公开(公告)号：US09018561B2

公开(公告)日：2015-04-28

申请号：US12284031

申请日：2008-09-17

申请人： Richard L Sandstrom ,  Daniel J. W. Brown ,  Thomas Hoffmann ,  Jason D Robinson ,  Craig W Unick

发明人： Richard L Sandstrom ,  Daniel J. W. Brown ,  Thomas Hoffmann ,  Jason D Robinson ,  Craig W Unick

IPC分类号： B23K26/00 ,  C30B13/24 ,  B23K26/06 ,  B23K26/073 ,  C30B29/06 ,  H01L21/67

CPC分类号： C30B13/24 ,  B23K26/0622 ,  B23K26/0738 ,  C30B29/06 ,  H01L21/67115

摘要： An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.

公开(公告)号：US20090116530A1

公开(公告)日：2009-05-07

申请号：US12284031

申请日：2008-09-17

申请人： Richard L. Sandstrom ,  Daniel J. W. Brown ,  Thomas Hofmann ,  Jason D. Robinson ,  Craig W. Unick

发明人： Richard L. Sandstrom ,  Daniel J. W. Brown ,  Thomas Hofmann ,  Jason D. Robinson ,  Craig W. Unick

IPC分类号： H01S3/22

CPC分类号： C30B13/24 ,  B23K26/0622 ,  B23K26/0738 ,  C30B29/06 ,  H01L21/67115

摘要： An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.

摘要翻译： 一种用于大功率宽带细长光束激光退火光源的装置和方法，其可以包括具有谐振腔的气体放电种子激光振荡器，提供种子激光输出脉冲; 气体放电放大器激光器，放大种子激光输出脉冲，以提供放大的种子激光脉冲输出; 种子激光器和放大器激光器之间的发散校正多光学元件光学组件。 发散校正光学组件可以在放大器激光器的放电区域内调整种子激光器输出脉冲的尺寸和/或形状，以便调节放大的种子激光脉冲输出的输出参数。 发散校正光学组件可以包括具有可调焦点的望远镜。 可调节望远镜可以包括基于从放大器激光器输出的放大的种子激光器的感测参数的主动反馈控制致动器。