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公开(公告)号：US5811816A
公开(公告)日：1998-09-22
申请号：US692965
申请日：1996-08-07
IPC分类号： G01T1/24 , F17C3/08 , F25B9/00 , F25B9/02 , F25D3/10 , F25D19/00 , G01J5/06 , G01T7/00 , H01L27/14 , G01T1/00
CPC分类号： H01J37/244 , F17C3/085 , F25B9/02 , F25D19/006 , G01J5/061 , F17C2203/0337 , F17C2203/0345 , F17C2203/0395 , F17C2205/0332 , F17C2205/0341 , F17C2221/014 , F17C2223/0153 , F17C2223/033 , F17C2227/0353 , F17C2227/0355 , F17C2227/036 , F17C2270/0509 , F17C2270/0518 , H01J2237/002 , H01J2237/2442 , H01J2237/2555
摘要： A radiation detector having an evacuated envelope, a radiation detector on a cold finger support in the evacuated space, a closed cycle gas cooling system to cool the cold finger to provide cryogenic operation of the radiation detector, and a getter in the evacuated space to maintain an evacuated condition. The evacuated envelope includes a radiation window. The radiation detector is preferably an X-ray detector employed in an energy dispersive spectrometry system. The evacuated space is preferably held at a pressure of less than about 1 mTorr to achieve molecular flow of remaining gas molecules, minimizing parasitic heat input. The closed cycle gas cooling system employs compressed refrigerant, which is precooled in a counterflow heat exchanger and allowed to expand in proximity to the cold finger, thus absorbing heat and maintaining cryogenic temperatures. A getter material, preferably activated carbon, is provided to absorb gasses and maintain the low pressure during operation. A vibration effect attenuation system is provided to reduce effect of cooler induced reduction in detector resolution.
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公开(公告)号：US4379348A
公开(公告)日：1983-04-05
申请号：US189995
申请日：1980-09-23
申请人： David J. Haas , Costas Blionas , Joseph P. Muenzen
发明人： David J. Haas , Costas Blionas , Joseph P. Muenzen
CPC分类号： G01N23/043
摘要： The present invention involves an optical magnification system for viewing magnified portions of articles being inspected in X-ray examination systems. A combination of a full screen lens and at least one magnification lens are provided for variously inspecting the entire article or only suspicious parts thereof.
摘要翻译： 本发明涉及一种用于在X射线检查系统中观察被检查物品的放大部分的光学放大系统。 提供全屏幕镜头和至少一个放大镜头的组合，用于对整个物品或其可疑部件进行各种检查。
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3.发明授权Mechanical shutter for protecting an x-ray detector against high-energy electron or x-ray damage 失效用于保护X射线检测器免受高能量电子或X射线损伤的机械快门
公开(公告)号：US5569925A
公开(公告)日：1996-10-29
申请号：US264395
申请日：1994-06-23
IPC分类号： H01J37/252 , H01J31/50 , H01J37/244
CPC分类号： H01J37/244 , H01J2237/24415
摘要： A pass-through shutter mechanism enables the semiconductor crystal of an energy dispersive x-ray detector to extend beyond the shutter mechanism for analysis, adjacent to the sample, achieving optimum solid angle collection efficiency. The shutter mechanism provides optimum protection of the semiconductor detector crystal from high energy x-ray or secondary electron events produced in the chambers of electron microscopes, microprobes, x-ray spectrometers, etc.
