公开(公告)号：US06560253B1

公开(公告)日：2003-05-06

申请号：US09922396

申请日：2001-08-03

申请人： Timothy C. Munks ,  David J. Allie ,  Paul E. Dunn

发明人： Timothy C. Munks ,  David J. Allie ,  Paul E. Dunn

IPC分类号： H01S310

CPC分类号： H01S3/13 ,  G02B5/20

摘要： An apparatus for monitoring and controlling the wavelength of laser radiation includes at a least one optical filter for receiving laser radiation and for transmitting and reflecting first and second filtered beams, respectively. The beams are filtered according to respective first and second spectral filter functions that cross at at least one crossing wavelength. A beam comparison element compares the first and second filtered beams and produces an error signal representative of the deviation of the wavelength of the laser radiation from a set-point wavelength. Varying the angle of incidence of the laser radiation upon at least one optical filter varies the spectral filter function of that filter for selecting or varying the operating wavelength of the laser. A laser wavelength controller can receive the error signal for stabilizing or tuning the wavelength of the laser radiation.

摘要翻译： 用于监测和控制激光辐射的波长的装置包括在至少一个用于接收激光辐射的光学滤波器和用于分别发射和反射第一和第二滤波光束的至少一个滤光器。 光束根据在至少一个交叉波长处交叉的相应的第一和第二光谱滤波器函数进行滤波。 光束比较元件比较第一和第二滤波光束并产生表示激光辐射的波长与设定点波长的偏差的误差信号。 将激光辐射的入射角改变为至少一个滤光器改变该滤光器的光谱滤光器功能，用于选择或改变激光器的工作波长。 激光波长控制器可以接收用于稳定或调谐激光辐射波长的误差信号。

公开(公告)号：US06353623B1

公开(公告)日：2002-03-05

申请号：US09224960

申请日：1999-01-04

申请人： Timothy C. Munks ,  Paul E. Dunn ,  David J. Allie

发明人： Timothy C. Munks ,  Paul E. Dunn ,  David J. Allie

IPC分类号： H01S310

CPC分类号： H01S5/0687 ,  H01S5/0617 ,  H01S5/0683

摘要： Apparatus and methods for monitoring the wavelength of laser radiation and that provide a temperature-corrected error signal responsive to the deviation of the wavelength of the laser radiation from a nominal wavelength is disclosed. The apparatus includes a least one optical filter for filtering the laser radiation according to at least one spectral filter function to produce filtered laser radiation and at least one optical detector for detecting the filtered laser radiation to produce a first detected signal. The apparatus also includes a temperature sensor for sensing temperature characteristic of at least the optical filter and processing circuitry for providing a temperature-corrected output signal responsive to the deviation of the wavelength of the laser radiation from the nominal wavelength. The processing circuitry includes an error circuit for providing, responsive to at least the first detected signal, an uncorrected error signal responsive the deviation of the wavelength of the laser radiation from the nominal wavelength and a memory for providing offset values corresponding to selected temperatures. The processing circuitry, responsive to the temperature sensor, modifies the uncorrected signal based on at least one offset value to produce the temperature-corrected error signal. The laser wavelength monitoring apparatus can be advantageously combined with a laser and a laser wavelength control to provide a laser having a regulated or tunable wavelength.

摘要翻译： 公开了用于监测激光辐射的波长并且响应于激光辐射的波长与标称波长的偏差而提供温度校正的误差信号的装置和方法。 该装置包括至少一个光学滤波器，用于根据至少一个光谱滤波器功能对激光辐射进行滤波以产生滤波的激光辐射;以及至少一个光学检测器，用于检测滤波的激光辐射以产生第一检测信号。 该装置还包括用于感测至少光学滤波器的温度特性的温度传感器和用于响应于激光辐射的波长与标称波长的偏差而提供温度校正的输出信号的处理电路。 所述处理电路包括误差电路，用于响应于至少所述第一检测信号，响应来自所述标称波长的所述激光辐射的波长的偏差以及用于提供对应于所选择的温度的偏移值的存储器来提供未校正的误差信号。 响应于温度传感器的处理电路基于至少一个偏移值来修改未校正的信号，以产生温度校正的误差信号。 激光波长监测装置可以有利地与激光和激光波长控制组合，以提供具有调节或可调波长的激光。

