公开(公告)号：US08497490B2

公开(公告)日：2013-07-30

申请号：US13060945

申请日：2009-08-24

申请人： Hideyuki Ohtake ,  Yuzuru Uehara ,  Koichiro Tanaka ,  Masaya Nagai

发明人： Hideyuki Ohtake ,  Yuzuru Uehara ,  Koichiro Tanaka ,  Masaya Nagai

IPC分类号： G21K5/00

CPC分类号： G02F1/39 ,  G02F2203/13

摘要： A terahertz wave generation device is provided with an ultra-short pulse laser light source (3) for generating ultra-short pulse laser light at a single repeating frequency and optical fibers (F1 to F5) for respective transmitting and projecting of the ultra-short pulse laser light to an LN crystal (15). Projection units (13) of the optical fibers (F1 to F5) are made parallel to irradiate the ultra-short pulse laser light (L) projected from the projection units (13), respectively, on terahertz transmission line (A) in the LN crystal (15) with sequential delays. The optical lengths of the transmission paths of the optical fibers (F1 to F5) are set longer as the transmission paths go closer to one side of the parallel direction of the projection units (13).

摘要翻译： 太赫兹波发生装置设置有用于以单个重复频率产生超短脉冲激光的超短脉冲激光光源（3）和用于分别传输和投射超短波的光纤（F1至F5） 脉冲激光到LN晶体（15）。 使光纤（F1〜F5）的投影单元（13）平行地照射在投影单元（13）上投射的超短脉冲激光（L）在LN的太赫兹传输线（A）上 晶体（15）具有连续延迟。 随着传输路径更靠近投影单元（13）的平行方向的一侧，光纤（F1至F5）的传输路径的光学长度被设定得更长。

公开(公告)号：US08450689B2

公开(公告)日：2013-05-28

申请号：US12635339

申请日：2009-12-10

申请人： Hideyuki Ohtake ,  Yuki Ichikawa

发明人： Hideyuki Ohtake ,  Yuki Ichikawa

IPC分类号： G01B15/02

CPC分类号： G01B11/0633

摘要： A non-contacting type paint film thickness measuring device includes a generating portion for generating a terahertz pulse light, a detecting portion for detecting the terahertz pulse light, a measured wave form in time-series obtaining portion for obtaining a measured wave form indicating an electric field intensity of a terahertz echo pulse light, and an intrinsic wave form in time-series obtaining portion, having an intrinsic electric field spectrum calculating portion and an intrinsic wave form in time-series calculating portion, for calculating an intrinsic wave form in time-series of an object.

摘要翻译： 非接触型涂膜厚度测量装置包括用于产生太赫兹脉冲光的产生部分，用于检测太赫兹脉冲光的检测部分，用于获得指示电力的测量波形的时间序列获得部分中的测量波形 在时间序列获取部分中具有太赫兹回波脉冲光的场强和本征波形，在时间序列计算部分中具有固有电场光谱计算部分和固有波形，用于计算时间序列获得部分中的固有波形， 系列的一个对象。

公开(公告)号：US20100195092A1

公开(公告)日：2010-08-05

申请号：US12669927

申请日：2008-09-25

申请人： Hideyuki Ohtake

发明人： Hideyuki Ohtake

IPC分类号： G01B11/06

CPC分类号： G01B11/0666

摘要： Noncontact film thickness measurement device includes an ultra short light pulse light source generating a repetitive ultra short light pulse laser, of which wavelength is in an area from visible region to near-infrared region, a light dividing device for dividing the ultra short light pulse laser into a pump light and a probe light, a light retarding device for controlling to retard the time of either one of the pump light and the probe light, a terahertz wave pulse generating device for generating a terahertz wave pulse by inputting the pump light and generating the terahertz wave pulse in a coaxial direction relative to a remaining pump light outputted without being used for generation of the terahertz wave pulse in the pump light, a light incident optical system for inputting the terahertz wave pulse to an object of which film thickness is to be measured, a light receiving optical system for receiving a terahertz echo pulse reflected from the object by inputting the terahertz wave pulse and a detecting device for detecting an electric field amplitude time resolved wave form of a terahertz echo pulse with the probe light.

