公开(公告)号：US08183779B2

公开(公告)日：2012-05-22

申请号：US12926020

申请日：2010-10-21

申请人： Fumihiko Oda ,  Kengo Moriyasu

发明人： Fumihiko Oda ,  Kengo Moriyasu

IPC分类号： H01J11/00 ,  H01J65/00

CPC分类号： H01J65/046 ,  H01J61/125

摘要： In an excimer lamp, rare gas and fluorine are enclosed inside a translucent ceramics arc tube. External electrodes are formed on an outer surface of the arc tube. A condition of 2.5+0.5 log(CF)≦G≦14−4 log(CF) is satisfied in the case of 0.1≦CF≦10, wherein G (mm) is a discharge gap in the arc tube and CF (%) is molar concentration of the fluorine.

摘要翻译： 在准分子灯中，稀有气体和氟被封闭在半透明陶瓷电弧管内。 外电极形成在电弧管的外表面上。 在0.1＆nlE; CF＆nlE; 10的情况下满足2.5 + 0.5log（CF）＆nlE; G＆nlE; 14-4log（CF）的条件，其中G（mm）是电弧管中的放电间隙，CF ％）是氟的摩尔浓度。

公开(公告)号：US20110109225A1

公开(公告)日：2011-05-12

申请号：US12926020

申请日：2010-10-21

申请人： Fumihiko Oda ,  Kengo Moriyasu

发明人： Fumihiko Oda ,  Kengo Moriyasu

IPC分类号： H01J11/00

CPC分类号： H01J65/046 ,  H01J61/125

摘要： In an excimer lamp, rare gas and fluorine are enclosed inside a translucent ceramics arc tube. External electrodes are formed on an outer surface of the arc tube. A condition of 2.5+0.5 log(CF)≦G≦14−4 log(CF) is satisfied in the case of 0.1≦CF≦10, wherein G (mm) is a discharge gap in the arc tube and CF (%) is molar concentration of the fluorine.

摘要翻译： 在准分子灯中，稀有气体和氟被封闭在半透明陶瓷电弧管内。 外电极形成在电弧管的外表面上。 在0.1＆nlE; CF＆nlE; 10的情况下满足2.5 + 0.5log（CF）＆nlE; G＆nlE; 14-4log（CF）的条件，其中G（mm）是电弧管中的放电间隙，CF ％）是氟的摩尔浓度。

公开(公告)号：US20110095684A1

公开(公告)日：2011-04-28

申请号：US12926019

申请日：2010-10-21

申请人： Kengo Moriyasu ,  Fumihiko Oda

发明人： Kengo Moriyasu ,  Fumihiko Oda

IPC分类号： H01J61/12

CPC分类号： H01J65/046 ,  H01J61/363

摘要： An excimer lamp that has an arc tube in which a seal structure is formed using a metal brazing material, which is composed of gold or a gold-nickel alloy, at an end portion of a transparent ceramic pipe that encloses a gas containing rare gas and fluorine atoms and a pair of electrodes arranged outside the arc tube.

摘要翻译： 一种准分子灯，其具有电弧管，其中，在包含稀有气体的气体的透明陶瓷管的端部，使用由金或金镍合金构成的金属钎焊材料形成密封结构， 氟原子和布置在电弧管之外的一对电极。

公开(公告)号：US20080169064A1

公开(公告)日：2008-07-17

申请号：US12006375

申请日：2008-01-02

申请人： Seiji Samukawa ,  Fumihiko Oda ,  Yukihiro Morimoto

发明人： Seiji Samukawa ,  Fumihiko Oda ,  Yukihiro Morimoto

IPC分类号： H01L21/306

CPC分类号： H01L21/3065 ,  H01J37/32357 ,  H01J37/32422 ,  H01J37/3447

摘要： Provided is a surface-treating apparatus making use of a neutral particle beam, by which a high-quality surface treatment is fundamentally conducted, and a high surface treatment rate is achieved. The surface-treating apparatus serves to conduct a surface treatment of an object to be treated, which is arranged in a vacuum treatment chamber, by a neutral particle beam, and is equipped with a light source for irradiating the object to be treated with light. In the surface-treating apparatus, the light applied to the object to be treated is preferably light including rays having a wavelength of 380 nm or shorter. An illuminance of the rays having a wavelength of 380 nm or shorter on the surface to be treated of the object to be treated is preferably 7 mW/cm2 or higher. The light source is preferably a xenon flash lamp, and an illuminance of the light on the surface to be treated of the object to be treated is preferably 20 mW/cm2 or higher.

摘要翻译： 提供使用中性粒子束的表面处理装置，通过该表面处理装置进行基本的高质量的表面处理，并且实现了高的表面处理速率。 表面处理装置用于通过中性粒子束对布置在真空处理室中的待处理物体进行表面处理，并配备有用于用光照射待处理物体的光源。 在表面处理装置中，施加到待处理物体的光优选为包括波长380nm以下的射线的光。 被处理物的被处理面波长380nm以下的光线的照度优选为7mW / cm 2以上。 光源优选为氙闪光灯，被处理物的被处理面上的光的照度优选为20mW / cm 2以上。

公开(公告)号：US07800308B2

公开(公告)日：2010-09-21

申请号：US12230490

申请日：2008-08-29

申请人： Fumihiko Oda ,  Kengo Moriyasu

发明人： Fumihiko Oda ,  Kengo Moriyasu

IPC分类号： H01J65/00

CPC分类号： H01J65/046 ,  H01J61/125 ,  H01J61/302 ,  H01J61/33 ,  H01J61/363

摘要： A excimer lamp comprises an electric discharge container in which a sealing member is provided between a lid member and an arc tube which does not contain silica, and a pair of external electrodes which are separately provided on an outer surface of the arc tube, wherein rare gas and a fluoride is enclosed in the electric discharge container, and the fluoride is sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride.

摘要翻译： 准分子灯包括放电容器，其中密封构件设置在盖构件和不含二氧化硅的电弧管之间，以及一对外部电极，其分开设置在电弧管的外表面上，其中稀有 气体和氟化物被封闭在放电容器中，氟化物是六氟化硫，四氟化碳或三氟化氮。

公开(公告)号：US20090058299A1

公开(公告)日：2009-03-05

申请号：US12230490

申请日：2008-08-29

申请人： Fumihiko Oda ,  Kengo Moriyasu

发明人： Fumihiko Oda ,  Kengo Moriyasu

IPC分类号： H01J65/00

CPC分类号： H01J65/046 ,  H01J61/125 ,  H01J61/302 ,  H01J61/33 ,  H01J61/363

摘要： A excimer lamp comprises an electric discharge container in which a sealing member is provided between a lid member and an arc tube which does not contain silica, and a pair of external electrodes which are separately provided on an outer surface of the arc tube, wherein rare gas and a fluoride is enclosed in the electric discharge container, and the fluoride is sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride.

摘要翻译： 准分子灯包括放电容器，其中密封构件设置在盖构件和不含二氧化硅的电弧管之间，以及一对外部电极，其分开设置在电弧管的外表面上，其中稀有 气体和氟化物被封闭在放电容器中，氟化物是六氟化硫，四氟化碳或三氟化氮。