摘要翻译： 通过快门机构使得能量色散X射线检测器的半导体晶体能够延伸超过用于分析的快门机构，与样品相邻，以获得最佳的立体角收集效率。 快门机构提供半导体检测器晶体与电子显微镜，微探针，x射线光谱仪等室内产生的高能X射线或二次电子事件的最佳保护。
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公开(公告)号：US5552608A
公开(公告)日：1996-09-03
申请号：US494501
申请日：1995-06-26
IPC分类号： G01T1/24 , F17C3/08 , F25B9/00 , F25B9/02 , F25D3/10 , F25D19/00 , G01J5/06 , G01T7/00 , H01L27/14 , G01T1/00
CPC分类号： H01J37/244 , F17C3/085 , F25B9/02 , F25D19/006 , G01J5/061 , F17C2203/0337 , F17C2203/0345 , F17C2203/0395 , F17C2205/0332 , F17C2205/0341 , F17C2221/014 , F17C2223/0153 , F17C2223/033 , F17C2227/0353 , F17C2227/0355 , F17C2227/036 , F17C2270/0509 , F17C2270/0518 , H01J2237/002 , H01J2237/2442 , H01J2237/2555
摘要： A radiation detector having an evacuated envelope, a radiation detector on a cold finger support in the evacuated space, a closed cycle gas cooling system to cool the cold finger to provide cryogenic operation of the radiation detector, and a getter in the evacuated space to maintain an evacuated condition. The evacuated envelope includes a radiation window. The radiation detector is preferably an X-ray detector employed in an energy dispersive spectrometry system. The evacuated space is preferably held at a pressure of less than about 1 mTorr to achieve molecular flow of remaining gas molecules, minimizing parasitic heat input. The closed cycle gas cooling system employs compressed refrigerant, which is precooled in a counterflow heat exchanger and allowed to expand in proximity to the cold finger, thus absorbing heat and maintaining cryogenic temperatures. A getter material, preferably activated carbon, is provided to absorb gasses and maintain the low pressure during operation. A vibration effect attenuation system is provided to reduce effect of cooler induced reduction in detector resolution.
摘要翻译： 具有抽真空外壳的辐射探测器，位于抽空空间中的冷指支架上的辐射探测器，用于冷却冷指以提供辐射探测器的低温操作的封闭循环气体冷却系统，以及在抽空空间中的吸气剂以维持 撤离状态。 抽真空的外壳包括一个辐射窗。 放射线检测器优选地是用于能量色散光谱测定系统中的X射线检测器。 抽真空的空间优选保持在小于约1mTorr的压力下，以实现剩余气体分子的分子流动，使寄生热输入最小化。 封闭循环气体冷却系统采用压缩制冷剂，其在逆流热交换器中被预冷却并允许在冷手指附近膨胀，从而吸收热量并保持低温。 提供吸气剂材料，优选活性炭，以吸收气体并在操作期间保持低压。 提供振动效应衰减系统，以减少冷却器诱导的检测器分辨率降低的影响。
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公开(公告)号：US5225677A
公开(公告)日：1993-07-06
申请号：US898772
申请日：1992-06-12
IPC分类号： G01T1/24
CPC分类号： G01T1/244
摘要： An x-ray detector assembly is improved by covering the detector holder with a dielectric film to prevent contamination of the sides of the detector without covering the front of the detector. The film does not hermetically seal the detector holder.
摘要翻译： 通过用电介质膜覆盖检测器支架来改善X射线检测器组件，以防止检测器的侧面被污染而不覆盖检测器的前部。 胶片不会密封检测器支架。
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公开(公告)号：US4469403A
公开(公告)日：1984-09-04
申请号：US433757
申请日：1982-10-12
申请人： David J. Haas , Costas Blionas , Joseph P. Muenzen
发明人： David J. Haas , Costas Blionas , Joseph P. Muenzen
CPC分类号： G01N23/043
摘要： A lens switching system is provided for use in X-ray examination devices. The lens system includes at least a full viewing lens for viewing the entire object and a magnification lens which can be switched into the optical axis and controlled to different positions for magnifying the object. The optical axis for the magnification lens can be moved by means of a control handle controlling the lens system so that magnified portions of the object can be observed through the magnification lens.
摘要翻译： 提供用于X射线检查装置的透镜切换系统。 透镜系统至少包括用于观察整个物体的完整观察透镜和可以切换到光轴并被控制到用于放大物体的不同位置的放大镜。 用于放大透镜的光轴可以通过控制透镜系统的控制手柄来移动，从而通过放大镜可以观察物体的放大部分。
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