Method of forming thin insulating layer in MRAM device
    1.
    发明授权
    Method of forming thin insulating layer in MRAM device 失效
    在MRAM器件中形成薄绝缘层的方法

    公开(公告)号:US07642190B2

    公开(公告)日:2010-01-05

    申请号:US11616800

    申请日:2006-12-27

    申请人: Hyo Sang Kim

    发明人: Hyo Sang Kim

    IPC分类号: H01L21/302

    CPC分类号: H01L27/222

    摘要: A method of forming a thin insulating layer in an MRAM device makes it possible to effectively prevent the insulating layer from being locally thinned, creating a short circuit or other defect. The method includes forming lower patterns for the MRAM device on a semiconductor substrate. An insulating layer for covering the lower patterns is formed. Portions of the insulating layer which are substantially thicker relative to other portions of the insulating layer are selectively dry etched using a photoresist mask. The insulating layer is planarized a chemical mechanical polishing (CMP) process so that the insulating layer remains at a thickness larger than a target thickness. The surface of the planarized insulating layer is plasma dry etched or wet etched such that the insulating layer is reduced to the target thickness.

    摘要翻译: 在MRAM器件中形成薄绝缘层的方法使得可以有效地防止绝缘层局部变薄,产生短路或其它缺陷。 该方法包括在半导体衬底上形成用于MRAM器件的较低图案。 形成用于覆盖下图案的绝缘层。 使用光致抗蚀剂掩模来选择性地干蚀刻绝缘层相对于绝缘层的其它部分基本上更厚的部分。 绝缘层被平坦化化学机械抛光(CMP)工艺,使得绝缘层保持在比目标厚度大的厚度。 平坦化绝缘层的表面被等离子体干蚀刻或湿蚀刻,使得绝缘层减小到目标厚度。

    Method for Fabricating MRAM
    2.
    发明申请
    Method for Fabricating MRAM 审中-公开
    制造MRAM的方法

    公开(公告)号:US20080153178A1

    公开(公告)日:2008-06-26

    申请号:US11860133

    申请日:2007-09-24

    申请人: HYO SANG KIM

    发明人: HYO SANG KIM

    IPC分类号: H01L21/00

    CPC分类号: H01L27/222 H01L43/12

    摘要: A method of fabricating a magnetic random access memory (MRAM) is provided. A metal interconnection, a magnetic tunnel junction layer, and an interlayer dielectric layer are formed on a semiconductor substrate. A portion of the interlayer dielectric layer is selectively removed, leaving protruded regions. A metal layer is then formed on the interlayer dielectric layer and planarized using the protruded portions of the interlayer dielectric layer as a target.

    摘要翻译: 提供了一种制造磁随机存取存储器(MRAM)的方法。 金属互连,磁性隧道结层和层间电介质层形成在半导体衬底上。 选择性地去除层间绝缘层的一部分,留下突出区域。 然后在层间电介质层上形成金属层,并使用层间绝缘层的突出部分作为目标进行平坦化。

    Dynamically tunable optical amplifier and fiber optic light source
    3.
    发明授权
    Dynamically tunable optical amplifier and fiber optic light source 失效
    动态可调光放大器和光纤光源

    公开(公告)号:US06728026B2

    公开(公告)日:2004-04-27

    申请号:US09942457

    申请日:2001-08-29

    IPC分类号: H01S300

    摘要: An optical amplifier comprises a wavelength tunable filter, one or more optical gain stages, and a controller for controlling a spectral profile of the wavelength tunable filter in response to a measured spectral characteristic of the amplifier. The controller may also control gain of the gain stage(s). The controller determines the filter spectral profile necessary to obtain a desired amplifier spectral characteristic. The spectral characteristic may, for example, be a power spectral output of the amplifier or a gain profile of the amplifier. The amplifier may incorporate a dispersion compensator. The controller may control a spectral profile of the wavelength tunable filter and gain of the dispersion compensator. A tunable fiber light source is also described.

