公开(公告)号：US20090314079A1

公开(公告)日：2009-12-24

申请号：US11990573

申请日：2006-06-13

申请人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

发明人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

IPC分类号： G01F1/692

CPC分类号： G01F1/6986 ,  G01F1/6845 ,  G01F1/692

摘要： A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω.

摘要翻译： 用于测量沿主流动方向流动的空气质量流量的方法和能够实现该方法的热膜空气质量计。 该方法和热膜空气质量计特别适用于内燃机的进气道。 热膜空气质量计包括具有能够流过空气质量流的芯片表面的传感器芯片。 芯片表面依次具有测量表面，测量表面包括具有至少一个中央加热元件和至少两个温度传感器的中心热膜空气质量计电路。 该方法被实施为使得使用频率ωm周期性地加热至少一个中央加热元件。 借助于至少两个温度传感器，至少检测两个测量信号。 测量信号和/或至少两个测量信号的至少一个差分信号使用频率ω进行调制。

公开(公告)号：US07861586B2

公开(公告)日：2011-01-04

申请号：US11990573

申请日：2006-06-13

申请人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

发明人： Bernard Opitz ,  Ulrich Wagner ,  Axel Franke ,  Carsten Raudzis

IPC分类号： G01F1/68

CPC分类号： G01F1/6986 ,  G01F1/6845 ,  G01F1/692

摘要： A method for measuring an air mass flow flowing in a main flow direction, and a hot-film air mass meter by which the method is able to be realized. The method and the hot-film air mass meter are especially suitable for use in the induction tract of an internal combustion engine. The hot-film air mass meter includes a sensor chip having a chip surface across which an air mass flow is able to flow. The chip surface in turn has a measuring surface, the measuring surface including a central hot-film air mass meter circuit having at least one central heating element and at least two temperature sensors. The method is implemented so that the at least one central heating element is periodically heated using a frequency ω. With the aid of at least two temperature sensors, at least two measuring signals are detected. The measuring signals and/or at least one differential signal of the at least two measuring signals are modulated using the frequency ω.

摘要翻译： 用于测量沿主流动方向流动的空气质量流量的方法和能够实现该方法的热膜空气质量计。 该方法和热膜空气质量计特别适用于内燃机的进气道。 热膜空气质量计包括具有能够流过空气质量流的芯片表面的传感器芯片。 芯片表面依次具有测量表面，测量表面包括具有至少一个中央加热元件和至少两个温度传感器的中心热膜空气质量计电路。 实施该方法使得使用频率ω周期性地加热至少一个中央加热元件。 借助于至少两个温度传感器，至少检测两个测量信号。 使用频率ω调制至少两个测量信号的测量信号和/或至少一个差分信号。

公开(公告)号：US09081027B2

公开(公告)日：2015-07-14

申请号：US12734228

申请日：2008-10-02

申请人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

发明人： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC分类号： G01C19/56 ,  G01P3/44 ,  G01C19/574 ,  F16F1/02

CPC分类号： G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, where the movable substructures are excitable into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, where deflections of the Coriolis elements induced by a Coriolis force are detectable, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

摘要翻译： 具有衬底和多个可移动子结构的偏转速率传感器，其安装在衬底的表面上，可移动子结构耦合到共享的，特别是中心弹簧元件，其中可移动子结构可激发成耦合振荡 在平行于衬底的表面延伸的平面中，具有科里奥利元件的可移动子结构，其中可检测科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕第一轴线的偏航率， 提供了用于检测围绕第二轴线的偏航率的第二科里奥利元件，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20130299927A1

公开(公告)日：2013-11-14

申请号：US13888920

申请日：2013-05-07

申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

IPC分类号： B81B3/00 ,  B81C1/00

CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

公开(公告)号：US08427031B2

公开(公告)日：2013-04-23

申请号：US12645120

申请日：2009-12-22

申请人： Axel Franke

发明人： Axel Franke

IPC分类号： H02N1/00

CPC分类号： B81B3/0021 ,  B81B2203/0136 ,  B81B2203/04 ,  G02B5/284 ,  G02B26/001 ,  G02B26/0841 ,  G09G3/3433 ,  H02N1/008 ,  H03H9/02275

摘要： A drive element is provided having a substrate, a seismic mass, a drive electrode and a counter-electrode, one of the two electrodes being connected to the substrate and the other of the two electrodes being connected to the seismic mass; and the drive electrode and the counter-electrodes being provided for the excitation of motion of the seismic mass in a main direction of motion; and in addition, the drive electrode includes a first and a second partial electrode, which are switchable separately from each other.

摘要翻译： 提供具有基板，地震块，驱动电极和对电极的驱动元件，两个电极中的一个连接到基板，并且两个电极中的另一个连接到地震块; 并且所述驱动电极和所述对置电极被设置为用于激励所述地震块在主运动方向上的运动; 此外，驱动电极包括可彼此分开切换的第一和第二部分电极。

公开(公告)号：US20120061860A1

公开(公告)日：2012-03-15

申请号：US13232088

申请日：2011-09-14

申请人： Tjalf Pirk ,  Juergen Butz ,  Axel Franke ,  Frieder Haag ,  Heribert Weber ,  Arnim Hoechst ,  Sonja Knies

发明人： Tjalf Pirk ,  Juergen Butz ,  Axel Franke ,  Frieder Haag ,  Heribert Weber ,  Arnim Hoechst ,  Sonja Knies

IPC分类号： H01L21/56 ,  H01L23/28

CPC分类号： H01L23/3121 ,  H01L21/561 ,  H01L21/568 ,  H01L23/5389 ,  H01L23/58 ,  H01L24/24 ,  H01L24/96 ,  H01L25/0655 ,  H01L2224/04105 ,  H01L2224/24137 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/3511 ,  H01M6/40 ,  H01M10/0436 ,  H01M10/0525 ,  Y02E60/122 ,  Y02P70/54 ,  H01L2924/00

摘要： A method for constructing an electrical circuit that includes at least one semiconductor chip encapsulated with a potting compound is disclosed. The method includes applying a galvanic layer arrangement for forming an electrochemical element on an element of the electrical circuit including the at least one semiconductor chip.

