Method of starting and/or regenerating a cryopump and a cryopump therefor
    2.
    发明授权
    Method of starting and/or regenerating a cryopump and a cryopump therefor 失效
    开始和/或再生低温泵和低温泵的方法

    公开(公告)号:US4614093A

    公开(公告)日:1986-09-30

    申请号:US788769

    申请日:1985-10-18

    IPC分类号: F04B37/08 B01D8/00

    CPC分类号: F04B37/08 Y10S417/901

    摘要: A cryopump has a two-stage refrigerator in a housing with a pumping surface area in thermal communication with each stage of the refrigerator for gas-pumping by adsorption or absorption when the refrigerator is operated. A roughing vacuum pump provides a pressure of from about 1 to about 10.sup.-3 mbar to the housing and at least the pumping surface area of the second refrigerator stage is heated sufficiently to prevent gas adsorption or absorption thereon before the cryopump is operatively connected to a space to be evacuated therewith as a starting method for improving the cryopumping of, particularly, helium and a regenerating method after use of the cryopump.

    摘要翻译: 低温泵在壳体中具有两级制冷器,其中泵送表面积与冰箱的每个阶段热连通,当冰箱操作时通过吸附或吸收进行气体抽吸。 粗加工真空泵向壳体提供约1至约10-3毫巴的压力,并且至少第二冷藏室的泵送表面积被充分加热以防止气体在其下吸附或吸收,之后,低温泵可操作地连接到 作为用于改善特别是氦的低温泵的起始方法以及在使用低温泵之后的再生方法而被抽空的空间。

    Method and circuit for measuring and displaying physical values
    3.
    发明授权
    Method and circuit for measuring and displaying physical values 失效
    测量和显示物理值的方法和电路

    公开(公告)号:US4794330A

    公开(公告)日:1988-12-27

    申请号:US010423

    申请日:1987-02-03

    IPC分类号: G01D3/02 G01R15/00 G01R17/04

    CPC分类号: G01D3/022 G01R15/005

    摘要: A method and circuit for measuring and displaying a parameter, in which the parameter is sensed by means of a sensor which supplies an output voltage representative of the value of the parameter, the output voltage is compared with a comparison voltage associated with the sensor response characteristic, and a display is produced on the basis of the result of the comparing step. The comparison is effected by supplying the output voltage from the sensor to a first input of a comparator, supplying the comparison voltage to a second input of the comparator, and varying the comparison voltage between successive values extending over the output voltage range of the sensor. The display is produced by providing a succession of parameter value signals each associated with a respective comparison voltage value, supplying each parameter value signal to a latch device in synchronism with occurrence of the associated comparison voltage value, and conducting to a display device from the latch device the parameter value signal which is associated with the comparison voltage value that corresponds to the output voltage value of the sensor.

    摘要翻译: 一种用于测量和显示参数的方法和电路,其中通过提供表示参数值的输出电压的传感器来感测参数,将输出电压与与传感器响应特性相关联的比较电压进行比较 并且基于比较步骤的结果产生显示。 比较通过将来自传感器的输出电压提供给比较器的第一输入端,将比较电压提供给比较器的第二输入端,并且改变在传感器的输出电压范围上延伸的连续值之间的比较电压。 显示是通过提供一系列参数值信号产生的,每个参数值信号与相应的比较电压值相关联,将每个参数值信号与相关联的比较电压值的出现同步地提供给锁存器件,并且从锁存器 设置与与传感器的输出电压值对应的比较电压值相关联的参数值信号。

    Cryopump and process for regenerating said cryopump
    5.
    发明授权
    Cryopump and process for regenerating said cryopump 失效
    冷冻库和用于再生所述低温泵的过程

    公开(公告)号:US5400604A

    公开(公告)日:1995-03-28

    申请号:US64050

    申请日:1993-05-18

    IPC分类号: F04B37/08 B01D8/00

    CPC分类号: F04B37/08 Y10S417/901

    摘要: The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed. The removal of the precipitates released from the cold surfaces is effected in liquid and/or gaseous form through a conduit (46) equipped with a regeneration valve (47) that is actuated as a function of the pressure in the pump interior (9).