摘要翻译： 非接触式膜厚测量装置包括：超短光脉冲光源，其产生波长在可见区域到近红外区域的区域的重复超短脉冲激光器;分光装置，用于分割超短脉冲激光器 泵浦光和探测光，用于控制延迟泵浦光和探测光中的任一个的时间的减光装置，用于通过输入泵浦光产生太赫兹波脉冲的太赫兹波脉冲发生装置，并产生 相对于在泵浦光中不用于产生太赫兹波脉冲而输出的剩余泵浦光的同轴方向的太赫兹波脉冲，用于将太赫兹波脉冲输入到膜厚度的对象的光入射光学系统 通过输入太赫兹波来接收从物体反射的太赫兹回波脉冲的光接收光学系统 脉冲和检测装置，用于利用探测光检测太赫兹回波脉冲的电场振幅时间分辨波形。

公开(公告)号：US07221451B2

公开(公告)日：2007-05-22

申请号：US10926351

申请日：2004-08-26

申请人： Hideyuki Ohtake ,  Koichiro Tanaka ,  Masaya Nagai ,  Junpei Yamashita ,  Kumiko Yamashita

发明人： Hideyuki Ohtake ,  Koichiro Tanaka ,  Masaya Nagai ,  Junpei Yamashita ,  Kumiko Yamashita

IPC分类号： G01J3/28

CPC分类号： G01J3/12 ,  G01J3/4338 ,  G01J11/00 ,  G01N21/3581 ,  G01N21/3586

摘要： A method for measuring a spectrum of a terahertz pulse includes generating a terahertz pulse using an ultrashort pulsed pumping light, generating a white light pulse using an ultrashort pulsed probe light, stretching and chirping the white light pulse modulating the chirped white light pulse such that the terahertz pulse and the chirped white light pulse irradiate into an electro-optic crystal synchronously, so that the chirped white light pulse is modulated by an electric field signal induced at the electro-optic crystal irradiated by the terahertz pulse, detecting a spectrum of chirped white light pulse modulated at the electro-optic modulating step by a multi-channeled detector, analyzing an electric field of the teraherz pulse irradiated to the electro-optic crystal from the spectrum of the chirped white light pulse detected by the multi-channeled spectrum detecting step, and transforming the analyzed electric field signal into a frequency spectrum of the terahertz pulse.

摘要翻译： 用于测量太赫兹脉冲的频谱的方法包括使用超短脉冲泵浦光产生太赫脉冲，使用超短脉冲探测光产生白光脉冲，拉伸和啁啾调制啁啾的白光脉冲的白光脉冲，使得 啁啾脉冲和啁啾的白光脉冲同步地照射到电光晶体中，使得啁啾的白光脉冲被在由太赫兹脉冲辐射的电光晶体处感应的电场信号调制，检测啁啾的白色光谱 通过多通道检测器在电光调制步骤中调制光脉冲，从由多通道频谱检测步骤检测的啁啾白光脉冲的频谱分析辐射到电光晶体的太赫兹脉冲的电场 并将分析的电场信号变换为太赫兹脉冲的频谱。

公开(公告)号：US20100195090A1

公开(公告)日：2010-08-05

申请号：US12649867

申请日：2009-12-30

申请人： Hideyuki Ohtake

发明人： Hideyuki Ohtake

IPC分类号： G01N21/55 ,  G01J3/00

CPC分类号： G01B11/0625

摘要： A non-contacting type paint film thickness measuring device includes a paint film thickness measuring unit having a terahertz pulse light generating portion for generating a terahertz pulse light, a first optical system for collimating and focusing an incident terahertz pulse light that is the terahertz pulse light generated by the terahertz pulse light generating portion to an object whose paint film thickness is measured, a second optical system for receiving a terahertz echo pulse that is the incident terahertz pulse light collimated and focused to the object in the first optical system and reflected at the object, a pulse width shortening portion for shortening a pulse width of the terahertz echo pulse, and a detecting portion for detecting electric field amplitude-time resolved waveform of the terahertz echo pulse whose pulse width is shortened by the pulse width shortening portion.

