公开(公告)号：US20180219529A1

公开(公告)日：2018-08-02

申请号：US15872265

申请日：2018-01-16

申请人： MEMS-VISION INTERNATIONAL INC.

发明人： MOHANNAD ELSAYED ,  MOURAD EL-GAMAL ,  FREDERIC NABKI ,  PAUL-VAHE CICEK

IPC分类号： H03H9/205 ,  B81B3/00 ,  H03H9/17

CPC分类号： H03H9/205 ,  B81B3/0086 ,  B81B2201/0271 ,  B81B2207/07 ,  H03H3/0072 ,  H03H3/0075 ,  H03H9/171 ,  H03H9/2436 ,  H03H2009/155 ,  H03H2009/241

摘要： Micromachined microelectromechanical systems (MEMS) based resonators offer integration with other MEMS devices and electronics. Whilst piezoelectric film bulk acoustic resonators (FBAR) generally exhibit high electromechanical transduction efficiencies and low signal transmission losses they also suffer from low quality factors and limited resonance frequencies. In contrast electrostatic FBARs can yield high quality factors and resonance frequencies but suffer from increased fabrication complexity. lower electromechanical transduction efficiency and significant signal transmission loss. Accordingly, it would be beneficial to overcome these limitations by reducing fabrication complexity via a single metal electrode layer topping the resonator structure and supporting relatively low complexity/low resolution commercial MEMS fabrication processes by removing the fabrication requirement for narrow transduction gaps. Beneficially, embodiments of the invention provide MEMS circuits with electrostatic tuning and provide resonator designs combining the advantages of piezoelectric actuation and bulk-mode resonators.

公开(公告)号：US09083300B2

公开(公告)日：2015-07-14

申请号：US13094707

申请日：2011-04-26

申请人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

发明人： Chi Shun Lo ,  Jonghae Kim ,  Sang-June Park ,  Sanghoon Joo ,  Chengjie Zuo ,  Changhan Yun

IPC分类号： H03H9/70 ,  H03H9/00 ,  H01P1/213 ,  H03H9/02 ,  H03H9/24 ,  H03H9/56 ,  G09G3/34 ,  H03H3/02

CPC分类号： H03H9/0095 ,  G09G3/3493 ,  G09G2310/0267 ,  G09G2310/027 ,  H01P1/2135 ,  H03H9/0014 ,  H03H9/02228 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2463 ,  H03H9/564 ,  H03H2003/027 ,  H03H2009/02496 ,  H03H2009/02527 ,  H03H2009/241

摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.

摘要翻译： 本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。 一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。 第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。 可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。 压电层设置在第一导电层和第二导电层之间。 压电层包括压电材料。 压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

公开(公告)号：US20150102703A1

公开(公告)日：2015-04-16

申请号：US14512661

申请日：2014-10-13

申请人： Seiko Epson Corporation

发明人： Akinori YAMADA

IPC分类号： H02N1/00 ,  B81B7/00

CPC分类号： H03H3/0072 ,  H03H9/2436 ,  H03H2009/02385

摘要： A MEMS vibrator includes: a substrate; a supporting portion which is connected to the substrate; a base portion which is connected to the supporting portion; and a plurality of vibration portions which is separated from the substrate and extends in different directions from each other from the base portion, and in which the adjacent vibration portions vibrate in a phase of a reverse direction to each other. In the vibration portion, the base portion has a vibration node, and at least a part of the supporting portion is overlapped with the vibration node in a planar view.

摘要翻译： MEMS振动器包括：基板; 连接到所述基板的支撑部; 连接到所述支撑部的基部; 以及多个振动部，其与基板分离并且从基部彼此沿彼此不同的方向延伸，并且其中相邻的振动部以彼此相反的方向振动。 在振动部分中，基部具有振动节点，并且支撑部分的至少一部分在俯视图中与振动节点重叠。

公开(公告)号：US08981874B2

公开(公告)日：2015-03-17

申请号：US13257053

申请日：2010-03-15

申请人： Peter Steeneken

发明人： Peter Steeneken

IPC分类号： H03H9/24 ,  G06F17/50 ,  H03H9/02

CPC分类号： H03H9/02433 ,  H03H9/2405 ,  H03H9/2436 ,  H03H2009/02354 ,  H03H2009/0237 ,  H03H2009/0244 ,  H03H2009/02527 ,  H03H2009/2442

摘要： A resonator device (200) comprises a base (206) comprising an anchor (204) and a vibration unit (212) connected to the anchor (204). The vibration unit (212) is configured to have a first vibration mode (218) and a second vibration mode (216) different from the first vibration mode (218). According to an embodiment, the vibration unit (212) is configured such that the first vibration mode (218) and the second vibration mode (216) destructively interfere at the anchor (204).

