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    Cryopump and process for regenerating said cryopump
    1.
    发明授权
    Cryopump and process for regenerating said cryopump 失效
    冷冻库和用于再生所述低温泵的过程

    公开(公告)号：US5400604A

    公开(公告)日：1995-03-28

    申请号：US64050

    申请日：1993-05-18

    申请人： Hans-Ulrich Hafner ,  Hans-Jurgen Mundinger ,  Gerd Flick ,  Hans-Joachim Forth ,  Hans-Hermann Klein ,  Uwe Timm

    发明人： Hans-Ulrich Hafner ,  Hans-Jurgen Mundinger ,  Gerd Flick ,  Hans-Joachim Forth ,  Hans-Hermann Klein ,  Uwe Timm

    IPC分类号： F04B37/08 ,  B01D8/00

    CPC分类号： F04B37/08 ,  Y10S417/901

    摘要： The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed. The removal of the precipitates released from the cold surfaces is effected in liquid and/or gaseous form through a conduit (46) equipped with a regeneration valve (47) that is actuated as a function of the pressure in the pump interior (9).

    摘要翻译： PCT No.PCT / EP91 / 01713 Sec。 371日期：1993年5月18日 102（e）日期1993年5月18日PCT 1991年9月10日PCT PCT。 公开号WO92 / 08894 本发明涉及一种用于再生低温泵（1）的方法，该低温泵配备有入口阀（33），冷却表面（6,8,11）在泵的操作期间具有温度， 影响气体的冷凝和/或吸附并被加热以再生它们，低温泵还包括通过阀（44）与泵内部（9）连接的背衬泵（45）。 在该过程中，如果入口阀（33）关闭并且泵内部（9）和连接的背衬泵（45）之间的连接被阻塞，则开始冷表面的加热，使得除了冷的温度 表面，泵内部的压力也上升到高于要去除的气体的三重点的对应值的值。 从冷表面释放的沉淀物的去除通过配备有作为泵内部（9）中的压力的​​函数致动的再生阀（47）的导管（46）而以液体和/或气体形式进行。

    Two-stage cryopump
    2.
    发明授权
    Two-stage cryopump 失效
    两级CRYOPUMP

    公开(公告)号：US5111667A

    公开(公告)日：1992-05-12

    申请号：US663130

    申请日：1991-03-04

    申请人： Hans-Ulrich Hafner ,  Hans-Hermann Klein ,  Uwe Timm

    发明人： Hans-Ulrich Hafner ,  Hans-Hermann Klein ,  Uwe Timm

    IPC分类号： F04B37/08 ,  F25B9/14 ,  F25D19/00

    CPC分类号： F25D19/006 ,  F04B37/08 ,  F25B9/14 ,  Y10S417/901

    摘要： A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.

    摘要翻译： 一种具有第一阶段和第二阶段比第一阶段更冷的冰箱的两级低温泵; 具有冷凝表面的冷凝构件; 第一联接器，用于以导热方式将冷凝构件连接到第二台; 具有吸附表面并与所述冷凝构件间隔开的吸附构件; 以及用于以热传导方式将吸附构件连接到第二阶段的第二联接器。 进一步提供一种用于在用于再生吸附构件的时间段期间加热吸附构件的加热器。 第二联接器被设计成使得其至少在吸附构件的加热期间使吸附构件从第二级和冷凝构件热充分绝热，以防止加热器对冷凝构件进行加热。

    Cryogenic pump with an essentially cup-shaped housing
    3.
    发明授权
    Cryogenic pump with an essentially cup-shaped housing 失效
    具有基本杯形外壳的低温泵

    公开(公告)号：US5542257A

    公开(公告)日：1996-08-06

    申请号：US256796

    申请日：1994-07-25

    申请人： Monika Mattern-Klosson ,  Hans-Juergen Mundinger ,  Hans-Ulrich Haefner ,  Uwe Timm

    发明人： Monika Mattern-Klosson ,  Hans-Juergen Mundinger ,  Hans-Ulrich Haefner ,  Uwe Timm

    IPC分类号： F04B37/08 ,  B01D8/00

    CPC分类号： F04B37/08 ,  Y10S417/901

    摘要： A cryogenic pump with an essentially cup-shaped housing (2), with a radiation screen (4) disposed in the housing and also essentially cup-shaped, with an inlet opening (6), with a cold head (3) extending into the housing and the radiation screen, with pump surfaces (15) for condensable gases, disposed on the cold head, with a collecting chamber for liquid condensate developing during regeneration of the pump; in order to make possible a regeneration of the pump in various installation positions it is proposed that the condensate collecting chamber is laterally disposed in such a way that the pump (1) can be regenerated even if attached horizontally.

    摘要翻译： PCT No.PCT / EP92 / 00869 Sec。 371日期：1994年7月25日 102（e）日期1994年7月25日PCT提交1992年4月18日PCT公布。 公开号WO93 / 15318 日期1993年8月5日具有基本杯形壳体（2）的低温泵，具有设置在壳体中并且基本上为杯形的辐射屏蔽（4），具有入口开口（6），其具有冷头 3）延伸到壳体和辐射屏幕中，具有设置在冷头上的可冷凝气体的泵表面（15），用于在泵再生期间发生液体冷凝物的收集室; 为了使各种安装位置的泵的再生成为可能，提出冷凝水收集室是横向设置的，使得泵（1）即使水平附接也可以被再生。