公开(公告)号：US06134253A

公开(公告)日：2000-10-17

申请号：US025987

申请日：1998-02-19

申请人： Timothy C. Munks ,  Paul E. Dunn ,  David J. Allie

发明人： Timothy C. Munks ,  Paul E. Dunn ,  David J. Allie

IPC分类号： G02B5/20 ,  H01S3/13 ,  H01S5/0687 ,  H01S3/00

CPC分类号： H01S3/13 ,  G02B5/20 ,  H01S5/0687

摘要： An apparatus for monitoring and controlling the wavelength of laser radiation includes at a least one optical filter for receiving laser radiation and for transmitting and reflecting first and second filtered beams, respectively. The beams are filtered according to respective first and second spectral filter functions that cross at least one crossing wavelength. A beam comparing element compares the intensities of the first and second filtered beams and produces an error signal responsive to the deviation of the wavelength of the laser radiation from a set point wavelength. The beam comparing element can include first and second optical detectors and an error circuit for producing the error signal by taking a ratio or the difference of the signals detected by the detectors. Varying the angle of incidence of the laser radiation upon at least one optical filter varies the spectral filter function of that for selecting or varying the operating wavelength of the laser. A laser wavelength controller can receive the error signal for stabilizing or tuning the wavelength of the laser radiation. Several addition embodiments of the invention are disclosed.

摘要翻译： 用于监测和控制激光辐射的波长的装置包括在至少一个用于接收激光辐射的光学滤波器和用于分别发射和反射第一和第二滤波光束的至少一个滤光器。 根据与至少一个交叉波长交叉的相应的第一和第二频谱滤波器函数对波束进行滤波。 光束比较元件比较第一和第二滤波光束的强度，并响应于激光辐射的波长与设定点波长的偏差产生误差信号。 光束比较元件可以包括第一和第二光学检测器和用于通过获取由检测器检测的信号的比率或差值来产生误差信号的误差电路。 将激光辐射的入射角改变为至少一个滤光器改变用于选择或改变激光器的工作波长的光谱滤波器功能。 激光波长控制器可以接收用于稳定或调谐激光辐射波长的误差信号。 公开了本发明的几个附加实施例。

公开(公告)号：US5400417A

公开(公告)日：1995-03-21

申请号：US281712

申请日：1994-07-27

申请人： David J. Allie ,  James D. Farina

发明人： David J. Allie ,  James D. Farina

IPC分类号： G02F1/01 ,  G02F1/21 ,  G02B6/10

CPC分类号： G02F1/0123 ,  G02F2001/212

摘要： An electro-optic modulator includes a closed loop bias control system for maintaining the modulator at its half-power point by modulating a time varying signal on and off at a modulation frequency f.sub.m. The modulation frequency f.sub.m is much lower than the frequency components within the spectrum of the time varying signal, such that, energy within the time varying signal spectrum is recovered at the modulation frequency when the modulator is not operating at the half-power point. A phase sensitive demodulator operating at the modulation frequency f.sub.m demodulates a signal indicative of the modulator optical output signal to provide a DC voltage signal value indicative of the half-power point bias error value. The time varying voltage signal may be a dither noise signal or any other time varying signal such as a signal with a single frequency component (e.g. a sine or cosine) or a signal with a plurality of frequency components (e.g., a square wave).

