Interferometer having a micromirror
    1.
    发明授权
    Interferometer having a micromirror 有权
    干涉仪具有微镜

    公开(公告)号:US06204925B1

    公开(公告)日:2001-03-20

    申请号:US09502860

    申请日:2000-02-11

    IPC分类号: G01B902

    CPC分类号: G01J3/45 G01J3/4535 G01J9/02

    摘要: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector.

    摘要翻译: 干涉仪包括用于将源束分解成测试光束和参考光束的分束器,用于检测干涉图案的成像装置,设置在测试光束的路径中以用于将测试光束反射到成像装置的反射镜, 设置在参考光束的路径中的微镜,用于将参考光束的一部分反射到成像装置;以及聚焦机构,设置成用于将参考光束聚焦在微镜上。 微镜的横向尺寸不超过由聚焦机构聚焦在其上的参考光束的中心波瓣的近似侧向尺寸。 用于减小光束中的像差影响的空间滤光器包括设置在透明基底上的反射器,其中反射器的横向尺寸不超过聚焦在反射器上的光束的空间强度分布的中心波瓣的近似侧向尺寸。

    Interferometer having a micromirror
    2.
    发明授权
    Interferometer having a micromirror 失效
    干涉仪具有微镜

    公开(公告)号:US6025912A

    公开(公告)日:2000-02-15

    申请号:US853562

    申请日:1997-05-08

    CPC分类号: G01J3/45 G01J3/4535 G01J9/02

    摘要: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.In accordance with Office policy under M.P.E.P. Sec. 608.01(b), Applicant submits herewith as a part of the submitted Substitute Specification, a separate sheet with the subject Abstract as currently rewritten.

    摘要翻译: 干涉仪包括用于将源束分解成测试光束和参考光束的分束器,用于检测干涉图案的成像装置,设置在测试光束的路径中以用于将测试光束反射到成像装置的反射镜, 设置在参考光束的路径中的微镜,用于将参考光束的一部分反射到成像装置;以及聚焦机构,设置成用于将参考光束聚焦在微镜上。 微镜的横向尺寸不超过由聚焦机构聚焦在其上的参考光束的中心波瓣的近似侧向尺寸。 用于减小光束中的像差影响的空间滤光器包括设置在透明基底上的反射器,其中反射器的横向尺寸不超过聚焦在反射器上的光束的空间强度分布的中心波瓣的近似侧向尺寸。 还提供了一种在波前测量系统中对波束进行滤波的方法。 该方法包括聚焦光束,反射聚焦光束的特定第一部分,以及透射光束的第二部分。 根据M.P.E.P.的办公室政策。 第 608.01(b),申请人作为提交的替代规范的一部分提交了与当前重写的主题摘要的单独的表格。

    Method and apparatus for beam directing
    3.
    发明授权
    Method and apparatus for beam directing 失效
    射束方向和装置

    公开(公告)号:US06493094B2

    公开(公告)日:2002-12-10

    申请号:US09813224

    申请日:2001-03-20

    IPC分类号: G01B902

    CPC分类号: G01J3/45 G01J3/4535 G01J9/02

    摘要: Focusing means to focus a beam upon a reflective-transmissive surface. Reflecting means to reflect a central portion of the beam from the reflective-transmissive surface. Transmitting means to transmit a portion of the beam that lies outside the central portion. Receiving means to receive the transmitted portion of the beam and combining means to combine the reflected central portion of the beam with a test beam to generate an interference pattern.

    摘要翻译: 聚焦装置将光束聚焦在反射透射表面上。 反射装置用于从反射透射表面反射光束的中心部分。 用于传输位于中心部分之外的梁的一部分的传输装置。 接收装置,用于接收光束的发送部分和组合装置,以将光束的反射中心部分与测试光束组合以产生干涉图案。

    Adjustable optical test apparatus including interferometer with
micromirror and alignment observation system
    4.
    发明授权
    Adjustable optical test apparatus including interferometer with micromirror and alignment observation system 失效
    可调式光学测试仪器包括具有微镜和对准观察系统的干涉仪

    公开(公告)号:US5675413A

    公开(公告)日:1997-10-07

    申请号:US710616

    申请日:1996-09-20

    CPC分类号: G01J3/45 G01J3/4535 G01J9/02

    摘要: An adjustable optical system for determining aberration in a source beam by comparison of a test beam with a reference beam. The system includes a test source for producing a source beam having a spacial intensity distribution including an aberration component, a wavefront analyzer for processing a fringe signal associated with the aberration component, and an interferometer interposed between the test source and wavefront analyzer. The interferometer includes a beamsplitter for splitting the source beam into a test beam and a reference beam, a mirror disposed in the test beam path, and a micromirror disposed in the reference beam path. The micromirror reflects a central portion of the reference beam toward an imaging device and allows an outer portion of the reference beam to pass thereby. The interferometer is also provided with an alignment image assembly for collecting and detecting the outer portion of the reference beam so that the micromirror and test source may be independently adjusted relative to the central and outer portions of the reference beam.