摘要翻译： 非接触式涂膜厚度测量装置包括具有用于产生太赫兹脉冲光的太赫兹脉冲光产生部分的涂膜厚度测量单元，用于准直和聚焦作为太赫兹脉冲光的入射太赫兹脉冲光的第一光学系统 由太赫兹脉冲光产生部分产生的紫外线脉冲光产生部分产生到测量漆膜厚度的物体;第二光学系统，用于接收作为入射的太赫兹脉冲光的太赫兹回波脉冲，其被准直并聚焦到第一光学系统中的物体并在 用于缩短太赫兹回波脉冲的脉冲宽度的脉冲宽度缩短部分和用于检测脉冲宽度被脉冲宽度缩短部分缩短的太赫兹回波脉冲的电场振幅 - 时间分辨波形的检测部分。

公开(公告)号：US20100149520A1

公开(公告)日：2010-06-17

申请号：US12635339

申请日：2009-12-10

申请人： Hideyuki OHTAKE ,  Yuki ICHIKAWA

发明人： Hideyuki OHTAKE ,  Yuki ICHIKAWA

IPC分类号： G01N21/55 ,  G01J3/00

CPC分类号： G01B11/0633

摘要： A non-contacting type paint film thickness measuring device includes a generating portion for generating a terahertz pulse light, a detecting portion for detecting the terahertz pulse light, a measured wave form in time-series obtaining portion for obtaining a measured wave form indicating an electric field intensity of a terahertz echo pulse light, and an intrinsic wave form in time-series obtaining portion, having an intrinsic electric field spectrum calculating portion and an intrinsic wave form in time-series calculating portion, for calculating an intrinsic wave form in time-series of an object.

摘要翻译： 非接触型涂膜厚度测量装置包括用于产生太赫兹脉冲光的产生部分，用于检测太赫兹脉冲光的检测部分，用于获得指示电力的测量波形的时间序列获得部分中的测量波形 在时间序列获取部分中具有太赫兹回波脉冲光的场强和本征波形，在时间序列计算部分中具有固有电场光谱计算部分和固有波形，用于计算时间序列获得部分中的固有波形， 系列的一个对象。

公开(公告)号：US08513608B2

公开(公告)日：2013-08-20

申请号：US13581123

申请日：2011-02-21

申请人： Hideyuki Ohtake ,  Yuzuru Uehara ,  Jun Takayanagi

发明人： Hideyuki Ohtake ,  Yuzuru Uehara ,  Jun Takayanagi

IPC分类号： G01J5/02

CPC分类号： G01B11/0633 ,  G01N21/3581 ,  G01N21/8422 ,  G01N2021/8427

摘要： The coating film inspection apparatus according to one embodiment of the present invention comprises a terahertz-wave generator that generates a terahertz-wave; an irradiation optical system that irradiates, with the terahertz-wave, a sample with a film formed thereon; a terahertz-wave detector that detects a terahertz-wave reflected at the sample; and a control unit that shows an electric field intensity of the detected terahertz-wave in wave form data on a time axis to detect a plurality of peaks from the wave form data, and also calculates film thickness on the basis of time difference between peaks.

