摘要:
A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
摘要:
A substrate storing container includes: a container body for storing semiconductor wafers; a door that is fitted to the front of the container body; and a locking mechanism locking the door. The locking mechanism includes: a rotary driver that is supported by the door and operated from a cover plate side; and a locking bar that vertically slides as the rotary driver rotates to bring the distal end into, and out of, a locking hollow of the container body. The rotary driver is separated into first and second rotary drivers. The first and second rotary drivers are formed with first and second cam portions, respectively. The first and second cam portions are made to support the proximal end of the locking bar therebetween so that the locking bar can sway in the thickness direction of the door.
摘要:
Wafer support shelves (10, 10) are each provided with wafer support projections (A, B1, B2) on which parts of the outer margins of a semiconductor wafer (W) are to be placed. In each case, one of the support projections (A, B1, B2) is provided on the far side of the center position of the semiconductor wafer (W), and two of the support projections are provided on the near side of the center of the semiconductor wafer. By means of this structure, in a state in which a lid body (3) is not attached to a wafer extraction/insertion opening (2), the flexure amount of the semiconductor wafers placed on the support projections of multiple locations in the wafer support shelves can be reduced with a minimal number of projections, so that a hindrance is not created to an operation such as extraction by a robot arm.
摘要:
A pedal arm provided with an arm main body has a first end portion, a second end portion, a pedal pad portion, and a shaft portion. The arm main body includes a first wall portion and a second wall portion in a first direction, and a third wall portion and a fourth wall portion in a second direction. One of the first wall portion and the second wall portion includes an abutting portion where the first end portion and the second end portion contacts, and the third wall portion and the fourth wall portion include a first curved portion and a second curved portion. A first depressed wall portion and a second depressed wall portion are formed on the first curved portion and the second curved portion, which are formed in inward convex shapes, respectively, and parts of the first depressed wall portion and the second depressed wall portion contact.
摘要:
A brittle material substrate cutting method and cutting apparatus are provided, which prevent cut faces of a brittle material substrate from contacting each other after the cutting in a break step of continuously cutting the brittle material substrate, so that a damage or contamination on the brittle material substrate due to the contact can be prevented. A brittle material substrate cutting apparatus includes: a cutting section (112, 122) for applying a pressing force in a vicinity of a scribe line S formed on a substrate G and cutting the pressed portion of the substrate G; and a holding section moving parallel to the scribe line S while holding the cutting section. The brittle material substrate cutting apparatus continuously cuts the substrate G along the scribe line S. The brittle material substrate cutting apparatus further includes: a cut-face separating section (113, 123), provided in the holding section, for holding and pressing at least one part of cut substrate portions of the substrate G, wherein the cut substrate portions are generated as a result of the cutting and they oppose each other, and moving cut faces of the cut substrate portions approximately parallel to a main face of the substrate G and in directions to separate the cut faces from each other.
摘要:
A cable 1 is configured of connecting portions 12 on both ends for connecting to external connecting terminals and an intermediate portion 13. Each connecting portion 12 has electroconductive portions 14 for connecting with external connecting terminals. The cable 1 is formed by layering multiple elastomer sheets 1H. Each elastomer sheet 1H is formed with an elastomer raw material having no electroconductivity as a base, with rectangular elastomer regions 1T having electroconductivity on both ends and transmission paths for connecting the rectangular elastomer regions 1T on both ends.
摘要:
A brittle substrate cutting system according to the present invention includes a scribing apparatus including a scribing line forming means for forming a scribing line on a first surface of a brittle substrate; and a breaking apparatus for breaking the brittle substrate along the scribing line, wherein the breaking apparatus includes a first pressing controlling means for moving a pressing force upon a second surface of the brittle substrate opposing the first surface of the brittle substrate along the scribing line while the first surface of the brittle substrate is held.
摘要:
A contrast adjustment circuit for a liquid crystal display which is connected, when to be used, to an electronic apparatus such as a computer. The contrast adjustment circuit comprises an adjustment voltage supply circuit provided in an electronic apparatus, a reference voltage generation circuit provided in the liquid crystal display for generating a reference voltage substantially equal in absolute value to a contrast peak voltage of the liquid crystal display, and an operational amplifier for comparing the reference voltage and an adjustment voltage and supplying a voltage difference between the reference voltage and the adjustment voltage to a driving voltage input terminal of the liquid crystal display.
摘要:
An austenitic stainless steel sheet is produced by a twin-roll synchronous continuous casting process wherein the sheet has a Ni segregation ratio in the vicinity of its center section of 0.90 or more and .delta.Fe.sub.cal. (mass %) is 6 mass % or more. Ni segregation ratio is defined by the formula: {average Ni content of the segregated portion (%) }/{average Ni content of the cast sheet (%)}; where Ni content is expressed in % by mass. .delta.-Fe.sub.cal. (mass %) is defined by the formula: 3(Cr+1.5 Si+Mo+0.5 Nb)-2.8(Ni+0.5 Cu+0.5 Mn+30 C+30 N)-19.8; wherein the chemical elements are given in % by mass.
摘要:
[OBJECT] In an SOFC cell comprising a Cr-containing alloy or the like and an air electrode bonded together, the invention is to provide a cell capable of effectively restricting occurrence of Cr poisoning of the air electrode and capable also of effectively restricting occurrence of oxidation deterioration due to Cr depletion in the alloy or the like.[SOLUTION] In a cell for a solid oxide fuel cell (SOFC) comprising a Cr (chrome)-containing alloy or oxide and an air electrode bonded together, wherein on the surface of the alloy or oxide, there is formed a coating layer containing a spinel oxide comprised of a first mono metal oxide and a second mono metal oxide, the first mono metal oxide having an equilibrium dissociated oxygen partial pressure at 750° C. ranging from 1.83×10−20 to 3.44×10−13 atm., the second mono metal oxide having a lower equilibrium dissociated oxygen partial pressure at 750° C. than the first mono metal oxide.