    摘要翻译: 一种可调光学系统,用于通过将测试光束与参考光束进行比较来确定源光束中的像差。 该系统包括用于产生具有包括像差分量的空间强度分布的源束的测试源,用于处理与像差分量相关联的条纹信号的波前分析器以及插入在测试源和波前分析器之间的干涉仪。 干涉仪包括用于将源束分解成测试光束和参考光束的分束器,设置在测试光束路径中的反射镜和设置在参考光束路径中的微镜。 微镜将参考光束的中心部分朝向成像装置反射,并允许参考光束的外部部分通过。 干涉仪还设置有对准图像组件,用于收集和检测参考光束的外部部分,使得微镜和测试光源可以相对于参考光束的中心部分和外部部分独立地调节。

    Optical disk medium having features for radial tilt detection and apparatus for measuring radial tilt
    5.
    发明授权
    Optical disk medium having features for radial tilt detection and apparatus for measuring radial tilt 失效
    具有用于径向倾斜检测的特征的光盘介质和用于测量径向倾斜的装置

    公开(公告)号:US06549511B1

    公开(公告)日:2003-04-15

    申请号:US09256791

    申请日:1999-02-24

    申请人: Ivan Prikryl

    发明人: Ivan Prikryl

    IPC分类号: G11B724

    摘要: An optical disk medium has a data surface with grooves and lands behind a transparent substrate. Periodically, along radial lines, tilt measurement features are provided in the data surface, wherein the height of the grooves and lands is abruptly changed, preferably over a short circumferential length. For example, along the radial lines, the height of a groove (over a short length) may be changed to the height of a land and the height of a land (over a short length) may be changed to the height of a groove. The optical system and the optical disk medium are designed so that when the focused laser spot is centered on a groove, a radial push-pull tracking error signal is zero even if the disk is tilted. If the focused laser spot is centered on a land, the tracking error signal varies when the disk is tilted. As a result, when the focused laser spot passes over a tilt measurement feature, an abrupt step in the tracking error signal provides a measure of the magnitude and direction of tilt. The tilt measurement features have little effect on the data signal, and little effect on the filtered tracking error signal and the filtered focus error signal.

    摘要翻译: 光盘介质具有在透明基板之后具有凹槽和平台的数据表面。 周期性地,沿着径向线,倾斜测量特征被提供在数据表面中,其中凹槽和平台的高度突然改变,优选地在短的圆周长度上。 例如,沿着径向线,可以将槽的高度(短的长度)改变为焊盘的高度,并且焊盘的高度(短的长度)可以改变为槽的高度。 光学系统和光盘介质的设计使得当聚焦的激光光斑位于凹槽中心时,即使光盘倾斜,径向推挽跟踪误差信号为零。 如果聚焦的激光光斑位于一个平台上,则当光盘倾斜时,跟踪误差信号会发生变化。 结果,当聚焦的激光光点通过倾斜测量特征时,跟踪误差信号中的突然步骤提供了倾斜的大小和方向的测量。 倾斜测量功能对数据信号几乎没有影响,对滤波跟踪误差信号和滤波后的聚焦误差信号几乎没有影响。

    Concentric photodetector arrangement for focusing and tracking
    6.
    发明授权
    Concentric photodetector arrangement for focusing and tracking 失效
    用于聚焦和跟踪的同心光电检测器布置

    公开(公告)号:US4843603A

    公开(公告)日:1989-06-27

    申请号:US166679

    申请日:1988-03-11

    申请人: Ivan Prikryl

    发明人: Ivan Prikryl

    IPC分类号: G11B7/09 G11B7/13

    CPC分类号: G11B7/13 G11B7/09

    摘要: An optical data storage system includes a laser which is focused on an optical disk by an objective lens. A tracking actuator and a focus actuator move the objective lens about a tracking axis and focus axis respectively. The tracking and focus actuators respond to signals provided by a focus and tracking detector. The focus and tracking detector is formed by four photodetectors which are electrically isolated from one another. The third and fourth photodetectors are disposed about the outer peripheries of the first and second photodetectors, respectively, about an axis. Each photodetector emits an electrical signal representative of the radiation detected thereon.

