公开(公告)号：US20050174197A1

公开(公告)日：2005-08-11

申请号：US10990785

申请日：2004-11-17

申请人： Clark Nguyen ,  Yuan Xie

发明人： Clark Nguyen ,  Yuan Xie

IPC分类号： H03H3/007 ,  H03H9/24 ,  H03H9/00

CPC分类号： H03H9/2431 ,  H03H3/0072 ,  H03H9/2436 ,  H03H2009/02354 ,  H03H2009/02503

摘要： A micromechanical resonate device having an extensional wine-glass mode shape is described herein. Different embodiments of the device may employ vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-glass mode shape to achieve lower impedance than previous UHF resonators at frequencies as high as 1.2-GHz with a Q of 3,700, and 1.47-GHz (highest to date for polysilicon micromechanical resonators) with a Q of 2,300. The 1.2-GHz resonator exhibits a measured motional resistance of 560 kΩ with a dc-bias voltage of 20V, which is 6× lower than measured on radial contour mode disk counterparts at the same frequency, and which can be driven down as low as 2 kΩ when a dc-bias voltage of 100V and electrode-to-resonator gap spacing of 460 Å are used. The above high Q and low impedance advantages, together with the multiple frequency, on-chip integration advantages afforded by electrostatically-transduced μmechanical resonators, may be utilized in the front-end RF filtering and oscillator functions needed by wireless communication devices.

摘要翻译： 本文描述了具有延伸葡萄酒玻璃模式形状的微机械谐振装置。 器件的不同实施例可采用振动多晶硅微机械环谐振器，利用独特的拉伸葡萄酒玻璃模式形状来实现比先前在频率高达1.2GHz的UHF谐振器更低的阻抗，Q为3,700和1.47GHz（最高 到目前为止多晶硅微机械谐振器），Q为2,300。 1.2GHz谐振器表现出560 kOmega的测量运动电阻，其直流偏置电压为20V，比相同频率下的径向轮廓模式盘对应器测得的低6倍，可以低至2 kOmega 当使用100V的直流偏置电压和460A的电极到谐振器间隙间隔时。 上述高Q和低阻抗优点以及由静电转换的机械谐振器提供的多频率片上集成优点可以用于无线通信设备所需的前端RF滤波和振荡器功能。

公开(公告)号：US20070046398A1

公开(公告)日：2007-03-01

申请号：US11511202

申请日：2006-08-28

申请人： Clark Nguyen ,  Yu-Wei Lin ,  Sheng-Shian Li ,  Yuan Xie

发明人： Clark Nguyen ,  Yu-Wei Lin ,  Sheng-Shian Li ,  Yuan Xie

IPC分类号： H03H9/00

CPC分类号： H03H3/0072 ,  H03H9/2436 ,  H03H2009/02354 ,  H03H2009/02503

摘要： Micromechanical structures having at least one lateral capacitive transducer gap filled with a dielectric and method of making same are provided. VHF and UHF MEMS-based vibrating micromechanical resonators filled with new solid dielectric capacitive transducer gaps to replace previously used air gaps have been demonstrated at 160 MHz, with Q's˜20,200 on par with those of air-gap resonators, and motional resistances (Rx's) more than 8× smaller at similar frequencies and bias conditions. This degree of motional resistance reduction comes about via not only the higher dielectric constant provided by a solid-filled electrode-to-resonator gap, but also by the ability to achieve smaller solid gaps than air gaps. These advantages with the right dielectric material may now allow capacitively-transduced resonators to match to the 50-377Ω impedances expected by off-chip components (e.g., antennas) in many wireless applications without the need for high voltages.

摘要翻译： 提供了具有填充有电介质的至少一个侧向电容性换能器间隙的微机械结构及其制造方法。 已经在160MHz处示出了填充有新的固体介电电容换能器间隙以替代以前使用的气隙的VHF和UHF MEMS振动微机械谐振器，其中Q为〜20,200与气隙谐振器相当，并且运动电阻（R < 在相似的频率和偏置条件下，小于8倍。 这种运动阻力降低的程度不仅通过固体填充的电极与谐振器间隙提供的较高的介电常数，而且通过与气隙实现更小的固体间隙的能力。 使用正确的介电材料的这些优点现在可以允许电容转换的谐振器与许多无线应用中的片外组件（例如，天线）预期的50-377Omega阻抗匹配，而不需要高电压。

公开(公告)号：US20050206479A1

公开(公告)日：2005-09-22

申请号：US11040766

申请日：2005-01-21

申请人： Clark Nguyen ,  Sheng-Shian Li

发明人： Clark Nguyen ,  Sheng-Shian Li

IPC分类号： H03H3/007 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46 ,  H03H9/50 ,  H03H9/54

CPC分类号： H03H9/505 ,  H03H3/0072 ,  H03H9/02338 ,  H03H9/2431 ,  H03H9/462 ,  H03H2009/02496 ,  H03H2009/02503

摘要： High-Q micromechanical resonator devices and filters utilizing same are provided. The devices and filters include a vibrating polysilicon micromechanical “hollow-disk” ring resonators obtained by removing quadrants of material from solid disk resonators, but purposely leaving intact beams or spokes of material with quarter-wavelength dimensions to non-intrusively support the resonators. The use of notched support attachments closer to actual extensional ring nodal points further raises the Q. Vibrating micromechanical hollow-disk ring filters including mechanically coupled resonators with resonator Q's greater than 10,000 achieve filter Q's on the order of thousands via a low-velocity coupling scheme. A longitudinally mechanical spring is utilized to attach the notched-type, low-velocity coupling locations of the resonators in order to achieve a extremely narrow passband.

摘要翻译： 提供了使用其的高Q微机械谐振器装置和滤波器。 器件和滤波器包括通过从固体盘谐振器去除象限的材料获得的振动多晶硅微机械“中空盘”环形谐振器，但有意地留下具有四分之一波长尺寸的完整的梁或辐条，以非侵入式地支撑谐振器。 使用更接近实际延伸环节点的切口支撑附件进一步提高了Q.振动微机械中空盘环形滤波器，包括谐振器Q大于10,000的机械耦合谐振器，通过低速耦合方案实现了数千级的滤波器Q 。 使用纵向机械弹簧来连接谐振器的缺口型低速耦合位置，以便实现非常窄的通带。