Optical waveguide platform and manufacturing method thereof
    2.
    发明授权
    Optical waveguide platform and manufacturing method thereof 失效
    光波导平台及其制造方法

    公开(公告)号:US06804444B2

    公开(公告)日:2004-10-12

    申请号:US10292852

    申请日:2002-11-12

    IPC分类号: G02B642

    摘要: An optical waveguide platform and a manufacturing method thereof are provided. In the provided optical waveguide platform, a terrace on which an optical device is mounted is formed by using an etch stopper pattern formed on a lower clad layer. Therefore, the optical device is mounted without processing a silicon substrate. In addition, in the provided optical waveguide platform, the etch stopper pattern is formed on the lower clad layer to prevent defocus in a photolithography process due to an etch step, so as not to damage a fine waveguide pattern. Moreover, an optical waveguide is formed on the terrace in manufacturing the optical waveguide platform to examine the characteristics of the optical waveguide device before etching a trench.

    摘要翻译: 提供了一种光波导平台及其制造方法。 在所提供的光波导平台中,通过使用形成在下包层上的蚀刻停止图案来形成其上安装有光学装置的平台。 因此,在不加工硅衬底的情况下安装光学器件。 此外,在所提供的光波导平台中,蚀刻停止图案形成在下包层上,以防止由于蚀刻步骤而导致的光刻工艺中的散焦,从而不损坏精细的波导图案。 此外,在制造光波导平台的平台上形成光波导,以在蚀刻沟槽之前检查光波导器件的特性。

    Optical module for suppressing optical and electrical crosstalk simultaneously
    4.
    发明授权
    Optical module for suppressing optical and electrical crosstalk simultaneously 失效
    用于同时抑制光和电串扰的光模块

    公开(公告)号:US06807326B2

    公开(公告)日:2004-10-19

    申请号:US10379297

    申请日:2003-03-03

    IPC分类号: G02B636

    摘要: There is provided an optical module incorporating active elements such as light emitting devices or photo detective devices mounted on a single substrate. The optical module can suppress optical and electrical crosstalk by a blocking trench formed between the active elements for blocking optical and electromagnetic waves, and a metal barrier formed within the blocking trench for blocking the optical and electromagnetic waves. Further, the optical module can suppress the optical and the electrical crosstalk due to the optical and the electromagnetic waves directed upward the substrate by a housing body enclosing the substrate, a housing cover provided on the housing body, and a metal slit formed below the housing cover and above the metal barrier.

    摘要翻译: 提供了一种包含有源元件的光学模块,例如安装在单个基板上的发光器件或照相检测器件。 光学模块可以通过形成在用于阻挡光学和电磁波的有源元件之间的阻挡沟槽以及形成在阻挡沟槽内的用于阻挡光学和电磁波的金属屏障来抑制光和电串扰。 此外,光学模块可以通过封装基板的壳体,设置在壳体上的壳体盖和形成在壳体下方的金属狭缝,抑制由于光学和电磁波而导致的光学和电子串扰 覆盖并在金属屏障之上。