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公开(公告)号：US5400604A
公开(公告)日：1995-03-28
申请号：US64050
申请日：1993-05-18
申请人： Hans-Ulrich Hafner , Hans-Jurgen Mundinger , Gerd Flick , Hans-Joachim Forth , Hans-Hermann Klein , Uwe Timm
发明人： Hans-Ulrich Hafner , Hans-Jurgen Mundinger , Gerd Flick , Hans-Joachim Forth , Hans-Hermann Klein , Uwe Timm
CPC分类号： F04B37/08 , Y10S417/901
摘要： The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed. The removal of the precipitates released from the cold surfaces is effected in liquid and/or gaseous form through a conduit (46) equipped with a regeneration valve (47) that is actuated as a function of the pressure in the pump interior (9).
摘要翻译： PCT No.PCT / EP91 / 01713 Sec。 371日期：1993年5月18日 102（e）日期1993年5月18日PCT 1991年9月10日PCT PCT。 公开号WO92 / 08894 本发明涉及一种用于再生低温泵（1）的方法，该低温泵配备有入口阀（33），冷却表面（6,8,11）在泵的操作期间具有温度， 影响气体的冷凝和/或吸附并被加热以再生它们，低温泵还包括通过阀（44）与泵内部（9）连接的背衬泵（45）。 在该过程中，如果入口阀（33）关闭并且泵内部（9）和连接的背衬泵（45）之间的连接被阻塞，则开始冷表面的加热，使得除了冷的温度 表面，泵内部的压力也上升到高于要去除的气体的三重点的对应值的值。 从冷表面释放的沉淀物的去除通过配备有作为泵内部（9）中的压力的函数致动的再生阀（47）的导管（46）而以液体和/或气体形式进行。
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公开(公告)号：US5221190A
公开(公告)日：1993-06-22
申请号：US849620
申请日：1992-03-10
摘要： The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, intimate thermal contact with the getter module.
摘要翻译： 本发明涉及一种具有壳体的离子溅射泵，该壳体具有位于壳体中的至少一个吸气剂模块。 吸气剂模块具有加热装置。 为了减少吸气剂模块的激活和再生所需的时间，加热装置与吸气剂模块直接热密接触。
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公开(公告)号：US6092373A
公开(公告)日：2000-07-25
申请号：US242006
申请日：1999-02-05
CPC分类号： F04B37/085 , F04B37/08 , Y10S417/901
摘要： The invention relates to a cryopump having pump surfaces which are held at different temperatures during operation and are disposed in a housing with a flange for connecting the housing to a vacuum chamber. Additional pump surfaces are provided for the accumulation of easily condensable gases and improve the suction performance of the cryopump. These additional pump surfaces are disposed in the vacuum chamber and are connected to a first stage of a two stage refrigeration head via a cold bridge.
摘要翻译： PCT No.PCT / EP97 / 01183 Sec。 371日期1999年2月5日 102（e）1999年2月5日PCT 1997年3月8日PCT公布。 公开号WO98 / 06943 日期1998年2月19日本发明涉及一种具有泵表面的低温泵，其在操作期间保持在不同的温度，并且设置在具有用于将壳体连接到真空室的凸缘的壳体中。 提供额外的泵表面用于积聚容易冷凝的气体并提高低温泵的吸入性能。 这些额外的泵表面设置在真空室中，并通过冷桥连接到两级制冷头的第一级。
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