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1.发明授权
公开(公告)号：US4953359A
公开(公告)日：1990-09-04
申请号：US338606
申请日：1989-04-14
IPC分类号： F04B37/08
CPC分类号： F04B37/08 , Y10S417/901
摘要： The invention relates to a method of adapting a twostage refrigerator cryopump to a specific gas; the cryopump includes a first cooling stage to which pump surfaces are fastened and which is equipped with a heating device; the cryopump further includes a second cooling stage to which pump surfaces are fastened and which, during operation, takes on a temperature of up to 20 K. In order to enable the pump to perform at an optimum level for gases having different vapor pressures, it is proposed to control the heating device in such a manner that the coldest location of the first cooling head or, more precisely, of its pump surfaces, has a temperature which is higher by 5 to 10 K than the vapor pressure temperature of the respective gas associated with the maximum process pressure.
摘要翻译： 本发明涉及一种使两级冰箱低温泵适应特定气体的方法; 低温泵包括第一冷却阶段，泵表面被紧固在该第一冷却台上，并且配备有加热装置; 低温泵进一步包括第二冷却阶段，泵表面被固定到该第二冷却阶段，并且在操作期间，其运行高达20K的温度。为了使泵能够在具有不同蒸气压的气体的最佳水平下执行， 被提出以这样的方式控制加热装置，使得第一冷却头的最冷位置，或者更准确地说，其泵表面的温度比相应气体的蒸气压温度高5至10K 与最大过程压力相关联。
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2.发明授权
公开(公告)号：US4614093A
公开(公告)日：1986-09-30
申请号：US788769
申请日：1985-10-18
CPC分类号： F04B37/08 , Y10S417/901
摘要： A cryopump has a two-stage refrigerator in a housing with a pumping surface area in thermal communication with each stage of the refrigerator for gas-pumping by adsorption or absorption when the refrigerator is operated. A roughing vacuum pump provides a pressure of from about 1 to about 10.sup.-3 mbar to the housing and at least the pumping surface area of the second refrigerator stage is heated sufficiently to prevent gas adsorption or absorption thereon before the cryopump is operatively connected to a space to be evacuated therewith as a starting method for improving the cryopumping of, particularly, helium and a regenerating method after use of the cryopump.
摘要翻译： 低温泵在壳体中具有两级制冷器，其中泵送表面积与冰箱的每个阶段热连通，当冰箱操作时通过吸附或吸收进行气体抽吸。 粗加工真空泵向壳体提供约1至约10-3毫巴的压力，并且至少第二冷藏室的泵送表面积被充分加热以防止气体在其下吸附或吸收，之后，低温泵可操作地连接到 作为用于改善特别是氦的低温泵的起始方法以及在使用低温泵之后的再生方法而被抽空的空间。
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公开(公告)号：US4121430A
公开(公告)日：1978-10-24
申请号：US793488
申请日：1977-05-04
CPC分类号： F04B37/08 , Y10S417/901
摘要： A cryopump having a generally axially symmetrical housing provided at one end with an entrance opening defined by a plane for passage of molecules of the gas to be pumped and plates defining condensation surfaces arranged to be brought to low temperature for condensation of molecules of the gas to be pumped, and a thermal radiation shield disposed in the region of the entrance opening, with the condensation surfaces being oriented substantially at right angles to the plane of the entrance opening and the radiation shield being composed of a plurality of elongate metal strips so positioned that their longitudinal axes are parallel to the condensation surfaces.
摘要翻译： 具有一般轴向对称壳体的低温泵，其一端设有入口，该入口由用于待泵送气体的分子通过的平面限定，并且限定冷凝表面的板，所述冷凝表面布置成使其处于低温以冷凝气体分子至 以及设置在入口开口区域中的热辐射屏蔽件，其中冷凝表面基本上定向成与入口开口的平面成直角，并且辐射屏蔽层由多个细长金属条构成，这些细长金属条被定位成 它们的纵轴平行于冷凝表面。
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公开(公告)号：US4408469A
公开(公告)日：1983-10-11
申请号：US328152
申请日：1981-12-07
申请人： Hans-Joachim Forth
发明人： Hans-Joachim Forth
CPC分类号： F04B37/08
摘要： A refrigerator cryostat for producing high vacuums at controlled temperatures in a sample chamber has first and second refrigerator stages for progressively lowering the refrigerator temperature to the sample chamber. An independent heater heats the sample chamber to provide, in combination with the refrigerator temperature, the controlled temperatures to the sample chamber. A vacuum pump preliminarily evacuates a casing about the refrigerator stages which is also in vacuum communication with the sample chamber, but a pumping surface in thermal communication with the first refrigerator stage and in the casing cryogenically augments the preliminary evacuation to the high vacuum levels necessary for operation of the refrigerator cryostat at sample chamber temperatures of, for example, from about 10.degree. K. to about 350.degree. K.
