-
公开(公告)号：USD651226S1
公开(公告)日：2011-12-27
申请号：US29384355
申请日：2011-01-31
-
公开(公告)号：US20080290290A1
公开(公告)日：2008-11-27
申请号：US12123168
申请日：2008-05-19
IPC分类号： H01J37/20
CPC分类号： H01J37/26 , H01J37/20 , H01J2237/2001 , H01J2237/31745
摘要： The present invention achieves a heating stage for a micro-sample, capable of efficient heating and accurate observation of the micro-sample. A micro-sample mount is a heating portion in coil form and is fixed at both ends to a base for the heating stage for the micro-sample. The base can be divided into two members at a base cut line, and the mount is fixed at one end to the first member and is fixed at the other end to the second member. A sample subjected to micro-sampling is mounted on the mount. The base is removed from the tip of a holder, and is mounted on a stage for the sample stage. A current is fed to the micro-sample mount through the members to thereby apply heat to a micro-sample for observation.
摘要翻译： 本发明实现了微量样品的加热阶段，能够有效地加热和准确地观察微量样品。 微型样品支架是线圈形式的加热部分，并且两端固定到用于微型样品的加热台的基座。 基座可以在基部切割线处分成两个部件，并且安装件在一端固定到第一部件并且在另一端固定到第二部件。 将经微量取样的样品安装在底座上。 基座从支架的尖端移除，并安装在样品台的台上。 通过构件将电流馈送到微型样品座，从而将热量加热到微量样品进行观察。
-
公开(公告)号：US08729497B2
公开(公告)日：2014-05-20
申请号：US13877947
申请日：2011-10-05
CPC分类号： H01J37/20 , H01J37/185 , H01J2237/2006 , H01J2237/204 , H01J2237/208
摘要： Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air.
摘要翻译： 提供了一种用于带电粒子束的样品装置，其有助于在隔离气氛中在FIB和SEM之间传送样品。 用于将盖9放置在与空气隔离并将盖9从样品保持器取下的大气隔离样品架7上的气氛隔离单元10设置在与FIB 1的样品室4连通的样品交换器5中， SEM通过门; 并且仅通过推动样品交换棒11而将盖9取出，从而仅将样品保持器7设置在样品室4中。将样品在与空气隔离的气氛中装载到大气隔离样品保持器7中， 例如在真空中，然后将盖9放在样品架上，从外部空气中分离样品; 在这种状态下，通过推动样品交换棒11，可以在FIB 1或SEM中对样品进行处理和观察，此外，当拉出样品交换棒11时，通过将样品架放置在大气中 隔离单元10，样品和外部空气之间的隔离状态。
-
公开(公告)号：US20130193343A1
公开(公告)日：2013-08-01
申请号：US13877947
申请日：2011-10-05
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J37/185 , H01J2237/2006 , H01J2237/204 , H01J2237/208
摘要： Provided is a sample device for a charged particle beam, which facilitates the delivery of a sample between an FIB and an SEM in an isolated atmosphere. An atmosphere isolation unit 10 for putting a lid 9 on an atmosphere isolation sample holder 7 isolated from the air and taking the lid 9 off the sample holder, is provided in a sample exchanger 5 that communicates with a sample chamber 4 of the FIB 1 or the SEM through a gate; and the lid 9 is taken off only by pushing a sample exchange bar 11, and thereby only the sample holder 7 is set in the sample chamber 4. The sample is loaded in the atmosphere isolation sample holder 7 in an atmosphere isolated from the air, for example, in a vacuum, and then the sample is isolated from the outside air by putting the lid 9 on the sample holder; the sample can be processed and observed in the FIB 1 or the SEM only by pushing the sample exchange bar 11 in this state, and further, when the sample exchange bar 11 is pulled out, by putting the rid of the sample holder in the atmosphere isolation unit 10, the state of isolation between the sample and the outside air.
摘要翻译： 提供了一种用于带电粒子束的样品装置，其有助于在隔离气氛中在FIB和SEM之间传送样品。 用于将盖9放置在与空气隔离并将盖9从样品保持器取下的大气隔离样品架7上的气氛隔离单元10设置在与FIB 1的样品室4连通的样品交换器5中， SEM通过门; 并且仅通过推动样品交换棒11而将盖9取出，从而仅将样品保持器7设置在样品室4中。将样品在与空气隔离的气氛中装载到大气隔离样品保持器7中， 例如在真空中，然后将盖9放在样品架上，从外部空气中分离样品; 在这种状态下，通过推动样品交换棒11，可以在FIB 1或SEM中对样品进行处理和观察，此外，当拉出样品交换棒11时，通过将样品架放置在大气中 隔离单元10，样品和外部空气之间的隔离状态。
-
公开(公告)号：US07700927B2
公开(公告)日：2010-04-20
申请号：US12123168
申请日：2008-05-19
IPC分类号： H01J37/20
CPC分类号： H01J37/26 , H01J37/20 , H01J2237/2001 , H01J2237/31745
摘要： The present invention achieves a heating stage for a micro-sample, capable of efficient heating and accurate observation of the micro-sample. A micro-sample mount is a heating portion in coil form and is fixed at both ends to a base for the heating stage for the micro-sample. The base can be divided into two members at a base cut line, and the mount is fixed at one end to the first member and is fixed at the other end to the second member. A sample subjected to micro-sampling is mounted on the mount. The base is removed from the tip of a holder, and is mounted on a stage for the sample stage. A current is fed to the micro-sample mount through the members to thereby apply heat to a micro-sample for observation.
摘要翻译： 本发明实现了微量样品的加热阶段，能够有效地加热和准确地观察微量样品。 微型样品支架是线圈形式的加热部分，并且两端固定到用于微型样品的加热台的基座。 基座可以在基部切割线处分成两个构件，并且安装件在一端固定到第一构件并且在另一端固定到第二构件。 将经微量取样的样品安装在底座上。 基座从支架的尖端移除，并安装在样品台的台上。 通过构件将电流馈送到微型样品座，从而将热量加热到微量样品进行观察。
-
公开(公告)号：USD660335S1
公开(公告)日：2012-05-22
申请号：US29384357
申请日：2011-01-31
-
-
-
-
-
搜索结果
6 条记录 (耗时 0.011 秒)
