公开(公告)号：US20070128755A1

公开(公告)日：2007-06-07

申请号：US11585769

申请日：2006-10-23

Applicant: Matthias Fuertsch ,  Stefan Finkbeiner ,  Christoph Schelling ,  Stefan Weiss ,  Thomas Wagner ,  Christian Maeurer ,  Ines Breibach

Inventor： Matthias Fuertsch ,  Stefan Finkbeiner ,  Christoph Schelling ,  Stefan Weiss ,  Thomas Wagner ,  Christian Maeurer ,  Ines Breibach

IPC: H01L21/00

CPC classification number: B81C1/00087 ,  B81B2201/057

Abstract: In the manufacture of at least one passage in a silicon wafer, in a first method step, starting from a first side of the wafer, a first recess is produced in the wafer, and in a second method step, starting from a second side of the wafer, a second recess is produced in the wafer. The first recess and the second recess are produced such that together they form a passage between the first and second sides of the silicon wafer.

Abstract translation: 在制造硅晶片中的至少一个通道的过程中，在第一方法步骤中，从晶片的第一侧开始，在晶片中产生第一凹槽，并且在第二方法步骤中，从第二方面开始， 在晶片中产生第二凹槽。 制造第一凹部和第二凹部，使得它们一起形成硅晶片的第一和第二面之间的通道。

公开(公告)号：US20080041151A1

公开(公告)日：2008-02-21

申请号：US11800009

申请日：2007-04-30

Applicant: Matthias Fuertsch ,  Stefan Finkbeiner ,  Christoph Schelling ,  Stefan Weiss ,  Thomas Wagner ,  Christian Maeurer ,  Ines Breibach

Inventor： Matthias Fuertsch ,  Stefan Finkbeiner ,  Christoph Schelling ,  Stefan Weiss ,  Thomas Wagner ,  Christian Maeurer ,  Ines Breibach

IPC: G01F1/68 ,  B44C1/22

CPC classification number: B01L3/0268 ,  B01L3/0248 ,  B01L2300/0819 ,  B01L2300/1827 ,  B01L2400/0442 ,  Y10T137/87153

Abstract: A microfluidic device for metering a fluid or for the metered dispensing of a fluid is provided, the device having a substrate, a pipette element having a dispensing side, which pipette element has a sealed side, and the device also having a heating device in the region of the sealed side. Alternatively, the microfluidic device is provided with the pipette element having a side that is connected to a reservoir, and a heating device in the region of the side connected to the reservoir.

Abstract translation: 提供了一种用于计量流体或用于流体计量分配的微流体装置，所述装置具有基底，具有分配侧的移液管元件，所述移液管元件具有密封侧，并且所述装置还具有加热装置 密封面的区域。 或者，微流体装置设置有具有连接到储存器的侧面的移液管元件，以及连接到储存器的侧面区域中的加热装置。