公开(公告)号：US20130249584A1

公开(公告)日：2013-09-26

申请号：US13425170

申请日：2012-03-20

申请人： CHOON LEONG LOU ,  HO YEH CHEN ,  HSIAO TING TSENG

发明人： CHOON LEONG LOU ,  HO YEH CHEN ,  HSIAO TING TSENG

IPC分类号： G01R1/067

CPC分类号： G01R1/07342 ,  G01R1/06727 ,  G01R1/07357 ,  G01R31/2891

摘要： A high precision semiconductor probing system includes a probe head, a circuit board positioned above the probe head, and an optical microscope, wherein the probe head has a plurality of vertical probes and at least one cantilever probe having a vertical body positioned therein. The cantilever probe is disposed close to an edge of the probe head and extends laterally out from the probe head, in order to facilitate the visual alignment viewing from top of the probing apparatus. The optical microscope is positioned on top of the probing apparatus and is configured to have a line of sight directed to the tip of the cantilever probe.

摘要翻译： 高精度半导体探测系统包括探针头，位于探针头上方的电路板和光学显微镜，其中探头具有多个垂直探针和至少一个垂直体定位在其中的悬臂探头。 悬臂探头靠近探头的边缘设置，并从探针头侧向伸出，以便于从探测装置的顶部观察视觉对准。 光学显微镜位于探测装置的顶部，并被配置成具有指向悬臂探针的尖端的视线。

公开(公告)号：US09329205B2

公开(公告)日：2016-05-03

申请号：US13425170

申请日：2012-03-20

申请人： Choon Leong Lou ,  Ho Yeh Chen ,  Hsiao Ting Tseng

发明人： Choon Leong Lou ,  Ho Yeh Chen ,  Hsiao Ting Tseng

IPC分类号： G01R1/067 ,  G01R1/073 ,  G01R31/28

CPC分类号： G01R1/07342 ,  G01R1/06727 ,  G01R1/07357 ,  G01R31/2891

摘要： A high precision semiconductor probing system includes a probe head, a circuit board positioned above the probe head, and an optical microscope, wherein the probe head has a plurality of vertical probes and at least one cantilever probe having a vertical body positioned therein. The cantilever probe is disposed close to an edge of the probe head and extends laterally out from the probe head, in order to facilitate the visual alignment viewing from top of the probing apparatus. The optical microscope is positioned on top of the probing apparatus and is configured to have a line of sight directed to the tip of the cantilever probe.

摘要翻译： 高精度半导体探测系统包括探针头，位于探针头上方的电路板和光学显微镜，其中探头具有多个垂直探针和至少一个垂直体定位在其中的悬臂探头。 悬臂探头靠近探头的边缘设置，并从探针头侧向伸出，以便于从探测装置的顶部观察视觉对准。 光学显微镜位于探测装置的顶部，并被配置成具有指向悬臂探针的尖端的视线。