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1.发明申请Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography 有权使用时间和/或功率调制来实现光掩模光刻中的剂量灰度公开(公告)号：US20060114546A1
公开(公告)日：2006-06-01
申请号：US11328179
申请日：2006-01-10
IPC分类号： G02B26/00
CPC分类号： G03F7/70558 , G03F7/70208 , G03F7/70283 , G03F7/70291
摘要： In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
摘要翻译： 在光刻应用中，期望控制例如印刷线的位置或宽度。 控制这些图案及其分辨率的有效方法是尽可能多地获得灰度级。 本发明包括灰度调色方法，其中曝光时间的调制增加了对象上的灰度级数。 此外，本发明包括灰度调节方法，其中调制曝光光束的功率提供了额外的灰度级。
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2.发明申请Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography 有权使用时间和/或功率调制来实现光掩模光刻中的剂量灰度公开(公告)号：US20050094245A1
公开(公告)日：2005-05-05
申请号：US10981590
申请日：2004-11-05
IPC分类号： G02B5/00 , G03F7/20 , H01L21/027 , G02B26/00
CPC分类号： G03F7/70558 , G03F7/70208 , G03F7/70283 , G03F7/70291
摘要： In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
摘要翻译： 在光刻应用中，期望控制例如印刷线的位置或宽度。 控制这些图案及其分辨率的有效方法是尽可能多地获得灰度级。 本发明包括灰度调色方法，其中曝光时间的调制增加了对象上的灰度级数。 此外，本发明包括灰度调节方法，其中调制曝光光束的功率提供了额外的灰度级。
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3.发明授权Using time and/or power modulation to achieve dose gray-scaling in optical maskless lithography 有权使用时间和/或功率调制来实现光掩模光刻中的剂量灰度公开(公告)号：US06831768B1
公开(公告)日：2004-12-14
申请号：US10630871
申请日：2003-07-31
IPC分类号： G02B2600
CPC分类号： G03F7/70558 , G03F7/70208 , G03F7/70283 , G03F7/70291
摘要： In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
摘要翻译： 在光刻应用中，期望控制例如印刷线的位置或宽度。 控制这些图案及其分辨率的有效方法是尽可能多地获得灰度级。 本发明包括灰度调色方法，其中曝光时间的调制增加了对象上的灰度级数。 此外，本发明包括灰度调节方法，其中调制曝光光束的功率提供了额外的灰度级。
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4.发明授权公开(公告)号：US06985280B2
公开(公告)日：2006-01-10
申请号：US10981590
申请日：2004-11-05
CPC分类号： G03F7/70558 , G03F7/70208 , G03F7/70283 , G03F7/70291
摘要： In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
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5.发明授权Using time and/or power modulation to achieve dose gray-scale in optical maskless lithography 有权使用时间和/或功率调制实现光掩模光刻中的剂量灰度级公开(公告)号：US07463402B2
公开(公告)日：2008-12-09
申请号：US11328179
申请日：2006-01-10
CPC分类号： G03F7/70558 , G03F7/70208 , G03F7/70283 , G03F7/70291
摘要： In lithography applications, it is desirable to control, for example, a position or width of a printed line. An effective method of controlling these patterns and their resolution is by having as many grayscale levels as possible. The present invention comprises methods of grayscaling wherein modulation of the exposure time increases the number of grayscale levels on an object. In addition, the present invention comprises methods of grayscaling wherein modulating the power of an exposure beam provides additional grayscale levels.
摘要翻译： 在光刻应用中，期望控制例如印刷线的位置或宽度。 控制这些图案及其分辨率的有效方法是尽可能多地获得灰度级。 本发明包括灰度调色方法，其中曝光时间的调制增加了对象上的灰度级数。 此外，本发明包括灰度调节方法，其中调制曝光光束的功率提供了额外的灰度级。
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