摘要翻译： 电光调制器包括一个闭环偏置控制系统，用于通过以调制频率fm调制时变信号的开和关来将调制器保持在其半功率点。 调制频率fm远低于时变信号频谱内的频率分量，使得当调制器不在半功率点工作时，时变信号频谱内的能量以调制频率恢复。 以调制频率fm工作的相位敏感解调器解调表示调制器光输出信号的信号，以提供表示半功率点偏差误差值的DC电压信号值。 时变电压信号可以是抖动噪声信号或任何其它时变信号，例如具有单个频率分量（例如正弦或余弦）的信号或具有多个频率分量（例如，方波）的信号。

公开(公告)号：US06289028B1

公开(公告)日：2001-09-11

申请号：US09231913

申请日：1999-01-14

申请人： Timothy C. Munks ,  David J. Allie ,  Paul E. Dunn

发明人： Timothy C. Munks ,  David J. Allie ,  Paul E. Dunn

IPC分类号： H01S310

CPC分类号： G02B5/20 ,  H01S3/13 ,  H01S5/0687

摘要： An apparatus for monitoring and controlling the wavelength of laser radiation includes at a least one optical filter for receiving laser radiation and for transmitting and reflecting first and second filtered beams, respectively. Alternatively, the first and second beams may be transmitted by separate filters. The beams are filtered according to respective first and second spectral filter functions that cross at at least one crossing wavelength. A beam comparison element compares the first and second filtered beams and produces an error signal representative of the deviation of the wavelength of the laser radiation from a set-point wavelength. The beam comparison element can include first and second optical detectors and an error circuit for producing the error signal by taking a ratio or the difference of the signals detected by the detectors. Varying the angle of incidence of the laser radiation upon at least one optical filter varies the spectral filter function of that filter for selecting or varying the operating wavelength of the laser. A laser wavelength controller can receive the error signal for stabilizing or tuning the wavelength of the laser radiation. Several embodiments of the invention are disclosed.

摘要翻译： 用于监测和控制激光辐射的波长的装置包括在至少一个用于接收激光辐射的光学滤波器和用于分别发射和反射第一和第二滤波光束的至少一个滤光器。 或者，第一和第二波束可以通过单独的滤波器传输。 光束根据在至少一个交叉波长处交叉的相应的第一和第二光谱滤波器函数进行滤波。 光束比较元件比较第一和第二滤波光束并产生表示激光辐射的波长与设定点波长的偏差的误差信号。 光束比较元件可以包括第一和第二光学检测器和误差电路，用于通过获取由检测器检测的信号的比率或差值来产生误差信号。 将激光辐射的入射角改变为至少一个滤光器改变该滤光器的光谱滤光器功能，以选择或改变激光器的工作波长。 激光波长控制器可以接收用于稳定或调谐激光辐射波长的误差信号。 公开了本发明的几个实施例。

公开(公告)号：US20110085580A1

公开(公告)日：2011-04-14

申请号：US12729394

申请日：2010-03-23

申请人： David J. Allie ,  Joel Fontanella

发明人： David J. Allie ,  Joel Fontanella

IPC分类号： H01S3/22

CPC分类号： H01S3/09713 ,  H01S3/09702 ,  H01S3/1305 ,  H01S3/1306 ,  H01S3/2232

摘要： An RF powered CO2 gas-discharge laser includes discharge electrodes and a lasing gas mixture between the electrode. The lasing gas mixture is ionized when the RF power is applied to the electrodes and laser action is initiated when the RF power has been applied for a duration sufficient to ignite a discharge in the lasing gas mixture. The gas mixture is pre-ionized by periodically applying the RF power to the electrodes for a predetermined period during which ignition of a discharge is not expected to occur. RF power reflected back from the electrodes is monitored. If the monitored power falls below a predetermined level indicative of the imminent onset of laser action before the predetermined duration has elapsed, application of the RF power to the electrodes is terminated to prevent the laser action from occurring.

摘要翻译： RF功率CO2气体放电激光器包括放电电极和电极之间的激光气体混合物。 当RF功率施加到电极时，激光气体混合物被电离，并且当已经施加RF功率持续足以点燃激光气体混合物中的放电的持续时间时开始激光作用。 气体混合物通过周期性地将电力施加到电极预定的期间，预期不会发生放电点火，预先进行电离。 监测从电极反射回来的RF功率。 如果在预定持续时间过去之前监视功率低于指示激光作用即将开始的预定水平，则终止对电极施加RF功率以防止发生激光作用。