摘要翻译： 公开了一种构造电路的方法，该电路包括至少一个用封装化合物封装的半导体芯片。 该方法包括在包括至少一个半导体芯片的电路的元件上施加用于形成电化学元件的电偶层布置。

公开(公告)号：US08826735B2

公开(公告)日：2014-09-09

申请号：US13259976

申请日：2010-01-28

申请人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

发明人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

IPC分类号： G01C19/56

CPC分类号： G01C19/5755

摘要： A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

摘要翻译： 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

公开(公告)号：US08796791B2

公开(公告)日：2014-08-05

申请号：US13888920

申请日：2013-05-07

申请人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

发明人： Axel Franke ,  Patrick Wellner ,  Lars Tebje

IPC分类号： G01P15/08

CPC分类号： B81B3/0075 ,  B81C1/00626 ,  B81C1/00674 ,  B81C2201/0112 ,  B81C2201/014 ,  B81C2203/0109

摘要： Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.

摘要翻译： 提出的措施是，在实现元件的MEMS元件的微机械结构的情况下，设计自由度显着增加，其包括用于MEMS元件的载体和用于MEMS元件的微机械结构的盖， MEMS元件通过支架结构安装在载体上。 MEMS元件以分层结构实现，并且MEMS元件的微机械结构在该分层结构的至少两个功能层上延伸，所述功能层通过至少一个中间层彼此分离。

公开(公告)号：US08520396B2

公开(公告)日：2013-08-27

申请号：US12660066

申请日：2010-02-19

申请人： Manuela Schmidt ,  Axel Franke ,  Sven Zinober

发明人： Manuela Schmidt ,  Axel Franke ,  Sven Zinober

IPC分类号： H05K7/00

CPC分类号： H01L25/0657 ,  B81C1/0023 ,  H01L25/16 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2924/0002 ,  H01L2924/14 ,  H01L2924/1433 ,  Y10T29/49208 ,  H01L2924/00

摘要： A method for producing an electronic module, in that at least one first microelectronic component is provided and is electrically connected to a second microelectronic component by a first flip-chip method step; at least one dielectric component is provided which has at least one printed circuit trace, and at least one printed circuit trace of the dielectric component is electrically connected to the second microelectronic component; and the second microelectronic component is electrically connected by a second flip-chip method step to a printed circuit board by way of the printed circuit trace(s) of the dielectric component, in order to avoid vias through a microelectronic component; the invention also relates to a corresponding electronic module.

摘要翻译： 一种用于制造电子模块的方法，其中提供至少一个第一微电子部件，并通过第一倒装芯片方法步骤电连接到第二微电子部件; 提供至少一个介电元件，其具有至少一个印刷电路迹线，并且所述电介质元件的至少一个印刷电路迹线电连接到所述第二微电子元件; 并且所述第二微电子部件通过第二倒装芯片方法步骤通过所述电介质部件的印刷电路迹线电连接到印刷电路板，以避免通过微电子部件的通孔; 本发明还涉及相应的电子模块。

公开(公告)号：US08418556B2

公开(公告)日：2013-04-16

申请号：US12703516

申请日：2010-02-10

申请人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

发明人： Po-Jui Chen ,  Martin Eckardt ,  Axel Franke

IPC分类号： G01P15/125

CPC分类号： G01R33/0286 ,  Y10T29/49002

摘要： A micro electrical-mechanical system (MEMS) is disclosed. The MEMS includes a substrate, a first pivot extending upwardly from the substrate, a first lever arm with a first longitudinal axis extending above the substrate and pivotably mounted to the first pivot for pivoting about a first pivot axis, a first capacitor layer formed on the substrate at a location beneath a first capacitor portion of the first lever arm, a second capacitor layer formed on the substrate at a location beneath a second capacitor portion of the first lever arm, wherein the first pivot supports the first lever arm at a location between the first capacitor portion and the second capacitor portion along the first longitudinal axis, and a first conductor member extending across the first longitudinal axis and spaced apart from the first pivot axis.

摘要翻译： 公开了一种微机电系统（MEMS）。 MEMS包括基板，从基板向上延伸的第一枢轴，第一杠杆臂，第一纵向轴线在基板上方延伸并且可枢转地安装到第一枢轴上，用于围绕第一枢转轴线枢转，第一电容器层形成在第一枢转轴上 基板，位于第一杠杆臂的第一电容器部分下方的位置处;第二电容器层，形成在第一杠杆臂的第二电容器部分下方的位置处的基板上，其中第一枢轴在第一杠杆臂之间的位置处支撑第一杠杆臂， 所述第一电容器部分和所述第二电容器部分沿着所述第一纵向轴线延伸，以及第一导体部件，其延伸穿过所述第一纵向轴线并与所述第一枢转轴线间隔开。