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1.发明授权Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism 有权薄板保持容器，薄板保持容器用盖单元，简化安装/拆卸机构公开(公告)号：US07722095B2
公开(公告)日：2010-05-25
申请号：US11104620
申请日：2005-04-13
IPC分类号： E05C5/00
CPC分类号： H01L21/67373 , H01L21/67772 , Y10T292/089 , Y10T292/1014 , Y10T292/1022 , Y10T292/432
摘要： The present invention provides a lid unit for closing the container body 2 that is transported with thin-plates such as semiconductor wafers or the like accommodated therein. Simplified attaching/detaching mechanisms 32 for the production line are provided at the centers of the respective sides opposing with respect to each other. The simplified attaching/detaching mechanism 32 for the production line includes a locking plate 34 for locking the second fitted portion 21 and a drive-out member 35 for allowing the drive-out member 35 to rise and set by being engaged with the locking plate 34. A locking arm 57 for fixing the drive-out member 35 is provided on the drive-out member 35 at the end in the direction of rotation. A supporting rail 56 for controlling the rising and setting movement of the locking plate 34 is provided on the drive-out member 35. The locking plate 34 is supported pivotally and slidably, and is provided with a holding claw 51 for engaging the second fitted portion 21 at the distal end thereof. The thin-plate holding container 1 is used for transportation when the lid unit 4 for transportation is attached on the container body 2, and is used for the production line when the lid body 5 for the production line is attached thereon.
摘要翻译： 本发明提供了一种用于关闭容纳体2的盖单元，该容器主体2被容纳在其中的诸如半导体晶片等的薄板传送。 用于生产线的简化的附接/分离机构32设置在相对于彼此相对的相应侧的中心处。 用于生产线的简化的安装/拆卸机构32包括用于锁定第二装配部分21的锁定板34和用于允许驱出部件35通过与锁定板34接合而升起和固定的驱出部件35 用于固定驱出部件35的锁定臂57在旋转方向的端部设置在驱出部件35上。 用于控制锁定板34的上升和下降运动的支撑轨道56设置在驱出部件35上。锁定板34可枢转地和可滑动地支撑，并且设置有用于接合第二配合部分的保持爪51 21在其远端。 当运输用盖单元4安装在容器主体2上时，薄板保持容器1用于运输，并且当用于生产线的盖体5被安装在生产线上时。
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公开(公告)号：US20060272975A1
公开(公告)日：2006-12-07
申请号：US11476148
申请日：2006-06-28
IPC分类号： B65D85/48
CPC分类号： H01L21/67373 , H01L21/67379 , H01L21/67383
摘要： A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting portion for supporting an upper portion of the slotted plate, and a lower fitting portion for supporting a lower portion of the slotted plate. An upper fitting piece of the upper fitting portion has a planar contact face which comes into contact with the slotted plate to thereby position the slotted plate in the front/rear direction while suppressing swing of the slotted plate. The upper receiving element on the slotted plate has a planar contact face. The lower fitting portion provides vertical, horizontal and front/rear positioning.
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公开(公告)号：US20060272973A1
公开(公告)日：2006-12-07
申请号：US11476100
申请日：2006-06-28
IPC分类号： B65D85/48
CPC分类号： H01L21/67373 , H01L21/67379 , H01L21/67383
摘要： A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting portion for supporting an upper portion of the slotted plate, and a lower fitting portion for supporting a lower portion of the slotted plate. An upper fitting piece of the upper fitting portion has a planar contact face which comes into contact with the slotted plate to thereby position the slotted plate in the front/rear direction while suppressing swing of the slotted plate. The upper receiving element on the slotted plate has a planar contact face. The lower fitting portion provides vertical, horizontal and front/rear positioning.
