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公开(公告)号：USD660335S1
公开(公告)日：2012-05-22
申请号：US29384357
申请日：2011-01-31
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公开(公告)号：US08729497B2
公开(公告)日：2014-05-20
申请号：US13877947
申请日：2011-10-05
CPC分类号： H01J37/20 , H01J37/185 , H01J2237/2006 , H01J2237/204 , H01J2237/208
摘要： Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air.
摘要翻译： 提供了一种用于带电粒子束的样品装置，其有助于在隔离气氛中在FIB和SEM之间传送样品。 用于将盖9放置在与空气隔离并将盖9从样品保持器取下的大气隔离样品架7上的气氛隔离单元10设置在与FIB 1的样品室4连通的样品交换器5中， SEM通过门; 并且仅通过推动样品交换棒11而将盖9取出，从而仅将样品保持器7设置在样品室4中。将样品在与空气隔离的气氛中装载到大气隔离样品保持器7中， 例如在真空中，然后将盖9放在样品架上，从外部空气中分离样品; 在这种状态下，通过推动样品交换棒11，可以在FIB 1或SEM中对样品进行处理和观察，此外，当拉出样品交换棒11时，通过将样品架放置在大气中 隔离单元10，样品和外部空气之间的隔离状态。
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公开(公告)号：US20130193343A1
公开(公告)日：2013-08-01
申请号：US13877947
申请日：2011-10-05
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/185 , H01J2237/2006 , H01J2237/204 , H01J2237/208
摘要： Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air.
摘要翻译： 提供了一种用于带电粒子束的样品装置，其有助于在隔离气氛中在FIB和SEM之间传送样品。 用于将盖9放置在与空气隔离并将盖9从样品保持器取下的大气隔离样品架7上的气氛隔离单元10设置在与FIB 1的样品室4连通的样品交换器5中， SEM通过门; 并且仅通过推动样品交换棒11而将盖9取出，从而仅将样品保持器7设置在样品室4中。将样品在与空气隔离的气氛中装载到大气隔离样品保持器7中， 例如在真空中，然后将盖9放在样品架上，从外部空气中分离样品; 在这种状态下，通过推动样品交换棒11，可以在FIB 1或SEM中对样品进行处理和观察，此外，当拉出样品交换棒11时，通过将样品架放置在大气中 隔离单元10，样品和外部空气之间的隔离状态。
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公开(公告)号：USD651226S1
公开(公告)日：2011-12-27
申请号：US29384355
申请日：2011-01-31
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