公开(公告)号：US20050169341A1

公开(公告)日：2005-08-04

申请号：US10713583

申请日：2003-11-14

申请人： Hubertus Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei Govorkov

发明人： Hubertus Bergmann ,  Spencer Merz ,  Gongxue Hua ,  Sergei Govorkov

IPC分类号： H01S3/097 ,  H01S3/225

CPC分类号： H01S3/097 ,  H01S3/225

摘要： An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pulser to be run without oil cooling. This relatively low voltage can be increased to the necessary voltage level, such as on the order to 12 kV to 15 kV, needed to drive the laser system. This transference can be accomplished using standard components, such as a pair of capacitor elements that are pulse-charged in parallel, but can be discharged in series following a reversal of charge on one of the capacitor elements.

摘要翻译： 无油脉冲发生器设计可用于生产更轻，生产成本更低，比现有系统简单的准分子或分子氟激光系统。 这样的设计允许将相对较低的DC电压施加到主变压器，允许脉冲发生器在没有油冷却的情况下运行。 该相对低的电压可以增加到驱动激光系统所需的所需电压水平，例如达到12kV至15kV。 可以使用诸如并联脉冲充电的一对电容器元件之类的标准组件来实现该转移，但是可以在其中一个电容器元件上的电荷反转之后串联放电。

公开(公告)号：US20050200304A1

公开(公告)日：2005-09-15

申请号：US11020749

申请日：2004-12-22

申请人： Vladimir Korobochko ,  Denis Bolshukhin ,  Lutz Dippmann ,  Spencer Merz ,  Hubertus Bergmann ,  Juergen Kleinschmidt

发明人： Vladimir Korobochko ,  Denis Bolshukhin ,  Lutz Dippmann ,  Spencer Merz ,  Hubertus Bergmann ,  Juergen Kleinschmidt

IPC分类号： H05H1/24 ,  H01L21/027 ,  H02M9/04 ,  H03K3/57 ,  H05B41/34 ,  H05G2/00 ,  H05H1/46 ,  H02M5/45

CPC分类号： H05G2/003 ,  H03K3/57 ,  H05B41/34

摘要： The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation. The object of the invention, to find a novel possibility for generating pulsed high-energy currents for a gas discharge pumped radiation source which permits a stable generation of high voltage and a reliable resetting of voltage using simple circuitry, is met according to the invention in that the charging circuit is an LC inversion charging circuit which communicates with a DC voltage source that provides only one half of the high voltage required for the gas discharge, wherein the inversion charging circuit has a capacitor bank with a first capacitor arranged directly parallel to the DC voltage source and a second capacitor which contributes after simultaneous charging to the recharging of the first capacitor by a triggered switch by a saturable recharging inductor for recharging the first capacitor, as a result of which the full high voltage required for discharging is provided in the capacitor bank.

摘要翻译： 本发明涉及一种用于产生气体放电泵浦辐射源的脉冲电流的装置，特别是具有高重复率和高电流强度用于产生等离子体发射EUV辐射。 本发明的目的是为了找到用于产生气体放电泵浦辐射源的脉冲高能电流的新型可能性，其允许使用简单电路稳定地产生高电压和可靠的电压复位，根据本发明， 所述充电电路是与仅提供气体放电所需的高电压的一半的直流电压源进行通信的LC反相充电电路，其中所述反相充电电路具有电容器组，所述电容器组具有直接平行于所述第一电容器 直流电压源和第二电容器，其在通过用于再充电第一电容器的可饱和充电电感器的触发开关同时充电到第一电容器的充电之后起作用，从而在第一电容器中提供放电所需的全部高电压 电容器组。