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    Integrated lamellae extraction station
    1.
    发明授权
    Integrated lamellae extraction station 有权

    公开(公告)号：US09821486B2

    公开(公告)日：2017-11-21

    申请号：US14066782

    申请日：2013-10-30

    Applicant: FEI Company

    Inventor： Kelly Bruland

    IPC: B23K26/00 ,  G01N1/32 ,  B26D7/18 ,  G01N1/28

    CPC classification number: B26D7/18 ,  G01N1/286 ,  G01N1/32 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/31745 ,  Y10T83/0467 ,  Y10T83/2074

    Abstract: An integrated station for extracting specimens suitable for viewing by a transmission electron microscope from a patterned semiconductor wafer, including a wafer cassette holder; a wafer transfer device; a nanomachining device, including a scanning electron microscope and a focused ion beam, a vacuum load lock and an operator control device, and wherein the operator control device notes locations of created lamellae; a plucker device; a control computer, adapted to control the wafer transfer device and the plucker device, commanding the plucker device to remover lamellae at the locations noted by the operator control device; and a user monitor and data input device, communicatively coupled to the computer. The wafer transfer device can transfer wafers from the wafer cassette holder to the vacuum load lock; from the vacuum load lock to the plucker device and from the plucker device to the wafer cassette holder.

    CHARGED PARTICLE BEAM APPARATUS
    2.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS 审中-公开

    公开(公告)号：US20170278664A1

    公开(公告)日：2017-09-28

    申请号：US15468290

    申请日：2017-03-24

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Makoto SATO ,  Satoshi TOMIMATSU ,  Atsushi UEMOTO ,  Tatsuya ASAHATA

    IPC: H01J37/02 ,  H01J37/20

    CPC classification number: H01J37/023 ,  H01J37/20 ,  H01J37/3023 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/208 ,  H01J2237/31745

    Abstract: A charged particle beam apparatus which automatically prepares a sample piece from a sample, includes: a charged particle beam irradiation optical system configured to perform irradiation of a charged particle beam; a sample stage configured to move, the sample being placed on the sample stage; a sample piece relocation unit configured to hold and transport the sample piece which is separated and picked up from the sample; a holder fixing stage which holds a sample piece holder to which the sample piece is relocated; and a computer which performs positional control in relation to a target object based on a template and positional information which is obtained from an image of the target object, the template being generated based on an absorption current image of the target object which is acquired using the irradiation of the charged particle beam.

    PREPARATION OF SPECIMEN ARRAYS ON AN EM GRID
    7.
    发明申请
    PREPARATION OF SPECIMEN ARRAYS ON AN EM GRID 审中-公开
    样本阵列在EM网格上的准备

    公开(公告)号：US20170025250A1

    公开(公告)日：2017-01-26

    申请号：US15285070

    申请日：2016-10-04

    Applicant: Bridget Carragher ,  Clinton S. Potter ,  Tilak Jain

    Inventor： Bridget Carragher ,  Clinton S. Potter ,  Tilak Jain

    IPC: H01J37/26 ,  H01J37/20 ,  G01N1/31

    CPC classification number: G01N1/28 ,  G01N1/30 ,  G01N1/31 ,  G01N1/312 ,  H01J37/20 ,  H01J37/261 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2602

    Abstract: The invention provides systems or apparatuses for dispensing aqueous materials for electron microscopy (EM). The systems allow dispensing of aqueous materials onto an EM sample grid at individual specimen locations in an ordered array of specimen locations, with each individual specimen location in the array of locations. The systems contain a holder for reversibly receiving an EM sample grid, and a dispenser containing one or more dispensing elements that are configured to discretely dispense one or more aqueous solutions from the dispensing elements onto a plurality of individual specimen locations. The dispenser is able to provide an ordered array of discrete specimen locations discontinuous with one another. In the systems, at least one dispensing element is configured to dispense picoliter volumes of one or more of the aqueous solutions. Additionally, the systems contain a drive mechanism to position the EM sample grid relative to the one or more dispensing elements, as well as one or more reservoirs operably linked to the dispenser for holding the one or more aqueous solutions to be discretely dispensed onto each individual specimen location in the array of locations.

    Abstract translation: 本发明提供用于分配用于电子显微镜（EM）的水性材料的系统或装置。 系统允许将水性材料分配到样品位置的有序阵列中的各个样品位置处的EM样品网格上，每个单独的样品位置在位置阵列中。 所述系统包含用于可逆地接收EM样品网格的保持器，以及包含一个或多个分配元件的分配器，所述分配元件被配置为离散地将一种或多种水溶液从分配元件分配到多个单个样本位置上。 分配器能够提供彼此不连续的离散样本位置的有序阵列。 在系统中，至少一个分配元件构造成分配皮升体积的一种或多种水溶液。 另外，该系统包含驱动机构，用于相对于一个或多个分配元件定位EM样品网格，以及可操作地连接到分配器的一个或多个储存器，用于将一个或多个水溶液离散地分配到每个个体上 样本位置在位置阵列中。

    Method of reconstructing electrical probes
    8.
    发明授权
    Method of reconstructing electrical probes 有权
    电探头重建方法

    公开(公告)号：US09435828B2

    公开(公告)日：2016-09-06

    申请号：US13900857

    申请日：2013-05-23

    Applicant: GLOBALFOUNDRIES INC.

