MEMS Fabrication on a Laminated substrate
    1.
    发明申请
    MEMS Fabrication on a Laminated substrate 有权
    层压基板上的MEMS制造

    公开(公告)号:US20060238951A1

    公开(公告)日:2006-10-26

    申请号:US11428446

    申请日:2006-07-03

    IPC分类号: H01H47/00

    CPC分类号: H01Q1/38

    摘要: Systems and methods are provided that facilitate the formation of micro-mechanical structures and related systems on a laminated substrate. More particularly, a micro-mechanical device and a three-dimensional multiple frequency antenna are provided for in which the micro-mechanical device and antenna, as well as additional components, can be fabricated together concurrently on the same laminated substrate. The fabrication process includes a low temperature disposition process allowing for deposition of an insulator material at a temperature below the maximum operating temperature of the laminated substrate, as well as a planarization process allowing for the molding and planarizing of a polymer layer to be used as a form for a micro-mechanical device.

    摘要翻译: 提供了有助于在层压基板上形成微机械结构和相关系统的系统和方法。 更具体地,提供了微机械装置和三维多频天线,其中微机械装置和天线以及附加部件可以在同一叠层基板上同时制造在一起。 该制造工艺包括一种低温配置工艺,其允许在低于层合基板的最大工作温度的温度下沉积绝缘体材料,以及允许将聚合物层的模制和平面化用作为 形式用于微机械装置。

    High isolation tunable MEMS capacitive switch
    3.
    发明申请
    High isolation tunable MEMS capacitive switch 有权
    高隔离可调MEMS电容开关

    公开(公告)号:US20050248423A1

    公开(公告)日:2005-11-10

    申请号:US11080112

    申请日:2005-03-14

    IPC分类号: H01H59/00 H01P1/10

    摘要: The systems and methods described herein provide for a radio frequency micro-electromechanical systems switch having two or more resonant frequencies. The switch can be configured as a capacitive shunt switch having a deflectable member coupled between two electrodes over a transmission line. A first insulator can be located between one of the electrodes and the deflectable member to form a capacitive element. The deflectable member can be deflectable between an up-state and a down-state, the down-state capacitively coupling the deflectable member with the transmission line. The degree by which the deflectable member overlaps the first insulator can be adjusted to adjust the capacitance of the capacitive element and the resulting resonant frequency.

    摘要翻译: 本文所述的系统和方法提供具有两个或更多个谐振频率的射频微机电系统开关。 开关可以被配置为具有通过传输线耦合在两个电极之间的可偏转构件的电容分流开关。 第一绝缘体可以位于电极之间和可偏转构件之间,以形成电容元件。 可偏转构件可以在上升状态和下降状态之间偏转,下降状态将可偏转构件与传输线电容耦合。 可以调节可偏转构件与第一绝缘体重叠的程度,以调整电容元件的电容和所得到的谐振频率。

    MEMS fabrication on a laminated substrate
    4.
    发明申请
    MEMS fabrication on a laminated substrate 有权
    层压基板上的MEMS制造

    公开(公告)号:US20050062653A1

    公开(公告)日:2005-03-24

    申请号:US10751131

    申请日:2003-12-31

    IPC分类号: H01Q1/38 H01Q1/26

    CPC分类号: H01Q1/38

    摘要: Systems and methods are provided that facilitate the formation of micro-mechanical structures and related systems on a laminated substrate. More particularly, a micro-mechanical device and a three-dimensional multiple frequency antenna are provided for in which the micro-mechanical device and antenna, as well as additional components, can be fabricated together concurrently on the same laminated substrate. The fabrication process includes a low temperature deposition process allowing for deposition of an insulator material at a temperature below the maximum operating temperature of the laminated substrate, as well as a planarization process allowing for the molding and planarizing of a polymer layer to be used as a form for a micro-mechanical device.

    摘要翻译: 提供了有助于在层压基板上形成微机械结构和相关系统的系统和方法。 更具体地,提供了微机械装置和三维多频天线,其中微机械装置和天线以及附加部件可以在同一叠层基板上同时制造在一起。 该制造方法包括一种低温沉积工艺,其允许在低于层合基板的最大工作温度的温度下沉积绝缘体材料,以及允许将聚合物层模制和平坦化的平坦化工艺, 形式用于微机械装置。