    摘要翻译: 光学放大器包括波长可调滤波器,一个或多个光学增益级和用于响应于所测量的放大器的光谱特性来控制波长可调谐滤波器的光谱分布的控制器。 控制器还可以控制增益级的增益。 控制器确定获得所需放大器频谱特性所需的滤波器频谱分布。 频谱特性可以例如是放大器的功率谱输出或放大器的增益曲线。 放大器可以并入色散补偿器。 控制器可以控制波长可调滤波器的谱分布和色散补偿器的增益。 还描述了可调光纤光源。

    Fine filtering apparatus controllable packing density using flexible fiber
    4.
    发明申请
    Fine filtering apparatus controllable packing density using flexible fiber 审中-公开
    精细过滤装置采用柔性纤维控制包装密度

    公开(公告)号:US20070193944A1

    公开(公告)日:2007-08-23

    申请号:US10598662

    申请日:2004-03-17

    IPC分类号: B01D21/02

    CPC分类号: B01D29/66 B01D35/10 C02F1/004

    摘要: An apparatus for effectively filtering and separating fine floc, algae, suspended solids, etc. remaining in water after biological and physiochemical treatment is provided. The fine filtering apparatus includes flexible fibers that control packing density, thus improving filtration efficiency, the amount of clarified water, and filtering duration, and reducing power consumption compared to a conventional filtering apparatus is provided. In the filtering apparatus, flexible fibers having an effective diameter of 1 to 60 μm and which are flexible, elastic, and have proper surface roughness extend in the longitudinal direction of the apparatus. A jacket shaped unit for supplying source water (supplied water) has a porous structure. Clarified water (treated water) is discharged through a central porous chamber. The whole filter media layer can be utilized as a particle-entrapping space.

    摘要翻译: 提供了一种用于在生物和物理化学处理后有效过滤和分离留在水中的细絮状物,藻类,悬浮固体等的装置。 提供了精细过滤装置,其与传统的过滤装置相比,包括控制包装密度,从而提高过滤效率,澄清水量和过滤持续时间以及降低功耗的柔性纤维。 在过滤装置中,柔性,弹性和适当的表面粗糙度的有效直径为1至60μm的柔性纤维在装置的纵向方向上延伸。 用于供给源水(供水)的护套形状单元具有多孔结构。 澄清水(处理水)通过中心多孔室排出。 整个过滤介质层可以用作颗粒捕获空间。

    Acousto-optic tunable filter having improved wave-damping capability
    5.
    发明授权
    Acousto-optic tunable filter having improved wave-damping capability 失效
    声光可调滤波器具有改进的波阻尼能力

    公开(公告)号:US06904188B1

    公开(公告)日:2005-06-07

    申请号:US10072511

    申请日:2002-02-05

    摘要: This invention relates to an acousto-optical tunable filter generally of the kind described in U.S. Pat. No. 6,266,462. More specifically, the invention relates to a filter and its construction, the filter including a support, first and second mounts at spaced locations on the support, an optical fiber having first and second mounted portions secured to the first and second mounts respectively and a filtering section between the first and second mounted portions, a signal generator operable to generate a periodic signal, and an electro-acoustic transducer having a terminal connected to the signal generator and an actuating portion, the electric signal causing vibration of the actuating portion, and the actuating portion being connected to the filtering section so that the vibration generates a transverse wave traveling along the filtering section. The filter has an improved damper to more effectively dampen waves traveling along the filtering section.

    摘要翻译: 本发明涉及一种通常在美国专利中描述的那种声光可调滤波器。 第6,266,462号。 更具体地,本发明涉及一种过滤器及其结构,该过滤器包括支撑件,位于支撑件上的间隔位置处的第一和第二安装件,光纤具有分别固定到第一和第二安装件的第一和第二安装部分, 第一和第二安装部分之间的部分,可操作以产生周期性信号的信号发生器和具有连接到信号发生器的端子和致动部分的电声换能器,引起致动部分振动的电信号,以及 致动部分连接到过滤部分,使得振动产生沿着过滤部分行进的横波。 过滤器具有改进的阻尼器,以更有效地抑制沿着过滤部分行进的波浪。

    Power test facility system of train and testing method of the same
    7.
    发明授权
    Power test facility system of train and testing method of the same 失效
    电力测试设备系统的列车和测试方法相同

    公开(公告)号:US06837099B2

    公开(公告)日:2005-01-04

    申请号:US10665135

    申请日:2003-09-16

    IPC分类号: G01L3/26 G01M17/08

    CPC分类号: G01M17/08

    摘要: The present invention relates to a power testing facility system of a train and a testing method using the same. In the present invention, there are provided a test bed for engaging a testing object, a DC power facility formed of a converter transformer and DC power converter, an AC power facility formed of a phase balancing apparatus, a voltage regulating transformer, and a power factor improving apparatus, a load facility formed of an induction generator and a bi-directional inverter, a measuring apparatus for measuring various characteristics of a propulsion apparatus, and a control apparatus for controlling the entire system. With the above elements, it is possible to implement a type test, a combination test and a train operation simulation test using a facility system adapted to test a power of a train. When selecting an instrument installed in a train, it is implement a desired reliability by testing a previously fabricated product. The facility is economically operated, and an operation cost is minimized. An easier maintenance is implemented. An electrical energy may be restored using a bi-directional inverter. A power loss is decreased. It is possible to prevent an indoor temperature increase.

