公开(公告)号：US20120213949A1

公开(公告)日：2012-08-23

申请号：US13030223

申请日：2011-02-18

申请人： CHIEN-MIN WENG ,  SHIH-LIANG CHOU ,  TZU-WEN CHU ,  FU-JEN WANG ,  FENG-SHIANG YAO

发明人： CHIEN-MIN WENG ,  SHIH-LIANG CHOU ,  TZU-WEN CHU ,  FU-JEN WANG ,  FENG-SHIANG YAO

IPC分类号： H05H1/24

CPC分类号： C23C14/086 ,  C23C14/0036 ,  C23C14/5806

摘要： The invention relates to a method for producing a transparent indium tin oxide conductive layer on a substrate. The method involves using a target having a low indium-to-tin ratio in a low temperature manufacturing process (less than 200° C.), and introducing a plasma gas and a reaction gas into the reaction chamber to allow sputtering of an indium tin oxide layer on the substrate under a low oxygen environment, followed by subjecting the sputtered substrate to a heat treatment at 150˜200° C. for 60˜90 minutes. The indium tin oxide layer thus produced will crystallize completely and have the advantageous properties of low surface resistance and high uniformity.

摘要翻译： 本发明涉及在基板上制造透明铟锡氧化物导电层的方法。 该方法包括在低温制造工艺（小于200℃）中使用具有低铟 - 锡比的靶，并将等离子体气体和反应气体引入反应室以允许溅射铟锡 在低氧环境下在基板上形成氧化物层，接着在150〜200℃下对溅射基板进行60〜90分钟的热处理。 由此制造的氧化铟锡层将完全结晶，具有低表面电阻和高均匀性的有利特性。

公开(公告)号：US20120247953A1

公开(公告)日：2012-10-04

申请号：US13073337

申请日：2011-03-28

申请人： CHIEN-MIN WENG ,  Shih-Liang Chou ,  Tzu-Wen Chu ,  Fu-Jen Wang ,  Feng-Shiang Yao

发明人： CHIEN-MIN WENG ,  Shih-Liang Chou ,  Tzu-Wen Chu ,  Fu-Jen Wang ,  Feng-Shiang Yao

IPC分类号： C23C16/52 ,  C23C14/34 ,  C23C16/02 ,  C23C16/455 ,  B05C11/00 ,  B05C13/00

CPC分类号： C23C14/022 ,  C23C14/54 ,  C23C14/562

摘要： The invention relates to a film coating system. The system includes serially arranged working zones including a rough vacuum feeding section, a high vacuum feeding section, an optical layer coating zone, a pretreatment zone, a transparent conductive layer coating zone and a pressure balanced exhausting zone. The system further includes a conveyor device for carrying a substrate which has been provided on its periphery with an ink frame layer and for delivering the substrate to the respective working zones, and a controlling device that controls the times for the substrate to be retained in the respective working zones based upon a time interval between the entry of two successive conveyor devices into the rough vacuum feeding section. The invention ensures a smooth operation of the production line, and the transparent conductive film coated thereby does not easily exfoliate and exhibits the advantageous properties of high optical performance and low surface resistance.

摘要翻译： 本发明涉及一种薄膜包衣系统。 该系统包括串联布置的工作区，包括粗抽真空部分，高真空供给部分，光层涂层区，预处理区，透明导电层涂层区和压力平衡排气区。 该系统还包括用于承载已经在其周边上设置有油墨框架层并用于将基板输送到各个工作区域的基板的输送装置，以及控制装置，其将基板的时间保持在 基于两个连续输送装置进入粗真空供给部分之间的时间间隔的相应工作区。 本发明确保生产线的平稳运行，并且由此涂覆的透明导电膜不易剥离，并且具有高光学性能和低表面电阻的有利特性。