公开(公告)号：US4642162A

公开(公告)日：1987-02-10

申请号：US815603

申请日：1986-01-02

申请人： David J. Brownell ,  Daniel C. Christensen ,  David G. Erie ,  Daniel Youngner

发明人： David J. Brownell ,  Daniel C. Christensen ,  David G. Erie ,  Daniel Youngner

IPC分类号： H01L21/3105 ,  H01L21/768 ,  B44C1/22 ,  C03B15/00

CPC分类号： H01L21/76819 ,  H01L21/31055

摘要： A method is disclosed for the planarization of a semiconductor device structure by a two stage planarization process which comprises: applying a dielectric layer over a first conductive layer, spin coating an organic layer onto the first dielectric layer, etching the device in a plasma etching process to substantially remove the organic planarization layer, then etching the device in a plasma etching process which etches the exposed dielectric layer to substantially remove all of it, removing the remaining organic planarization layer, followed by the application of a second dielectric layer under bias sputter deposition conditions. The bias sputter deposition fills trenches and eliminates peaks in the remaining first dielectric layer as it builds up the second dielectric layer. The process planarizes the dielectric layer without thickness variations dependent upon conductor layer pattern density.

摘要翻译： 公开了一种通过两级平坦化工艺对半导体器件结构进行平面化的方法，该方法包括：在第一导电层上施加电介质层，将有机层旋涂到第一介电层上，在等离子体蚀刻工艺中蚀刻器件 以基本上去除有机平坦化层，然后在等离子体蚀刻工艺中蚀刻该器件，其蚀刻暴露的电介质层以基本上除去其中的所有材料，去除剩余的有机平坦化层，随后在偏置溅射沉积下施加第二介电层 条件。 偏置溅射沉积填充沟槽并消除剩余的第一介电层中的峰值，因为它构成第二介电层。 该过程使介电层平坦化，而不依赖于导体层图案密度的厚度变化。

公开(公告)号：US06179313B2

公开(公告)日：2001-01-30

申请号：US09378913

申请日：1999-08-23

申请人： Daniel C. Christensen

发明人： Daniel C. Christensen

IPC分类号： B62D6100

CPC分类号： B62J23/00 ,  B62J21/00

摘要： A motorcycle exhaust pipe heat shield arranged for protecting the footwear, clothing, and the foot of the motorcycle passenger. The shield is attachable to the motorcycle in a location intermediate the engine exhaust pipe and the floorboard for the passenger's foot. The shield presents an upright planar portion for shielding from the heat of the exhaust pipe, and it also presents an attachment bracket for readily and securely attaching the entire shield to the motorcycle. The method of making the shield includes the cutting of the blank from a sheet of metal and then appropriately forming and bending the blank to present the final configuration of the shield which is also surface finished with a reflective surface for esthetics as well as heat reflection.

摘要翻译： 摩托车排气管隔热罩，用于保护摩托车乘客的鞋类，服装和脚部。 该护罩可在发动机排气管和乘员脚的地板之间的位置附接到摩托车。 屏蔽件呈现用于屏蔽排气管的热量的直立的平面部分，并且还具有用于将整个屏蔽件容易且牢固地附接到摩托车的附接支架。 制造护罩的方法包括从金属板切割坯件，然后适当地形成和弯曲坯件以呈现屏蔽的最终构造，其还用用于美观的反射表面以及热反射进行表面加工。