公开(公告)号：US20050196965A1

公开(公告)日：2005-09-08

申请号：US11006187

申请日：2004-12-07

申请人： Chang Kim ,  Chi Kim ,  Hi Kang ,  Tae Lee ,  Kwang Park

发明人： Chang Kim ,  Chi Kim ,  Hi Kang ,  Tae Lee ,  Kwang Park

IPC分类号： H01L21/306 ,  H01L21/302 ,  H01L21/336 ,  H01L21/461 ,  H01L21/4763

CPC分类号： H01L21/3212 ,  H01L21/31053 ,  H01L21/7684 ,  H01L21/76895

摘要： The disclosure relates to a method for manufacturing a semiconductor device by performing a planarization process including a first CMP process using a slurry including 0.05˜0.5 wt % CeO2 o r MnO2 as an abrasive and a second CMP process using a slurry including SiO2 as the other abrasive regardless of order of the processes. The CMP process is performed using the first slurry having a high polishing speed in the middle of the wafer and the second slurry having a high polishing speed at the edge of the wafer, thereby decreasing the processing cost and securing the process margin to secure yield and reliability of devices

摘要翻译： 本公开涉及一种通过执行包括使用包含0.05〜0.5重量％的CeO 2或MnO 2作为研磨剂的浆料的第一CMP工艺的平坦化工艺和使用包含SiO 2作为其它研磨剂的浆料的第二CMP工艺来制造半导体器件的方法 不管进程的顺序。 使用在晶片中间具有高抛光速度的第一浆料和在晶片边缘具有高抛光速度的第二浆料进行CMP处理，从而降低加工成本并确保加工余量以确保产量和 设备的可靠性

公开(公告)号：US20100097971A1

公开(公告)日：2010-04-22

申请号：US12252806

申请日：2008-10-16

申请人： Nam-Hi Kang ,  Young-Han Kim

发明人： Nam-Hi Kang ,  Young-Han Kim

IPC分类号： H04H20/71

CPC分类号： H04L69/16 ,  H04L12/185 ,  H04L12/1886 ,  H04L69/161

摘要： A method for configuring and managing a multicast data delivery path in a wireless ad-hoc network and a multicast data delivery system using the same are disclosed. The method includes transmitting, by a parent node, first messages to respective child nodes, transmitting, by each of the child nodes, a second message to the parent node in response to the first message relayed by at least some of non-member nodes other than the parent node, performing an operation as a branch node by a non-member node receiving second messages belonging to the same multicast session and transmitted from different originators, and establishing, by the parent node receiving at least one second message, an Internet protocol (IP) tunnel with the originator of the received at least one second message. The performing of the operation as the branch node includes regarding the originators of the received second messages as child nodes, establishing IP tunnels connected to the respective child nodes, generating a new second message including an identifier (ID) of the branch node and IDs of the child nodes in an originator field and a child list field, respectively, and transmitting the generated second message to the parent node.

摘要翻译： 公开了一种用于在无线自组织网络中配置和管理多播数据传送路径的方法以及使用其的组播数据传送系统。 所述方法包括由父节点向相应的子节点发送第一消息，以响应于由至少一些非成员节点中继的第一消息，向所述父节点发送第二消息，所述第二消息由所述子节点发送到所述父节点 由父节点执行作为分支节点的操作，该非成员节点接收属于相同多播会话的第二消息并从不同的发起者发送，并且由父节点接收至少一个第二消息，建立因特网协议 （IP）隧道与所接收的至少一个第二消息的发起者。 作为分支节点的操作的执行包括将接收的第二消息的发起者作为子节点，建立连接到各个子节点的IP隧道，生成包括分支节点的标识符（ID）和新的分支节点的ID的新的第二消息 发起方字段中的子节点和子列表字段，并将生成的第二消息发送到父节点。

公开(公告)号：US20050142988A1

公开(公告)日：2005-06-30

申请号：US10879030

申请日：2004-06-30

申请人： Chang Kim ,  Chi Kim ,  Tae Lee ,  Hi Kang

发明人： Chang Kim ,  Chi Kim ,  Tae Lee ,  Hi Kang

IPC分类号： H01L21/304 ,  B24B37/04 ,  B24B49/00 ,  B24B1/00

CPC分类号： B24B37/042

摘要： A CMP process using a slurry containing an abrasive of low concentration is disclosed. More specifically, a planarization process is performed using the slurry containing an abrasive of low concentration of less than 0.1 wt % unlike the conventional CMP slurry, thereby improving uniformity of a CMP process in a manufacture process of a semiconductor device to secure yield and reliability of the device. Particularly, since the disclosed slurry has the more excellent effect of achieving the planarization degree than that of the conventional slurry, the thickness of deposited films before the CMP process can be reduced, and the CMP amount can also be minimized.

摘要翻译： 公开了使用含有低浓度磨料的浆料的CMP方法。 更具体地，使用含有少于0.1重量％的低浓度的研磨剂的浆料进行平坦化处理，这与传统的CMP浆料不同，从而提高半导体器件的制造过程中的CMP工艺的均匀性，以确保半导体器件的成品率和可靠性 装置。 特别地，由于所公开的浆料具有比常规浆料获得更好的平坦化度的优异效果，所以可以减少在CMP工艺之前的沉积膜的厚度，并且还可以使CMP量最小化。

公开(公告)号：US08422497B2

公开(公告)日：2013-04-16

申请号：US12252806

申请日：2008-10-16

申请人： Nam-Hi Kang ,  Young-Han Kim

发明人： Nam-Hi Kang ,  Young-Han Kim

IPC分类号： H04L12/28

CPC分类号： H04L69/16 ,  H04L12/185 ,  H04L12/1886 ,  H04L69/161

摘要： A method for configuring and managing a multicast data delivery path in a wireless ad-hoc network and a multicast data delivery system using the same are disclosed. The method includes transmitting, by a parent node, first messages to respective child nodes, transmitting, by each of the child nodes, a second message to the parent node in response to the first message relayed by at least some of non-member nodes other than the parent node, performing an operation as a branch node by a non-member node receiving second messages belonging to the same multicast session and transmitted from different originators, and establishing, by the parent node receiving at least one second message, an Internet protocol (IP) tunnel with the originator of the received at least one second message. The performing of the operation as the branch node includes regarding the originators of the received second messages as child nodes, establishing IP tunnels connected to the respective child nodes, generating a new second message including an identifier (ID) of the branch node and IDs of the child nodes in an originator field and a child list field, respectively, and transmitting the generated second message to the parent node.

摘要翻译： 公开了一种用于在无线自组织网络中配置和管理多播数据传送路径的方法以及使用其的组播数据传送系统。 所述方法包括由父节点向相应的子节点发送第一消息，以响应于由至少一些非成员节点中继的第一消息，向所述父节点发送第二消息，所述第二消息由所述子节点发送到所述父节点 由父节点执行作为分支节点的操作，该非成员节点接收属于相同多播会话的第二消息并从不同的发起者发送，并且由父节点接收至少一个第二消息，建立因特网协议 （IP）隧道与所接收的至少一个第二消息的发起者。 作为分支节点的操作的执行包括将接收的第二消息的发起者作为子节点，建立连接到各个子节点的IP隧道，生成包括分支节点的标识符（ID）和新的分支节点的ID的新的第二消息 发起方字段中的子节点和子列表字段，并将生成的第二消息发送到父节点。