公开(公告)号：US06930479B2

公开(公告)日：2005-08-16

申请号：US10493841

申请日：2003-03-07

申请人： Gang Xiao ,  Benaiah D. Schrag

发明人： Gang Xiao ,  Benaiah D. Schrag

IPC分类号： G01R33/09 ,  G01N27/72 ,  G01N27/82 ,  G01Q30/04 ,  G01Q60/50 ,  G01Q60/54 ,  G01R33/038 ,  H01L21/66 ,  H01L43/02 ,  H01L43/04 ,  H01L43/06 ,  H01L43/08 ,  G01N27/00

CPC分类号： G01Q60/50 ,  G01N27/82 ,  G01Q30/04 ,  G01Q60/54 ,  G01R33/0385

摘要： A scanning magnetic microscope (SMM) (20) includes a current source (27) for imposing an excitation current to a conductor-under-test (CUT) (70) and, if applicable, a reference current to a proximally located reference conductor (72). During accelerated testing, the SMM (20) corrects thermal drift of the CUT (70) via the reference conductor (72). A sensor (21) may be cooled by a heat sink (31) such as a pump (33) directing an airstream or a coldfinger (80). The sensor may switch from a contact to a non-contact mode of scanning the CUT (70). The SMM (20) and methods are useful for measuring electromigration in a CUT (70) as it occurs, for assembling the images into time lapsed representations such as a shape of the CUT (70), for measuring electromigration as a function of a cross sectional area of a wire under a dielectric material (DM) (78), for determining electrical parameters of the CUT (70), and for optimizing a thickness of a DM (78) over a CUT (70). The SMM (20) and methods are further useful for measuring morphological changes in a CUT (70) due to other stressing conditions, such as temperature, excitation current, physical stress(es), hostile environment, aging, semiconductor “burn-in”, or irradiation.

摘要翻译： 扫描磁显微镜（SMM）（20）包括用于向被测导体（CUT）（70）施加激励电流的电流源（27），以及如果适用的话，向近端定位的参考导体（ 72）。 在加速测试期间，SMM（20）通过参考导体（72）校正CUT（70）的热漂移。 传感器（21）可以由引导空气流或冷指针（80）的诸如泵（33）的散热器（31）来冷却。 传感器可以从接触切换到扫描CUT（70）的非接触模式。 SMM（20）和方法对于测量CUT（70）中的电迁移是有用的，用于将图像组装成诸如CUT（70）的形状的时间过长的表示，用于测量作为交叉的函数的电迁移 在电介质材料（DM）（78）下的导线的横截面面积，用于确定CUT（70）的电参数，以及优化CUT（70）上的DM（78）的厚度。 SMM（20）和方法进一步用于测量CUT（70）中由于其他应力条件（如温度，激发电流，物理应力，敌对环境，老化，半导体“老化”）的形态变化。 ，或照射。