摘要翻译： 用于在样品室中在受控温度下产生高真空的冰箱低温恒温器具有用于逐渐降低到样品室的冷藏温度的第一和第二冷藏室。 独立的加热器加热样品室，结合冰箱温度，提供样品室的受控温度。 真空泵预先抽出也与样品室真空连通的冷藏室的壳体，但是与第一冰箱平台和壳体热连通的泵送表面将初步抽真空增加到所需的高真空度 在例如约10°K至约350°K的样品室温度下操作冰箱低温恒温器。
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公开(公告)号：US5400604A
公开(公告)日：1995-03-28
申请号：US64050
申请日：1993-05-18
申请人： Hans-Ulrich Hafner , Hans-Jurgen Mundinger , Gerd Flick , Hans-Joachim Forth , Hans-Hermann Klein , Uwe Timm
发明人： Hans-Ulrich Hafner , Hans-Jurgen Mundinger , Gerd Flick , Hans-Joachim Forth , Hans-Hermann Klein , Uwe Timm
CPC分类号： F04B37/08 , Y10S417/901
摘要： The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed. The removal of the precipitates released from the cold surfaces is effected in liquid and/or gaseous form through a conduit (46) equipped with a regeneration valve (47) that is actuated as a function of the pressure in the pump interior (9).
摘要翻译： PCT No.PCT / EP91 / 01713 Sec。 371日期：1993年5月18日 102（e）日期1993年5月18日PCT 1991年9月10日PCT PCT。 公开号WO92 / 08894 本发明涉及一种用于再生低温泵（1）的方法，该低温泵配备有入口阀（33），冷却表面（6,8,11）在泵的操作期间具有温度， 影响气体的冷凝和/或吸附并被加热以再生它们，低温泵还包括通过阀（44）与泵内部（9）连接的背衬泵（45）。 在该过程中，如果入口阀（33）关闭并且泵内部（9）和连接的背衬泵（45）之间的连接被阻塞，则开始冷表面的加热，使得除了冷的温度 表面，泵内部的压力也上升到高于要去除的气体的三重点的对应值的值。 从冷表面释放的沉淀物的去除通过配备有作为泵内部（9）中的压力的函数致动的再生阀（47）的导管（46）而以液体和/或气体形式进行。
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公开(公告)号：US4757689A
公开(公告)日：1988-07-19
申请号：US922034
申请日：1986-10-22
CPC分类号： F04B37/08 , Y10S417/901
摘要： The invention relates to a cryopump having a casing (1), a gas inlet opening (8) to which a chamber (30) can be attached through a valve (31), a vacuum pump (18) connected through a valve (16) to the casing, a two-stage refrigerator (4) in the casing as cold source, and pumping surfaces (7, 9, 12, 13) which, on both of the refrigeration stages (5, 11) of the refrigerator, are equipped with an electrical heating means (23, 24). To achieve a great shortening of the time required for regeneration and start-up it is proposed that a sensor (41) be provided to monitor the pressure within the pump casing, and that a control unit (28) be present by which the operation of the cryopump can be monitored and controlled on the basis of the signals supplied by the sensor.
摘要翻译： 本发明涉及一种具有壳体（1），气体入口（8）的低温泵，可通过阀（31）连接腔室（30）的气体入口（8），通过阀（16）连接的真空泵（18） 在壳体内设置作为冷源的壳体中的两级制冷器（4），以及在冷藏库的两个制冷级（5,11）上配置的泵送面（7,9,12,13） 具有电加热装置（23,24）。 为了大大缩短再生和启动所需的时间，提出设置传感器（41）以监测泵壳内的压力，并且存在控制单元（28），通过该控制单元 可以根据由传感器提供的信号监测和控制低温泵。
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公开(公告)号：US4475345A
公开(公告)日：1984-10-09
申请号：US401208
申请日：1982-07-23
申请人： Hans-Joachim Forth , Rolf Heisig
发明人： Hans-Joachim Forth , Rolf Heisig
CPC分类号： F25B9/14
摘要： A refrigerator has a cold producer with a pneumatically-operated displacer for displacing a working, cold-producing gas. The pneumatic and working gas-supply control is separate from the cold producer and connected thereto by tubes having volumes less than the maximum volumes of the portions of the chamber supplied thereby.
摘要翻译： 冰箱具有带有气动操作的置换器的冷生产器，用于移动工作的冷产气。 气动和工作气体供应控制与冷生产者分离，并且通过管体积小于由此供应的室的部分的最大体积而连接的管道。
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