摘要翻译： 谐振器装置（200）包括基座（206），其包括锚（204）和连接到锚（204）的振动单元（212）。 振动单元（212）被配置为具有与第一振动模式（218）不同的第一振动模式（218）和第二振动模式（216）。 根据实施例，振动单元（212）构造成使得第一振动模式（218）和第二振动模式（216）在锚（204）处相消干涉。

公开(公告)号：US08624137B2

公开(公告)日：2014-01-07

申请号：US13120351

申请日：2009-09-17

申请人： Kim Phan Le

发明人： Kim Phan Le

IPC分类号： H01H1/14

CPC分类号： H03H9/2405 ,  H03H9/2436 ,  H03H9/505 ,  H03H2009/2442

摘要： A device has a micro electromechanical structure (10) with a first arm (102), at least one second arm (104a, b) connected to each other via a connection (100). Both arms (102, 104a, b) and the connection (100) are preferably made of a single crystalline body. The first and second arm (102, 104a, b) have end portions attached to a substrate, but otherwise the arms and their connection are free to move relative to the substrate. The first and second arm (102, 104a, b) extending from the end portions to the connection (100) along different directions, preferably perpendicularly to each other. An electrode (12) is provided on the substrate, adjacent to the micro electromechanical structure (10) to excite vibration of the structure. The two arms in different directions make it possible to reduce the nonlinearity of the stiffness during vibrations of the structure.

摘要翻译： 一种装置具有具有第一臂（102）的微机电结构（10），经由连接（100）彼此连接的至少一个第二臂（104a，b）。 两个臂（102,104a，b）和连接件（100）优选由单个结晶体制成。 第一和第二臂（102,104a，b）具有附接到基底的端部，但是否则臂和它们的连接相对于基底自由移动。 第一臂和第二臂（102,104a，b）沿着不同的方向从端部延伸到连接（100），优选地彼此垂直。 电极（12）设置在基板上，与微机电结构（10）相邻，以激发结构的振动。 不同方向的两个臂可以降低结构振动期间刚度的非线性。

公开(公告)号：US08607630B2

公开(公告)日：2013-12-17

申请号：US12680687

申请日：2008-10-08

申请人： Fabrice Casset

发明人： Fabrice Casset

IPC分类号： G01C19/00

CPC分类号： H03H9/02259 ,  H03H3/0072 ,  H03H9/2436 ,  H03H9/2463 ,  H03H2009/02496 ,  H03H2009/02503

摘要： A vibrating nano-scale or micro-scale electromechanical component including a vibrating mechanical element that cooperates with at least one detection electrode. The detection electrode is flexible and is configured to vibrate in phase opposition relative to the vibrating mechanical element. Such a component may find, for example, application to resonators or motion sensors.

摘要翻译： 振动纳米尺度或微尺度机电部件，其包括与至少一个检测电极配合的振动机械元件。 检测电极是柔性的并且被配置成相对于振动机械元件相对振动。 这样的组件可以发现例如应用于谐振器或运动传感器。

公开(公告)号：US20130134829A1

公开(公告)日：2013-05-30

申请号：US13814736

申请日：2011-06-13

申请人： Takefumi Saito ,  Noritoshi Kimura

发明人： Takefumi Saito ,  Noritoshi Kimura

IPC分类号： H02N1/00

CPC分类号： H02N1/008 ,  H03H3/0072 ,  H03H9/02338 ,  H03H9/2436

摘要： A variation in a resonance frequency due to variation in dimension accuracy of the supporting structure of the vibrating unit is reduced, and energy loss leaked from the supporting structure is reduced as much as possible. The electrostatic drive disk-type MEMS vibrator includes: a disk type vibrating unit; drive electrodes disposed at a prescribed gap g from the peripheral portion of the disk type vibrating unit and disposed at both sides of the vibrating unit so as to face each other; a unit for applying alternating current bias voltages of the same phase to the drive electrodes; and detection units that obtain outputs corresponding to the capacitance between the disk type vibrating unit and the drive electrodes. The disk type vibrating unit is supported by a pillar-shaped supporting structure disposed upright at the center of the disk and a transverse cross-sectional shape of the supporting structure is non-circular.