    Method and apparatus for an acousto-optic filter that generates a helical wave and method for manufacturing same
    8.
    发明授权
    Method and apparatus for an acousto-optic filter that generates a helical wave and method for manufacturing same 失效
    产生螺旋波的声光滤波器的方法和装置及其制造方法

    公开(公告)号:US06950566B1

    公开(公告)日:2005-09-27

    申请号:US10650386

    申请日:2003-08-27

    IPC分类号: G02B6/42 G02F1/125 G02B1/335

    CPC分类号: G02F1/125

    摘要: A method to reduce optical intensity modulation is described that involves generating a spiraling wave onto an acoustic-optic interaction portion of an optical fiber within an acousto-optic filter in order to create reflected waves that are orthogonal with respect to waves that are originally launched onto the interaction portion. A transducer is described having a first section and a second section. The first and second sections each have a polling direction along a first axis. The transducer also has a third section and a fourth section. The third and fourth sections each have a polling direction along a second axis. The third and fourth sections are each between the first and second sections. An acousto-optic filter having a horn with an elliptical cross section coupled to a transducer is also described. A transducer for an excitation element capable of launching spiraling acoustic waves is described.

    摘要翻译: 描述了一种降低光强度调制的方法,其涉及在声光滤波器内的光纤的声光相互作用部分上产生螺旋波,以便产生与最初发射到波的光正交的反射波 交互部分。 描述了具有第一部分和第二部分的换能器。 第一和第二部分各自具有沿着第一轴的轮询方向。 换能器还具有第三部分和第四部分。 第三和第四部分各自具有沿着第二轴的轮询方向。 第三和第四部分各自在第一和第二部分之间。 还描述了具有耦合到换能器的具有椭圆形横截面的喇叭的声光滤波器。 描述了能够发射螺旋声波的激励元件的换能器。

    Interferometric laser sensor having a linear laser cavity
    10.
    发明授权
    Interferometric laser sensor having a linear laser cavity 失效
    具有线性激光腔的干涉激光传感器

    公开(公告)号:US6034770A

    公开(公告)日:2000-03-07

    申请号:US800075

    申请日:1997-02-12

    IPC分类号: G01C19/64 G01C19/66 G01B9/02

    CPC分类号: G01C19/66

    摘要: An interferometer-type laser sensor acts concurrently as a light source and to measure external physical quantities such as rotation, magnetic field, current and fluid velocity. The interferometer-type laser sensor has a laser resonator having a laser gain medium, optical path and two or more reflectors to reflect incident light toward an opposite direction. In addition, a device is provided for interfering light not reflecting on the said reflectors but passing through. A signal processor is provided to detect and process interference signal generated from the interfering device. The laser sensor has a distinction over the conventional passive fiber-optic gyroscope as followings: first, expensive polarization maintaining fiber or polarizer is not required, since there is no polarization error which is readily appeared at the conventional passive fiber-optic gyroscope. Secondly, wavelength-dependent errors generating during the use of a light source of wide width decrease remarkably by employing a laser of narrow width. Thirdly, an external light source is not required, since a laser resonator acts concurrently as a light source and measures external physical quantity.

    摘要翻译: 干涉仪型激光传感器同时作为光源并测量外部物理量,如旋转,磁场,电流和流体速度。 干涉仪型激光传感器具有激光谐振器,该激光谐振器具有激光增益介质,光路和两个或更多个反射器,以将入射光朝相反方向反射。 此外,提供了用于干扰不在所述反射器上反射但穿过的光的装置。 提供信号处理器以检测和处理从干扰装置产生的干扰信号。 激光传感器与传统的无源光纤陀螺仪有以下区别:首先,不需要昂贵的偏振保持光纤或偏振器,因为在常规的无源光纤陀螺仪中没有出现偏振误差。 其次,在使用宽宽光源时产生的波长相关误差通过采用窄宽度的激光而显着降低。 第三,不需要外部光源,因为激光谐振器同时作为光源并测量外部物理量。