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公开(公告)号：US20060126052A1
公开(公告)日：2006-06-15
申请号：US11293084
申请日：2005-12-05
IPC分类号： G03B27/62
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67005 , H01L21/6735
摘要： The present invention allows a reticle-carrying container 11 to be fastened in a reticle stocker 2 even if the reticle-carrying container 11 is wrongly oriented. The reticle-carrying container 11 includes an interior with an opening at one end for storing a reticle 12, a door 14 for covering and blocking the opening, and a seal material 15 for sealing the interior hermetically when the door 14 blocks the pod 13. The reticle-carrying container 11 is provided with two pairs of kinematic pin grooves 61 for positioning and fastening the reticle-carrying container 11, which are formed with a 180-degree turn from each other on the outer surface of the door 14. Receiving parts 22 for receiving and holding the kinematic pin grooves 61 are arranged in the positions corresponding to the kinematic pin grooves 61 on the outer surface of the pod 13 so that the two pairs of kinematic pin grooves 61 can be engaged with the pins in the both orientations.
摘要翻译： 本发明即使标线承载容器11错误地定向，也能够将标线承载容器11紧固在掩模版保存架2中。 标本承载容器11包括内部，其一端具有用于存储标线12的开口，用于覆盖和阻塞开口的门14，以及当门14阻挡荚13时密封内部的密封材料15。 标线承载容器11设置有两对运动销槽61，用于在门14的外表面上彼此形成180度转弯的定影和紧固光罩承载容器11。 用于接收和保持运动销槽61的接收部件22被布置在与容器13的外表面上的运动销槽61相对应的位置中，使得两对运动销槽61可以与销中的销接合 两个方向。
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公开(公告)号：US20060021904A1
公开(公告)日：2006-02-02
申请号：US11242566
申请日：2005-10-04
申请人： Chiaki Matsutori , Takaharu Oyama
发明人： Chiaki Matsutori , Takaharu Oyama
IPC分类号： B65D85/48
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A wafer storage container has a container body and a lid. The container body has lid support inserts in a lid receptacle, and the lid has corner inserts for contact with the lid support inserts to support the lid. A supporting member is attached to the container body. The supporting member includes a base plate portion, side plates extending from the base plate portion, and a handle on each side plate for lifting the container body. The thin plate supporting member has contacting portions to support the thin plates, supporting members which elastically support the contacting portions, and a base support bar to support the supporting portions. The tip end of each supporting portion contacts a support stage, and elastically supports the contacting portions from both sides.
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公开(公告)号：US20050161367A1
公开(公告)日：2005-07-28
申请号：US11087048
申请日：2005-03-23
IPC分类号： H01L21/673 , B65D85/30
CPC分类号： H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.
摘要翻译： 本发明涉及一种具有用于将盖单元牢固地固定到用于容纳半导体晶片等的容器主体的闩锁机构的盖单元，该闩锁机构可以容易地拆卸以用于其部件的清洁和干燥以及晶片 当将容器摇动时，用于将半导体晶片保持在适当位置。 锁定机构包括锁定构件，其在投影时将盖单元固定到容器主体; 致动器，用于在伸出和缩回位置之间移动锁定构件; 当所述锁定构件被所述致动器突出时，所述尖端侧凸轮用于在相对于所述盖单元的一个方向上按压所述锁定构件的前端部; 一个底端下凸轮，用于在与第一方向相反的第二方向上按压锁定件的底端; 以及基端上凸轮和用于在第二方向上按压基端的凸轮凸块随动件。 晶片压脚由其端部比其中心部分更薄的端部形成的支撑突起支撑。
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公开(公告)号：US09387960B2
公开(公告)日：2016-07-12
申请号：US14131120
申请日：2012-07-03
申请人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
发明人： Tsuyoshi Nagashima , Shuichi Inoue , Takaharu Oyama , Chiaki Matsutori , Kazumasa Ohnuki , Hiroyuki Shida , Hiroki Yamagishi
IPC分类号： B65D43/02 , H01L21/673
CPC分类号： B65D43/02 , H01L21/67373
摘要： A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
摘要翻译： 基板收容容器包括：容纳半导体晶片的容器本体; 安装在容器主体前部的门; 以及锁定机构。 锁定机构包括：旋转驱动器，其由门支撑并从盖板侧操作; 以及随着旋转驱动器旋转而垂直滑动以使远端进入和离开容器主体的锁定中空的锁定杆。 旋转驱动器分离成第一和第二旋转驱动器。 第一和第二旋转驱动器分别形成有第一和第二凸轮部分。 第一和第二凸轮部分被制成以支撑其间的锁定杆的近端，使得锁定杆可以在门的厚度方向上摆动。
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公开(公告)号：US20090038986A1
公开(公告)日：2009-02-12
申请号：US12222681
申请日：2008-08-14
IPC分类号： B65D85/00
CPC分类号： H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.
