公开(公告)号：US06849131B2

公开(公告)日：2005-02-01

申请号：US10264492

申请日：2002-10-05

申请人： Yen-Hsing Chen ,  Hsing-Jui Lee ,  Fu-Kuo Tseng ,  Ching-Ling Lee ,  Kuo-Hung Liao

发明人： Yen-Hsing Chen ,  Hsing-Jui Lee ,  Fu-Kuo Tseng ,  Ching-Ling Lee ,  Kuo-Hung Liao

IPC分类号： C23C16/44 ,  C23C16/455 ,  C30B25/14 ,  H01L21/00 ,  H01L21/673 ,  C23C16/00

CPC分类号： H01L21/67303 ,  C23C16/4412 ,  C23C16/455 ,  C23C16/45591 ,  C30B25/14 ,  H01L21/67109

摘要： A truncated dummy plate which is suitable for promoting substantially uniform flow of process gases among all regions on the surface of a substrate to facilitate deposition of a film having uniform thickness on the substrate. The truncated dummy plate has a circular shape with a flat edge provided in the curved edge of the dummy plate. At least two, and preferably, about three or four of the dummy plates are positioned in the sites on a wafer boat which are in relatively close proximity to a gas outlet in a process furnace typically during a LPCVD process carried out in the furnace. The flat or truncated edges of the dummy plates are disposed on the gas inlet side of the process chamber, with the round edges of the dummy plates disposed on the gas outlet side of the process chamber.

公开(公告)号：US08909544B2

公开(公告)日：2014-12-09

申请号：US13210257

申请日：2011-08-15

申请人： Jing-Shyang Hwu ,  Yung-Hsiang Liu ,  Fu-Kuo Tseng ,  Rong-Jaye Chen

发明人： Jing-Shyang Hwu ,  Yung-Hsiang Liu ,  Fu-Kuo Tseng ,  Rong-Jaye Chen

IPC分类号： G06Q30/00 ,  H04L1/00

CPC分类号： H04L1/0076 ,  G06F11/10 ,  H03M13/1102 ,  H03M13/13 ,  H04L2001/0092

摘要： A method for encoding or decoding digital data, a data dissemination device and a data managing device are provided. The method for encoding digital data includes the following steps. A digital data is received. A sign data is encoded into the digital data through a linear combination operation to obtain an encoded digital data, wherein the size of the digital data is not changed after the encoding process. The encoded digital data is disseminated.

摘要翻译： 提供了一种用于对数字数据进行编码或解码的方法，数据传播装置和数据管理装置。 数字数据的编码方法包括以下步骤。 接收数字数据。 通过线性组合操作将符号数据编码成数字数据，以获得编码数字数据，其中数字数据的大小在编码处理之后不改变。 编码的数字数据被传播。

公开(公告)号：US20050124169A1

公开(公告)日：2005-06-09

申请号：US11039501

申请日：2005-01-19

申请人： Yen-Hsing Chen ,  Hsing-Jui Lee ,  Fu-Kuo Tseng ,  Ching-Ling Lee ,  Kuo-Hung Liao

发明人： Yen-Hsing Chen ,  Hsing-Jui Lee ,  Fu-Kuo Tseng ,  Ching-Ling Lee ,  Kuo-Hung Liao

IPC分类号： C23C16/44 ,  C23C16/455 ,  C30B25/14 ,  H01L21/00 ,  H01L21/673 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/67303 ,  C23C16/4412 ,  C23C16/455 ,  C23C16/45591 ,  C30B25/14 ,  H01L21/67109

摘要： A truncated dummy plate which is suitable for promoting substantially uniform flow of process gases among all regions on the surface of a substrate to facilitate deposition of a film having uniform thickness on the substrate. The truncated dummy plate has a circular shape with a flat edge provided in the curved edge of the dummy plate. At least two, and preferably, about three or four of the dummy plates are positioned in the sites on a wafer boat which are in relatively close proximity to a gas outlet in a process furnace typically during a LPCVD process carried out in the furnace. The flat or truncated edges of the dummy plates are disposed on the gas inlet side of the process chamber, with the round edges of the dummy plates disposed on the gas outlet side of the process chamber.

摘要翻译： 一种截头虚拟板，其适用于在衬底表面上的所有区域中促进基本均匀的工艺气体流动，以便于在衬底上沉积具有均匀厚度的膜。 截头虚拟板具有设置在虚拟板的弯曲边缘中的平坦边缘的圆形形状。 至少两个，优选约三个或四个虚拟板被定位在晶片舟皿上的位置中，其通常在炉中进行的LPCVD工艺期间相对靠近工艺炉中的气体出口。 虚拟板的平面或截头边缘设置在处理室的气体入口侧，虚设板的圆形边缘设置在处理室的气体出口侧。

公开(公告)号：US20120163445A1

公开(公告)日：2012-06-28

申请号：US13210257

申请日：2011-08-15

申请人： Jing-Shyang Hwu ,  Yung-Hsiang Liu ,  Fu-Kuo Tseng ,  Rong-Jaye Chen

发明人： Jing-Shyang Hwu ,  Yung-Hsiang Liu ,  Fu-Kuo Tseng ,  Rong-Jaye Chen

IPC分类号： H04B1/66

CPC分类号： H04L1/0076 ,  G06F11/10 ,  H03M13/1102 ,  H03M13/13 ,  H04L2001/0092

摘要： A method for encoding or decoding digital data, a data dissemination device and a data managing device are provided. The method for encoding digital data includes the following steps. A digital data is received. A sign data is encoded into the digital data through a linear combination operation to obtain an encoded digital data, wherein the size of the digital data is not changed after the encoding process. The encoded digital data is disseminated.

摘要翻译： 提供了一种用于对数字数据进行编码或解码的方法，数据传播装置和数据管理装置。 数字数据的编码方法包括以下步骤。 接收数字数据。 通过线性组合操作将符号数据编码成数字数据，以获得编码数字数据，其中数字数据的大小在编码处理之后不改变。 编码的数字数据被传播。