    Inventor： David R. Goulet ,  Walter V. Lepuschenko

    IPC: G01R3/00 ,  G01R1/067 ,  G01R35/00

    CPC classification number: G01R1/06738 ,  G01R3/00 ,  G01R35/00 ,  H01J2237/208 ,  H01J2237/3174

    Abstract: A probe, comprising: a shank region having a top surface integrally connected to a bottom surface of a conical region; a pyramidal tip region having a base surface integrally connected to a top surface of the conical region; and wherein the base surface of the pyramidal tip region is contained within a perimeter of the top surface of the conical region. Also a method of fabricating the probe and a method of probing devices under test.

    Abstract translation: 一种探针，包括：柄区，其具有与圆锥形区域的底表面一体连接的顶表面; 金字塔形尖端区域，其具有与所述锥形区域的顶表面一体连接的基面; 并且其中金字塔形尖端区域的基面包含在锥形区域的顶表面的周边内。 还有一种制造探针的方法和一种探测被测器件的方法。

    Total release method for sample extraction in an energetic-beam instrument
    9.
    发明授权
    Total release method for sample extraction in an energetic-beam instrument 有权
    在能量束仪器中样品提取的总释放方法

    公开(公告)号：US09349573B2

    公开(公告)日：2016-05-24

    申请号：US14797087

    申请日：2015-07-11

    Applicant: Oxford Instruments Nanotechnology Tools Limited

    Inventor： Rocky Kruger ,  Gonzalo Amador ,  Cheryl Hartfield

    IPC: G01N1/28 ,  H01J37/31 ,  H01J37/20 ,  H01J37/26

    CPC classification number: G01N1/28 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/208 ,  H01J2237/3109 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: A substrate located in an energetic-beam instrument has a region of interest to be extracted as a sample for further analysis. Cuts are made in the substrate to define a sample, and a stress-buffer layer is formed over the region of interest or adjacent to it. An isolating cut is made to separate the portion of the substrate containing the region of interest from the bulk substrate; however, the isolated area remains attached to the stress-buffer layer. An end-effector, such as the probe of a nano-manipulator, is attached to the stress-buffer layer, and the stress-buffer layer is cut to free the sample. The sample may then be attached to a holder by attachment of the stress-buffer layer thereto. Thus the sample is never at the same time connected directly and rigidly to two different objects that may move relatively to one another, creating undesirable stresses in the sample.

    Abstract translation: 位于能量束仪器中的衬底具有待提取的区域作为样品用于进一步分析。 在衬底中制备切口以限定样品，并且在感兴趣区域或其附近形成应力缓冲层。 进行隔离切口以将包含感兴趣区域的基板的部分与本体基板分离; 然而，隔离区域保持附着于应力缓冲层。 诸如纳米操纵器的探针的末端执行器附接到应力缓冲层，并且切割应力缓冲层以释放样品。 然后可以通过将应力缓冲层附着到样品上而将样品连接到保持器。 因此，样品永远不会同时直接和刚性连接到可能相对移动的两个不同的物体，从而在样品中产生不希望的应力。

    Marking apparatus and marking method
    10.
    发明授权
    Marking apparatus and marking method 有权
    标记设备和标记方法

    公开(公告)号：US09305743B2

    公开(公告)日：2016-04-05

    申请号：US14482520

    申请日：2014-09-10

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Takehiro Nakai ,  Hideki Shuto

    IPC: B25H7/04 ,  B25H7/00 ,  H01J37/22

    CPC classification number: H01J37/226 ,  B25H7/04 ,  H01J37/28 ,  H01J2237/208 ,  H01J2237/2448 ,  H01J2237/2817

    Abstract: In accordance with an embodiment, a marking apparatus includes a charged particle beam device and a marking unit. The charged particle beam device generates a charged particle beam, irradiates a sample including a laminated body with the charged particle beam, detects secondary charged particles generated from the sample, and acquires a sample image. The marking unit bores a hole reaching at least a second layer from a surface layer in the laminated body in a viewing field of the charged particle beam device.

    Abstract translation: 根据实施例，标记装置包括带电粒子束装置和标记单元。 带电粒子束装置产生带电粒子束，照射带有带电粒子束的层叠体的样本，检测从样本产生的二次带电粒子，并取得样本图像。 标记单元在带电粒子束装置的视野中从层叠体中的表面层到达至少第二层的孔。

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