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    Device for and method of concentrating chemical substances for semiconductor fabrication
    3.
    发明授权
    Device for and method of concentrating chemical substances for semiconductor fabrication 失效
    集中化学物质用于半导体制造的装置和方法

    公开(公告)号：US6033989A

    公开(公告)日：2000-03-07

    申请号：US974319

    申请日：1997-11-19

    申请人： Yong-woo Her ,  Heoung-bin Lim ,  Byoung-woo Son ,  Mi-kyung Lee

    发明人： Yong-woo Her ,  Heoung-bin Lim ,  Byoung-woo Son ,  Mi-kyung Lee

    IPC分类号： G01N1/36 ,  B01D3/00 ,  B01D3/34 ,  G01N33/00 ,  H01L21/00 ,  H01L21/304

    CPC分类号： H01L21/67017 ,  B01D3/346

    摘要： A device for concentrating chemical substances for use during the fabrication of a semiconductor device uses a sample container for holding chemical substances. A feed tube in gas flow communication with the sample container introduces a carrier gas. A vapor outlet in gas flow communication with the sample container discharges a mixture of a vapor and the carrier gas. A sample heater, disposed above and apart from the sample container, heats the chemical substances to a first predetermined temperature. A gas source supplies the carrier gas, and a gas heater, in gas flow communication with both the gas source and the feed tube, heats the carrier gas to a second predetermined temperature. A condenser in flow communication with the vapor outlet produces a liquid from the vapor, and a collecting container collects the liquid.

    摘要翻译： 用于浓缩半导体器件制造期间使用的化学物质的装置使用用于保持化学物质的样品容器。 与样品容器气体连通的进料管引入载气。 与样品容器气流连通的蒸汽出口排出蒸汽和载气的混合物。 设置在样品容器上方和外部的样品加热器将化学物质加热到第一预定温度。 气体源供应载气和气体加热器，与气体源和进料管气体连通，将载气加热到第二预定温度。 与蒸汽出口流动连通的冷凝器从蒸汽产生液体，并且收集容器收集液体。

    Method and apparatus of concentrating chemicals for semiconductor device manufacturing
    4.
    发明授权
    Method and apparatus of concentrating chemicals for semiconductor device manufacturing 失效
    浓缩化学品用于半导体器件制造的方法和装置

    公开(公告)号：US5900124A

    公开(公告)日：1999-05-04

    申请号：US842276

    申请日：1997-04-24

    申请人： Yong-woo Her ,  Heoung-bin Kim ,  Bok-soon Ko ,  Byoung-woo Son

    发明人： Yong-woo Her ,  Heoung-bin Kim ,  Bok-soon Ko ,  Byoung-woo Son

    IPC分类号： B01D1/00 ,  B01D1/14 ,  B01D5/00 ,  H01L21/304 ,  B01D3/00

    CPC分类号： B01D1/0029 ,  B01D1/14 ,  Y10S159/06 ,  Y10S159/15 ,  Y10S159/21 ,  Y10S159/35 ,  Y10S203/11

    摘要： A method of concentrating chemicals for semiconductor devices, which includes the steps of heating a sample container by using a high-energy light source, vaporizing the chemicals by injecting a high-temperature gas into the sample container through an injection opening in the sample container and discharging the vaporized chemicals by the pressure of the gas through a gas outlet formed on the sample container. An apparatus of concentrating chemicals for semiconductor devices includes a sample container having a sample-supply window, a gas-injection opening and a gas outlet. A high-energy light source heats the sample container and a gas-supply source supplies the gas through a gas-injection opening in the sample container. A gas-heating device located between the sample container and the gas-supply source heats the gas provided by the gas-supply source.

    摘要翻译： 一种浓缩用于半导体器件的化学品的方法，其包括通过使用高能量光源加热样品容器的步骤，通过将样品容器中的高温气体注入到样品容器中，通过样品容器中的注射开口蒸发化学品，以及 通过气体的压力通过形成在样品容器上的气体出口排出蒸发的化学物质。 用于半导体器件的浓缩化学品的装置包括具有供样窗口，气体注入口和气体出口的样本容器。 高能量光源加热样品容器，气体供给源通过样品容器中的气体注入口供给气体。 位于样品容器和气体供应源之间的气体加热装置加热由气体供应源提供的气体。