turns around the piezoelectric ball, and calculates the gas concentration and the ball temperature by first and second relative changes in delay times of the first and second frequencies, respectively, using waveform data of the burst signals.