公开(公告)号：US07183716B2

公开(公告)日：2007-02-27

申请号：US10772132

申请日：2004-02-04

申请人： Viktor Kanarov ,  Alan V. Hayes ,  Rustam Yevtukhov ,  Ira Reiss ,  Roger P. Fremgen, Jr. ,  Adrian Celaru ,  Kurt E. Williams ,  Carlos Fernando de Mello Borges ,  Boris L. Druz ,  Renga Rajan ,  Hari Hegde

发明人： Viktor Kanarov ,  Alan V. Hayes ,  Rustam Yevtukhov ,  Ira Reiss ,  Roger P. Fremgen, Jr. ,  Adrian Celaru ,  Kurt E. Williams ,  Carlos Fernando de Mello Borges ,  Boris L. Druz ,  Renga Rajan ,  Hari Hegde

IPC分类号： H01J7/24

CPC分类号： H01L21/67253 ,  H01J27/18 ,  H01J37/321 ,  H01J37/32458 ,  H01L21/67069

摘要： A charged particle source utilizes a novel plasma processing chamber, RF coil and ion optics, to achieve high uniformity. The plasma processing chamber has a re-entrant vessel which is movable, and which includes extensions of adjustable shape or position, to make more uniform the plasma contained within the chamber. One or more magnets, which may be static or moving, may be included within the re-entrant vessel. The ion optics include a grid with a number of apertures, and tuning features each surrounding an aperture. These tuning features either reduce the diameter of the associated aperture, or increase the length of that aperture, to create more uniform beamlets emerging from the grid. The RF coil includes a flux concentrator positioned adjacent to the winding in at least one angular region thereof to tune the magnetic field produced thereby.

摘要翻译： 带电粒子源利用新颖的等离子体处理室，RF线圈和离子光学器件，以实现高均匀性。 等离子体处理室具有可移动的并且包括可调节形状或位置的延伸部的入口容器，以使包含在室内的等离子体更均匀。 一个或多个可以是静态或移动的磁体可以包括在重入容器内。 离子光学器件包括具有多个孔的栅格，以及每个围绕孔的调谐特征。 这些调谐功能可以减小相关孔径的直径，或增加该孔径的长度，从而形成从网格出现的更均匀的子束。 RF线圈包括在其至少一个角度区域中邻近绕组定位的磁通集中器，以调谐由此产生的磁场。

公开(公告)号：US5759623A

公开(公告)日：1998-06-02

申请号：US527900

申请日：1995-09-14

申请人： Carlos Fernando De Mello Borges ,  Michel Moisan ,  Francois Roy

发明人： Carlos Fernando De Mello Borges ,  Michel Moisan ,  Francois Roy

IPC分类号： C23C8/80 ,  C23C16/02 ,  C23C16/27 ,  C23C26/00 ,  C23C16/26 ,  B05D3/00

CPC分类号： C23C16/275 ,  C23C16/0218 ,  C23C26/00 ,  C23C8/80

摘要： A method for depositing a thin film of diamond on the surface of a Fe-based substrate comprises the step of pre-treating the surface of the Fe-based substrate prior to the deposition consisting of nucleating carbon atoms on the Fe-based substrate to grow the thin film of diamond. The pre-treatment consists of supersaturating the surface of the Fe-based substrate with carbon atoms and heating it to form a diffusion barrier layer. During the pre-treatment, at least a portion of the carbon atoms are diffused into the Fe-based substrate. During the deposition process, carbon atoms are prevented by the diffusion barrier layer previously formed to diffuse into the Fe-based substrate whereby these carbon atoms remain available for the nucleation and growth of the thin film of diamond. A portion of the carbon atoms diffused into the Fe-based substrate during the pre-treatment are nucleated during the deposition process and act as anchors to provide a high adhesion between the thin film of diamond and the surface of the Fe-based substrate.

摘要翻译： 用于在Fe基基材的表面上沉积金刚石薄膜的方法包括在沉积前由Fe基基底上的成核碳原子预处理Fe基基底的表面以生长的步骤 金刚石薄膜。 预处理包括使具有碳原子的Fe基衬底的表面过饱和并加热以形成扩散阻挡层。 在预处理期间，至少一部分碳原子扩散到Fe基底物中。 在沉积过程中，通过预先形成的扩散阻挡层来阻止碳原子扩散到Fe基衬底中，由此这些碳原子可用于金刚石薄膜的成核和生长。 在预处理期间扩散到Fe基底物中的一部分碳原子在沉积过程中成核，并且作为锚点，以在金刚石薄膜和Fe基底材的表面之间提供高粘合性。