摘要翻译： 根据本发明的一个实施例的涂膜检查装置包括产生太赫兹波的太赫兹波发生器; 照射光学系统，其与太赫兹波一起照射具有在其上形成的膜的样品; 检测在样品反射的太赫兹波的太赫波检测器; 以及控制单元，其显示在时间轴上的波形数据中检测到的太赫兹波的电场强度，以从波形数据中检测多个峰值，并且还基于峰值之间的时间差计算膜厚度。

公开(公告)号：US20120326037A1

公开(公告)日：2012-12-27

申请号：US13581123

申请日：2011-02-21

申请人： Hideyuki Ohtake ,  Yuzuru Uehara ,  Jun Takayanagi

发明人： Hideyuki Ohtake ,  Yuzuru Uehara ,  Jun Takayanagi

IPC分类号： G01B11/06

CPC分类号： G01B11/0633 ,  G01N21/3581 ,  G01N21/8422 ,  G01N2021/8427

摘要： The coating film inspection apparatus according to one embodiment of the present invention comprises a terahertz-wave generator that generates a terahertz-wave; an irradiation optical system that irradiates, with the terahertz-wave, a sample with a film formed thereon; a terahertz-wave detector that detects a terahertz-wave reflected at the sample; and a control unit that shows an electric field intensity of the detected terahertz-wave in wave form data on a time axis to detect a plurality of peaks from the wave form data, and also calculates film thickness on the basis of time difference between peaks.

摘要翻译： 根据本发明的一个实施例的涂膜检查装置包括产生太赫兹波的太赫兹波发生器; 照射光学系统，其与太赫兹波一起照射具有在其上形成的膜的样品; 检测在样品反射的太赫兹波的太赫波检测器; 以及控制单元，其显示在时间轴上的波形数据中检测到的太赫兹波的电场强度，以从波形数据中检测多个峰值，并且还基于峰值之间的时间差计算膜厚度。

公开(公告)号：US07593099B2

公开(公告)日：2009-09-22

申请号：US11869312

申请日：2007-10-09

申请人： Hideyuki Ohtake ,  Toshiharu Sugiura

发明人： Hideyuki Ohtake ,  Toshiharu Sugiura

IPC分类号： G01N21/00

CPC分类号： G01N21/3581 ,  G01N21/958 ,  H01S1/02

摘要： A method of examining a configuration of a sample includes the step of irradiating a terahertz pulsed light, which possesses a wavelength to transmit through the sample, to at least two different portions of the sample, the step of detecting at least two electric field amplitude-time resolved waveforms of the terahertz pulsed light transmitted through the first and second portions of the object to be examined, and the step of examining the configuration of the sample based upon phase information obtained from the electric field amplitude-time resolved waveforms detected.

摘要翻译： 检查样品的结构的方法包括将具有波长透过样品的波长的太赫兹脉冲光照射到样品的至少两个不同部分的步骤，检测至少两个电场振幅 - 通过被检查物体的第一和第二部分透射的太赫兹脉冲光的时间分辨波形，以及根据检测到的电场振幅 - 时间分辨波形获得的相位信息来检查样本的结构的步骤。

公开(公告)号：US20080084554A1

公开(公告)日：2008-04-10

申请号：US11869312

申请日：2007-10-09

申请人： Hideyuki Ohtake ,  Toshiharu Sugiura

发明人： Hideyuki Ohtake ,  Toshiharu Sugiura

IPC分类号： G01J3/00

CPC分类号： G01N21/3581 ,  G01N21/958 ,  H01S1/02

摘要： A method of examining a configuration of a sample includes the step of irradiating a terahertz pulsed light, which possesses a wavelength to transmit through the sample, to at least two different portions of the sample, the step of detecting at least two electric field amplitude-time resolved waveforms of the terahertz pulsed light transmitted through the first and second portions of the object to be examined, and the step of examining the configuration of the sample based upon phase information obtained from the electric field amplitude-time resolved waveforms detected.

摘要翻译： 检查样品的结构的方法包括将具有波长透过样品的波长的太赫兹脉冲光照射到样品的至少两个不同部分的步骤，检测至少两个电场振幅 - 通过被检查物体的第一和第二部分透射的太赫兹脉冲光的时间分辨波形，以及根据检测到的电场振幅 - 时间分辨波形获得的相位信息来检查样本的结构的步骤。