公开(公告)号：US5285074A

公开(公告)日：1994-02-08

申请号：US893172

申请日：1992-06-03

申请人： Don F. Haire ,  Cecil T. Ho ,  Guenther O. Langner ,  Werner Stickel ,  Edward V. Weber

发明人： Don F. Haire ,  Cecil T. Ho ,  Guenther O. Langner ,  Werner Stickel ,  Edward V. Weber

IPC分类号： G09G1/00 ,  G09G1/04 ,  H01J29/70 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01L21/30 ,  H04N3/16

CPC分类号： H01J37/304 ,  H01J2237/04928 ,  H01J2237/1507 ,  H01J2237/153 ,  H01J2237/30461 ,  H01J2237/3175

摘要： A dynamic correction arrangement for an electron beam projection/deflection system provides high order correction values for deflection in accordance with a correction equation. Particularly as applied to high accuracy telecentric deflection, the coefficients of terms of the correction equation may be determined by calibration for a small number of test points. Correction values may be stored in a look-up table or computed in real time by using a math co-processor in a processing pipeline. The correction provided corrects landing angle errors through the third order in telecentric projection/deflection systems such as systems utilizing variable axis immersion lenses.

摘要翻译： 电子束投影/偏转系统的动态校正装置根据校正方程为偏转提供高阶校正值。 特别是应用于高精度远心偏转时，校正方程的项的系数可以通过少量测试点的校准来确定。 校正值可以存储在查找表中或通过在处理流水线中使用数学协处理器实时计算。 该校正提供了在诸如利用可变轴浸没透镜的系统的远心投影/偏转系统中通过第三级校正着陆角误差。