摘要翻译： 本发明涉及一种具有用于将盖单元牢固地固定到用于容纳半导体晶片等的容器主体的闩锁机构的盖单元，该闩锁机构可以容易地拆卸以用于其部件的清洁和干燥以及晶片 当将容器摇动时，用于将半导体晶片保持在适当位置。 锁定机构包括锁定构件，其在投影时将盖单元固定到容器主体; 致动器，用于在伸出和缩回位置之间移动锁定构件; 当所述锁定构件被所述致动器突出时，所述尖端侧凸轮用于在相对于所述盖单元的一个方向上按压所述锁定构件的前端部; 一个底端下凸轮，用于在与第一方向相反的第二方向上按压锁定件的底端; 以及基端上凸轮和用于在第二方向上按压基端的凸轮凸块随动件。 晶片压脚由其端部比其中心部分更薄的端部形成的支撑突起支撑。
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公开(公告)号：US07455181B2
公开(公告)日：2008-11-25
申请号：US11087048
申请日：2005-03-23
IPC分类号： B65D85/30
CPC分类号： H01L21/67369 , H01L21/67373 , H01L21/67383
摘要： The present invention is directed to a lid unit having a latching mechanism for firmly fixing the lid unit to a container body for containing semiconductor wafers and the like, which latching mechanism can be easily disassembled for cleaning and drying of its components, and to a wafer presser for retaining the semiconductor wafers in position when the container is shaken. The latching mechanism includes a locking member which, when projected, secures the lid unit to the container body; an actuator for moving the locking member between projected and retracted positions; a tip-side cam for pressing a tip portion of the locking member in one direction relative to the lid unit when the locking member is projected by the actuator; a base-end lower cam for pressing a base-end of the locking member in a second direction, opposite the one direction; and a base-end upper cam and a cam projection follower for pressing the base-end in the second direction. The wafer presser is supported by a supporting projection bar formed with its ends thinner than its center portion.
摘要翻译： 本发明涉及一种具有用于将盖单元牢固地固定到用于容纳半导体晶片等的容器主体的闩锁机构的盖单元，该闩锁机构可以容易地拆卸以用于其部件的清洁和干燥以及晶片 当将容器摇动时，用于将半导体晶片保持在适当位置。 锁定机构包括锁定构件，其在投影时将盖单元固定到容器主体; 致动器，用于在伸出和缩回位置之间移动锁定构件; 当所述锁定构件被所述致动器突出时，所述尖端侧凸轮用于在相对于所述盖单元的一个方向上按压所述锁定构件的前端部; 一个底端下凸轮，用于在与第一方向相反的第二方向上按压锁定件的底端; 以及基端上凸轮和用于在第二方向上按压基端的凸轮凸块随动件。 晶片压脚由其端部比其中心部分更薄的端部形成的支撑突起支撑。
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公开(公告)号：US07410061B2
公开(公告)日：2008-08-12
申请号：US11476148
申请日：2006-06-28
IPC分类号： B65D85/30
CPC分类号： H01L21/67373 , H01L21/67379 , H01L21/67383
摘要： A thin plate supporting container includes a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from opposing sides. There are provided an upper fitting portion for supporting an upper portion of the slotted plate, and a lower fitting portion for supporting a lower portion of the slotted plate. An upper fitting piece of the upper fitting portion has a planar contact face which comes into contact with the slotted plate to thereby position the slotted plate in the front/rear direction while suppressing swing of the slotted plate. The upper receiving element on the slotted plate has a planar contact face. The lower fitting portion provides vertical, horizontal and front/rear positioning.
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