    摘要翻译: PCT No.PCT / EP91 / 01713 Sec。 371日期:1993年5月18日 102(e)日期1993年5月18日PCT 1991年9月10日PCT PCT。 公开号WO92 / 08894 本发明涉及一种用于再生低温泵(1)的方法,该低温泵配备有入口阀(33),冷却表面(6,8,11)在泵的操作期间具有温度, 影响气体的冷凝和/或吸附并被加热以再生它们,低温泵还包括通过阀(44)与泵内部(9)连接的背衬泵(45)。 在该过程中,如果入口阀(33)关闭并且泵内部(9)和连接的背衬泵(45)之间的连接被阻塞,则开始冷表面的加热,使得除了冷的温度 表面,泵内部的压力也上升到高于要去除的气体的三重点的对应值的值。 从冷表面释放的沉淀物的去除通过配备有作为泵内部(9)中的压力的​​函数致动的再生阀(47)的导管(46)而以液体和/或气体形式进行。

    Two-stage cryopump
    6.
    发明授权
    Two-stage cryopump 失效
    两级CRYOPUMP

    公开(公告)号:US5111667A

    公开(公告)日:1992-05-12

    申请号:US663130

    申请日:1991-03-04

    IPC分类号: F04B37/08 F25B9/14 F25D19/00

    摘要: A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.

    摘要翻译: 一种具有第一阶段和第二阶段比第一阶段更冷的冰箱的两级低温泵; 具有冷凝表面的冷凝构件; 第一联接器,用于以导热方式将冷凝构件连接到第二台; 具有吸附表面并与所述冷凝构件间隔开的吸附构件; 以及用于以热传导方式将吸附构件连接到第二阶段的第二联接器。 进一步提供一种用于在用于再生吸附构件的时间段期间加热吸附构件的加热器。 第二联接器被设计成使得其至少在吸附构件的加热期间使吸附构件从第二级和冷凝构件热充分绝热,以防止加热器对冷凝构件进行加热。

    Cryopump, and a method for the operation thereof
    7.
    发明授权
    Cryopump, and a method for the operation thereof 失效
    冷冻库及其操作方法

    公开(公告)号:US4757689A

    公开(公告)日:1988-07-19

    申请号:US922034

    申请日:1986-10-22

    IPC分类号: F04B37/08 B01D8/00

    CPC分类号: F04B37/08 Y10S417/901

    摘要: The invention relates to a cryopump having a casing (1), a gas inlet opening (8) to which a chamber (30) can be attached through a valve (31), a vacuum pump (18) connected through a valve (16) to the casing, a two-stage refrigerator (4) in the casing as cold source, and pumping surfaces (7, 9, 12, 13) which, on both of the refrigeration stages (5, 11) of the refrigerator, are equipped with an electrical heating means (23, 24). To achieve a great shortening of the time required for regeneration and start-up it is proposed that a sensor (41) be provided to monitor the pressure within the pump casing, and that a control unit (28) be present by which the operation of the cryopump can be monitored and controlled on the basis of the signals supplied by the sensor.

    摘要翻译: 本发明涉及一种具有壳体(1),气体入口(8)的低温泵,可通过阀(31)连接腔室(30)的气体入口(8),通过阀(16)连接的真空泵(18) 在壳体内设置作为冷源的壳体中的两级制冷器(4),以及在冷藏库的两个制冷级(5,11)上配置的泵送面(7,9,12,13) 具有电加热装置(23,24)。 为了大大缩短再生和启动所需的时间,提出设置传感器(41)以监测泵壳内的压力,并且存在控制单元(28),通过该控制单元 可以根据由传感器提供的信号监测和控制低温泵。