摘要翻译： 由于振动单元的支撑结构的尺寸精度的变化导致的共振频率的变化减小，并且从支撑结构泄漏的能量损失尽可能地减小。 静电驱动盘型MEMS振子包括：盘式振动单元; 驱动电极与盘式振动单元的周边部分配置成规定的间隙g，并设置在振动单元的两侧，以便彼此面对; 用于将相同相位的交流偏压施加到驱动电极的单元; 以及检测单元，其获得与盘型振动单元和驱动电极之间的电容相对应的输出。 圆盘型振动单元由直立设置在圆盘中心的柱状支撑结构支撑，支撑结构的横截面形状为非圆形。

公开(公告)号：US20120229226A1

公开(公告)日：2012-09-13

申请号：US13497805

申请日：2010-09-27

申请人： Aarne Oja ,  Tuomas Pensala ,  Johanna Meltaus

发明人： Aarne Oja ,  Tuomas Pensala ,  Johanna Meltaus

IPC分类号： H03B5/32

CPC分类号： H03H9/02259 ,  B81B3/0081 ,  B81B2201/0271 ,  H03H3/0076 ,  H03H9/02338 ,  H03H9/02448 ,  H03H9/2436 ,  H03H9/2452 ,  H03H9/2463 ,  H03H2003/027 ,  H03H2003/0407 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02511 ,  H03H2009/241 ,  H03H2009/2442

摘要： The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f0, coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).

摘要翻译： 本发明涉及一种微机械谐振器，其包括第一材料（2）的衬底（1），悬挂于支撑结构（1）的谐振器（3），谐振器（3）至少部分由相同的材料（2）组成， 作为用于在特定频率f0处的谐振的支撑结构和尺寸，用于启动，维持和耦合谐振器（3）的谐振到外部电路（6）的耦合装置（5）和包括第二材料的谐振器 （4），其热性质与第一材料（2）不同。 根据本发明，谐振器（3）包括集中在谐振器（3）的特定位置的第二材料（4）。

公开(公告)号：US08264291B2

公开(公告)日：2012-09-11

申请号：US12794318

申请日：2010-06-04

申请人： Shinya Morita

发明人： Shinya Morita

IPC分类号： H03B5/30 ,  H03H9/15

CPC分类号： H03H3/0072 ,  H03H9/02259 ,  H03H9/02338 ,  H03H9/02433 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2452 ,  H03H2009/02488 ,  H03H2009/02496 ,  H03H2009/2442 ,  Y10T29/49117

摘要： Disclosed herein is a resonator including, a vibrating portion having a conductor portion, and three or more insulating portions provided so as to electrically separate the conductor portion into a plurality of blocks, wherein when a potential difference is caused across both ends in each of the three or more insulating portions, the vibrating portion carries out a resonance vibration based on a longitudinal vibration in accordance with a frequency of an A.C. signal inputted to each of corresponding ones of the plurality of blocks in the conductor portion.

摘要翻译： 这里公开了一种谐振器，包括具有导体部分的振动部分和设置成将导体部分电分离成多个块体的三个或更多个绝缘部分，其中当在每个块体中的两端引起电位差时 三个或更多个绝缘部分，振动部分根据输入到导体部分中的多个块中的每一个块中的每一个的交流信号的频率，基于纵向振动来执行谐振。

公开(公告)号：US08149072B2

公开(公告)日：2012-04-03

申请号：US12470855

申请日：2009-05-22

申请人： Markku Anttoni Oksanen ,  Ilkka Tittonen ,  Mika Petteri Koskenvuori

发明人： Markku Anttoni Oksanen ,  Ilkka Tittonen ,  Mika Petteri Koskenvuori

IPC分类号： H03H9/24 ,  H03H9/46 ,  H03H9/48

CPC分类号： H03H9/2436 ,  H03H9/462 ,  H03H9/505 ,  H03H2009/0237 ,  H03H2009/02488

摘要： A resonator includes a substantially disk shaped portion having a plurality of axes of symmetry and is configured to resonate in a plurality of resonant modes by symmetrically deforming about the plurality of axes of symmetry.

摘要翻译： 谐振器包括具有多个对称轴的基本盘形部分，并且被配置为通过围绕多个对称轴对称地变形而以多个谐振模式谐振。