公开(公告)号：US20050034743A1

公开(公告)日：2005-02-17

申请号：US10950583

申请日：2004-09-28

申请人： Byoung-Joo Kim ,  In-Seok Hwang ,  Ho-Yeol Lee ,  Soo-Min Byun ,  Hyung-Koo Kim ,  Joon-Su Ji

发明人： Byoung-Joo Kim ,  In-Seok Hwang ,  Ho-Yeol Lee ,  Soo-Min Byun ,  Hyung-Koo Kim ,  Joon-Su Ji

IPC分类号： G01R1/06 ,  B08B1/00 ,  B24B19/16 ,  G01R3/00 ,  H01L21/304 ,  H01L21/66 ,  B08B7/00

CPC分类号： B24B19/16 ,  B08B1/00 ,  G01R3/00

摘要： An apparatus and method for cleaning debris and residue from a multitude of electrical contacts of a test probe card of an integrated circuit test probe apparatus preferably comprises a silicon wafer having a grooved surface into which the test probe card is moved into pressurized contact. The grooved surface provides a grating structure that when combined with the pressurized electrical contacts will crush any intervening or attached residue particles, which will then break into smaller particles and fall away from the probe card. Pressure and relative movement of the probe card may be controlled by a variety of measurement sensors.

摘要翻译： 用于从集成电路测试探针装置的测试探针卡的多个电触点清除碎片和残留物的装置和方法优选地包括具有沟槽表面的硅晶片，测试探针卡被移动到加压接触中。 带槽的表面提供了一种光栅结构，当与加压的电触点组合时，会粉碎任何中间或附着的残留物颗粒，然后将其分解成更小的颗粒并从探针卡上脱落。 探针卡的压力和相对运动可以由各种测量传感器控制。

公开(公告)号：US20080168946A1

公开(公告)日：2008-07-17

申请号：US12006668

申请日：2008-01-04

申请人： Tae-Young Nam ,  Tae-Ho Kim ,  Ho-Wang Kim ,  Sang-Gon Lee ,  Byung-Ho Ahn ,  Hyung-Koo Kim

发明人： Tae-Young Nam ,  Tae-Ho Kim ,  Ho-Wang Kim ,  Sang-Gon Lee ,  Byung-Ho Ahn ,  Hyung-Koo Kim

IPC分类号： C23C16/54

CPC分类号： C23C16/4485 ,  C23C16/52

摘要： In a liquid supplying unit liquid is supplied from a buffer vessel to an external unit by pressurizing the liquid present in the buffer vessel using gas supplied to the buffer vessel. A pressure measuring member is provided to measure the pressure inside the buffer vessel, and when the pressure inside the buffer vessel is equal to or greater than a preset reference pressure during refilling of the buffer vessel, gas is discharged from the buffer vessel through a vent line.

摘要翻译： 在液体供应单元中，通过使用供应到缓冲容器的气体对存在于缓冲容器中的液体进行加压，将液体从缓冲容器供给到外部单元。 提供压力测量构件以测量缓冲容器内部的压力，并且当缓冲容器内部的压力在再填充缓冲容器期间等于或大于预设的参考压力时，气体通过排气口从缓冲容器排出 线。

公开(公告)号：US06813804B2

公开(公告)日：2004-11-09

申请号：US10162675

申请日：2002-06-06

申请人： Byoung-Joo Kim ,  In-Seok Hwang ,  Ho-Yeol Lee ,  Soo-Min Byun ,  Hyung-Koo Kim ,  Joon-Su Ji

发明人： Byoung-Joo Kim ,  In-Seok Hwang ,  Ho-Yeol Lee ,  Soo-Min Byun ,  Hyung-Koo Kim ,  Joon-Su Ji

IPC分类号： B08B500

CPC分类号： B24B19/16 ,  B08B1/00 ,  G01R3/00

摘要： An apparatus and method for cleaning debris and residue from a multitude of electrical contacts of a test probe card of an integrated circuit test probe apparatus preferably comprises a silicon wafer having a grooved surface into which the test probe card is moved into pressurized contact. The grooved surface provides a grating structure that when combined with the pressurized electrical contacts will crush any intervening or attached residue particles, which will then break into smaller particles and fall away from the probe card. Pressure and relative movement of the probe card may be controlled by a variety of measurement sensors.

摘要翻译： 用于从集成电路测试探针装置的测试探针卡的多个电触点清除碎片和残留物的装置和方法优选地包括具有沟槽表面的硅晶片，测试探针卡被移动到加压接触中。 带槽的表面提供了一种光栅结构，当与加压的电触点组合时，会粉碎任何中间或附着的残留物颗粒，然后将其分解成更小的颗粒并从探针卡上脱落。 探针卡的压力和相对运动可以由各种测量传感器控制。