摘要:
A CMP process using a slurry containing an abrasive of low concentration is disclosed. More specifically, a planarization process is performed using the slurry containing an abrasive of low concentration of less than 0.1 wt % unlike the conventional CMP slurry, thereby improving uniformity of a CMP process in a manufacture process of a semiconductor device to secure yield and reliability of the device. Particularly, since the disclosed slurry has the more excellent effect of achieving the planarization degree than that of the conventional slurry, the thickness of deposited films before the CMP process can be reduced, and the CMP amount can also be minimized.
摘要:
The disclosure relates to a method for manufacturing a semiconductor device by performing a planarization process including a first CMP process using a slurry including 0.05˜0.5 wt % CeO2 o r MnO2 as an abrasive and a second CMP process using a slurry including SiO2 as the other abrasive regardless of order of the processes. The CMP process is performed using the first slurry having a high polishing speed in the middle of the wafer and the second slurry having a high polishing speed at the edge of the wafer, thereby decreasing the processing cost and securing the process margin to secure yield and reliability of devices
摘要:
Disclosed herein is a gold nanoparticle (AuNP)-based peptide chip prepared by forming a monolayer of AuNPs onto a self-assembled monolayer constructed on a solid support, and then immobilizing a peptide on the AuNPs. The AuNPs can effectively amplify the mass signal of the peptide, thus making it possible to measure the mass change of the peptide in a simple and accurate manner. Also, when secondary ion mass spectrometric analysis (spectrum or imaging) is performed on the AuNP-based peptide chip, the activities of enzymes and related inhibitors can be effectively quantified. The disclosed invention enables various enzyme activities to be analyzed rapidly and accurately, and thus can provide an important method for disease diagnosis and new drug development through the elucidation of signaling and interaction mechanisms.
摘要:
An optical fingerprint input device by where a mark identification is attached to one surface of a prism and reflected by light beams coming from an external light source to be incident on a lens such that erroneous recognition caused by a fingerprint afterimage of water, sweat or oil remaining on the fingerprint contact surface of the prism can be prevented to improve the security of the device, and a visual advertisement can be additionally obtained when a mark identification logo for advertisement is attached on one surface of the prism.
摘要:
A hydrogen permeable composition having a porous ceramic substrate, and a two part membrane adhered thereto. The two part membrane has a metal powder part and a ceramic oxide part, with the metal powder part being Ni, Pd, Pd alloys, Nb, Ta, Zr, V or mixtures thereof. The oxide part is yttria stabilized zirconia, shrinkable alumina, suitably doped cerates, titanate, zirconates of barium or strontium or mixtures thereof, and the hydrogen flux is at least 20 cm3 per minute-cm2 at 500° C. in a 100% hydrogen atmosphere. A paste method of forming the composition is disclosed. A method of extracting hydrogen from a gas is also disclosed.
摘要:
A drive unit for dish washing machines includes a flow channel housing, a filter housing and an arm holder, which are thermally fused to one another to form an integral unit. Consequently, assembly of the drive unit is simplified, leakage of wash water is prevented, and pumping performance is increased. Also, the flow channel housing, the filter housing and the arm holder are concurrently fixed to a pump housing of the drive unit by fixing members. Consequently, the assembly process of the drive unit is simplified, and the coupling force between the components of the drive unit is increased.
摘要:
A method of fabricating a thin film transistor, in which source and drain electrodes are formed through a solution process, thus all stages which include formation of electrodes on a substrate, formation of an insulator layer, and formation of an organic semiconductor layer are conducted through the solution process. In the method, the fabrication is simplified and a fabrication cost is reduced. It is possible to apply the organic thin film transistor to integrated circuits requiring high speed switching because of high charge mobility.
摘要:
A single-phase induction motor comprises a main winding, an auxiliary winding, and a capacitor, and further comprises a switch for controlling current flow in the motor to change the amount of current flowing through the motor, thereby changing the effective capacitance of the capacitor. This reduces the number of capacitors used in the motor, thereby reducing manufacturing costs, and also attains a high effective capacitance using a low-capacitance capacitor.
摘要:
Disclosed is a built-in refrigerator provided in a sink and effectively discharging heat from a condenser and a compressor. The built-in refrigerator includes a cabinet provided in the sink and a component chamber at a rear bottom thereof and a dust guard provided at a front bottom of the cabinet; a compressor provided in the component chamber; a condenser provided under a bottom surface of the cabinet; a ventilating passage communicating the component chamber with a bottom of the cabinet and outside of the dust guard for discharging heat generated from the condenser and the compressor to outside; and a cooling fan provided in the component chamber for cooling the compressor and the condenser.