Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
    7.
    发明授权
    Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors 有权
    具有集成温度控制和温度传感器的多功能电位式气体传感器阵列

    公开(公告)号:US09027387B2

    公开(公告)日:2015-05-12

    申请号:US12682365

    申请日:2008-10-09

    摘要: Embodiments of the subject invention relate to a gas sensor and method for sensing one or more gases. An embodiment incorporates an array of sensing electrodes maintained at similar or different temperatures, such that the sensitivity and species selectivity of the device can be fine tuned between different pairs of sensing electrodes. A specific embodiment pertains to a gas sensor array for monitoring combustion exhausts and/or chemical reaction byproducts. An embodiment of the subject device related to this invention operates at high temperatures and can withstand harsh chemical environments. Embodiments of the device are made on a single substrate. The devices can also be made on individual substrates and monitored individually as if they were part of an array on a single substrate. The device can incorporate sensing electrodes in the same environment, which allows the electrodes to be coplanar and, thus, keep manufacturing costs low. Embodiments of the device can provide improvements to sensitivity, selectivity, and signal interference via surface temperature control.

    摘要翻译: 本发明的实施例涉及用于感测一种或多种气体的气体传感器和方法。 实施例包括保持在相似或不同温度的感测电极的阵列,使得可以在不同的感测电极对之间精细地调节器件的灵敏度和物种选择性。 具体实施方案涉及用于监测燃烧排放物和/或化学反应副产物的气体传感器阵列。 与本发明相关的本发明装置的实施例在高温下工作并且能够承受恶劣的化学环境。 该装置的实施例在单个基板上制成。 这些器件也可以在单独的衬底上制成并单独监测,就像它们是单个衬底上阵列的一部分一样。 该装置可以将感应电极结合在相同的环境中,这允许电极是共面的,因此保持制造成本低。 器件的实施例可以通过表面温度控制提供对灵敏度,选择性和信号干扰的改进。

    Multifunctional Potentiometric Gas Sensor Array With an Integrated Temperature Control and Temperature Sensors
    9.
    发明申请
    Multifunctional Potentiometric Gas Sensor Array With an Integrated Temperature Control and Temperature Sensors 有权
    具有集成温度控制和温度传感器的多功能电位式气体传感器阵列

    公开(公告)号:US20100264900A1

    公开(公告)日:2010-10-21

    申请号:US12682365

    申请日:2008-10-09

    IPC分类号: G01N27/407

    摘要: Embodiments of the subject invention relate to a gas sensor and method for sensing one or more gases. An embodiment incorporates an array of sensing electrodes maintained at similar or different temperatures, such that the sensitivity and species selectivity of the device can be fine tuned between different pairs of sensing electrodes. A specific embodiment pertains to a gas sensor array for monitoring combustion exhausts and/or chemical reaction byproducts. An embodiment of the subject device related to this invention operates at high temperatures and can withstand harsh chemical environments. Embodiments of the device are made on a single substrate. The devices can also be made on individual substrates and monitored individually as if they were part of an array on a single substrate. The device can incorporate sensing electrodes in the same environment, which allows the electrodes to be coplanar and, thus, keep manufacturing costs low. Embodiments of the device can provide improvements to sensitivity, selectivity, and signal interference via surface temperature control.

    摘要翻译: 本发明的实施例涉及用于感测一种或多种气体的气体传感器和方法。 实施例包括保持在相似或不同温度的感测电极的阵列,使得可以在不同的感测电极对之间精细地调节器件的灵敏度和物种选择性。 具体实施方案涉及用于监测燃烧排放物和/或化学反应副产物的气体传感器阵列。 与本发明相关的本发明装置的实施例在高温下工作并且能够承受恶劣的化学环境。 该装置的实施例在单个基板上制成。 这些器件也可以在单独的衬底上制成并单独监测,就像它们是单个衬底上阵列的一部分一样。 该装置可以在相同的环境中包含感测电极,这允许电极是共面的,因此保持制造成本低。 器件的实施例可以通过表面温度控制提供对灵敏度,选择性和信号干扰的改进。