Apparatus and method for cleaning probe card contacts
    2.
    发明授权
    Apparatus and method for cleaning probe card contacts 失效
    用于清洁探针卡触点的装置和方法

    公开(公告)号:US06813804B2

    公开(公告)日:2004-11-09

    申请号:US10162675

    申请日:2002-06-06

    IPC分类号: B08B500

    CPC分类号: B24B19/16 B08B1/00 G01R3/00

    摘要: An apparatus and method for cleaning debris and residue from a multitude of electrical contacts of a test probe card of an integrated circuit test probe apparatus preferably comprises a silicon wafer having a grooved surface into which the test probe card is moved into pressurized contact. The grooved surface provides a grating structure that when combined with the pressurized electrical contacts will crush any intervening or attached residue particles, which will then break into smaller particles and fall away from the probe card. Pressure and relative movement of the probe card may be controlled by a variety of measurement sensors.

    摘要翻译: 用于从集成电路测试探针装置的测试探针卡的多个电触点清除碎片和残留物的装置和方法优选地包括具有沟槽表面的硅晶片,测试探针卡被移动到加压接触中。 带槽的表面提供了一种光栅结构,当与加压的电触点组合时,会粉碎任何中间或附着的残留物颗粒,然后将其分解成更小的颗粒并从探针卡上脱落。 探针卡的压力和相对运动可以由各种测量传感器控制。

    Probe card
    3.
    发明授权
    Probe card 失效
    探针卡

    公开(公告)号:US06909297B2

    公开(公告)日:2005-06-21

    申请号:US10754500

    申请日:2004-01-12

    IPC分类号: H01L21/66 G01R1/073 G01R31/02

    CPC分类号: G01R1/07342

    摘要: A probe card is provided which includes a plurality of stacked signal printed circuit boards for transmitting signals, and a plurality of ground printed circuit boards respectively interposed between the signal printed circuit boards. To reduce ground noise, each of the ground printed circuit boards includes a plurality of conductive ground regions which are insulated from each other.

    摘要翻译: 提供了一种探针卡,其包括用于传输信号的多个堆叠信号印刷电路板,以及分别介于信号印刷电路板之间的多个接地印刷电路板。 为了降低接地噪声,每个接地印刷电路板包括彼此绝缘的多个导电接地区域。

    Tension measurement apparatus for pogo pin
    4.
    发明授权
    Tension measurement apparatus for pogo pin 失效
    弹簧针的张力测量装置

    公开(公告)号:US06523420B2

    公开(公告)日:2003-02-25

    申请号:US09949852

    申请日:2001-09-12

    IPC分类号: G01N308

    CPC分类号: G01N3/08

    摘要: A tension measurement apparatus for a pogo pin having a height adjusting device for adjusting a height to be measured vertically, on which a device for measuring a tension of the pogo pin is mounted to be vertically movable according to the operation of the height adjusting device. The measurement apparatus preferably includes a vertical moving supporter mounted on the height adjusting device, a fixing member disposed to be coupled with or separated from the vertical moving supporter, a moving rail rotatably connected to the fixing member, a coupler mounted on the moving rail to be movable within the range of a given distance, connected to the tension measurement device. The tension measurement apparatus of the present invention can measure the tension of pogo pins under uniform conditions, while the pogo pins remain in a pogo module, thereby preventing inspection errors due to the pogo pins.

    摘要翻译: 一种用于具有用于调节要垂直测量的高度的高度调节装置的弹簧销的张力测量装置,其上安装有用于测量弹簧销的张力的装置,以根据高度调节装置的操作垂直移动。 测量装置优选地包括安装在高度调节装置上的垂直移动支撑件,设置成与垂直移动支撑件联接或分离的固定构件,可旋转地连接到固定构件的移动轨道,安装在移动轨道上的联接器 可以在给定距离的范围内移动,连接到张力测量装置。 本发明的张力测量装置可以在均匀条件下测量弹簧销的张力,同时弹簧销保持在浮标模块中,从而防止由于弹簧销引起的检查错误。

    Apparatus and method for cleaning probe card contacts
    5.
    发明申请
    Apparatus and method for cleaning probe card contacts 审中-公开
    用于清洁探针卡触点的装置和方法

    公开(公告)号:US20050034743A1

    公开(公告)日:2005-02-17

    申请号:US10950583

    申请日:2004-09-28

    CPC分类号: B24B19/16 B08B1/00 G01R3/00

    摘要: An apparatus and method for cleaning debris and residue from a multitude of electrical contacts of a test probe card of an integrated circuit test probe apparatus preferably comprises a silicon wafer having a grooved surface into which the test probe card is moved into pressurized contact. The grooved surface provides a grating structure that when combined with the pressurized electrical contacts will crush any intervening or attached residue particles, which will then break into smaller particles and fall away from the probe card. Pressure and relative movement of the probe card may be controlled by a variety of measurement sensors.

    摘要翻译: 用于从集成电路测试探针装置的测试探针卡的多个电触点清除碎片和残留物的装置和方法优选地包括具有沟槽表面的硅晶片,测试探针卡被移动到加压接触中。 带槽的表面提供了一种光栅结构,当与加压的电触点组合时,会粉碎任何中间或附着的残留物颗粒,然后将其分解成更小的颗粒并从探针卡上脱落。 探针卡的压力和相对运动可以由各种测量传感器控制。