    摘要翻译: 光学数据存储系统包括通过物镜聚焦在光盘上的激光器。 跟踪致动器和聚焦致动器分别围绕跟踪轴和对焦轴移动物镜。 跟踪和聚焦执行器响应由焦点和跟踪检测器提供的信号。 聚焦和跟踪检测器由四个彼此电隔离的光电探测器形成。 第三和第四光电检测器分别围绕第一和第二光电检测器的外周围绕轴设置。 每个光电检测器发射代表在其上检测的辐射的电信号。

    Optical test system including interferometer with micromirror and
piezoelectric translator for controlling test path mirror
    7.
    发明授权
    Optical test system including interferometer with micromirror and piezoelectric translator for controlling test path mirror 失效
    光学测试系统包括具有微镜的干涉仪和用于控制测试路径镜的压电转换器

    公开(公告)号:US5771095A

    公开(公告)日:1998-06-23

    申请号:US710617

    申请日:1996-09-20

    CPC分类号: G01J3/45 G01J3/4535 G01J9/02

    摘要: An optical system for determining aberration in a source beam by comparison of a test beam with a reference beam. The optical system includes a test source for producing a source beam having a spacial intensity distribution including an aberration component, a wavefront analyzer for processing a fringe signal associated with the aberration component, and an interferometer. The interferometer is provided with a beamsplitter for splitting the source beam into a test beam and a reference beam, an imaging device for detecting the test beam and the reference beam, and a mirror disposed in a test beam path for reflecting the test beam toward the imaging device. The interferometer also includes a micromirror disposed in a reference beam path for reflecting a portion of the reference beam toward the imaging device and a piezoelectric translator operatively linked to the mirror and controlled by the wave front analyzer. The mirror is capable of moving relative to the path of the test beam. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam as focused thereon by focusing means so that when the test beam is reflected by the mirror and the portion of the reference beam is reflected by the micromirror, the reflected test beam and the reflected portion of the reference beam are both incident upon the imaging device forming an interference pattern including fringes which are converted into the fringe signal.

    摘要翻译: 一种用于通过将测试光束与参考光束进行比较来确定光源光束中的像差的光学系统。 光学系统包括用于产生具有包括像差分量的空间强度分布的源光束的测试源,用于处理与像差分量相关联的条纹信号的波前分析器和干涉仪。 该干涉仪设有分束器,用于将源光束分为测试光束和参考光束,用于检测测试光束和参考光束的成像装置,以及设置在测试光束路径中的反射测试光束朝向 成像装置。 干涉仪还包括设置在参考光束路径中的微镜,用于将参考光束的一部分反射到成像装置,以及可操作地连接到反射镜并由波前分析器控制的压电转换器。 镜子能够相对于测试光束的路径移动。 微镜的横向尺寸不超过聚焦装置聚焦在其上的参考光束的中心波瓣的大致横向尺寸,使得当测试光束被反射镜反射并且参考光束的部分被微反射镜反射时, 反射的测试光束和参考光束的反射部分都入射到成像装置上,形成包含被转换成条纹信号的条纹的干涉图案。

    Focus sensing apparatus using electrical AGC to enhance differential
focus error signal
    8.
    发明授权
    Focus sensing apparatus using electrical AGC to enhance differential focus error signal 失效
    使用电气自动对焦的对焦感应装置来增强差分聚焦误差信号

    公开(公告)号:US5349175A

    公开(公告)日:1994-09-20

    申请号:US785302

    申请日:1991-10-30

    申请人: Ivan Prikryl

    发明人: Ivan Prikryl

    摘要: A focus sensing apparatus for determining the focus of an illuminating beam relative to an optical disk is disclosed herein. In one preferred embodiment, a light source generates a linearly polarized beam which is collimated by a collimating lens. The collimated beam is then converged by an objective lens onto the surface of the optical disk. The disk reflects the illuminating beam focused thereon back through the objective lens to a polarization beam splitter. A portion of the optical energy incident on the beam splitter is then redirected to form a servo beam, wherein the degree of collimation of the servo beam is indicative of the focus position of the illuminating beam. A beam separation module having a reflectivity which varies in response to the angle of incidence of optical energy thereon is positioned to intercept the servo beam. The beam separation module is operative to separate the servo beam into two beams which could be transmitted and reflected beams of substantially similar shape and intensity. Electrical signals produced by photodetective elements in response to incidence of the transmitted and reflected beams thereon may then be used to differentially generate a focus error signal. Gain control circuitry is provided to compensate for asymmetrical changes in beam intensity and maintain balanced detector channels during the generation of the differential focus error signal.

    摘要翻译: 本文公开了一种用于确定照明光束相对于光盘的焦点的聚焦感测装置。 在一个优选实施例中,光源产生由准直透镜准直的线偏振光束。 准直光束然后被物镜会聚到光盘的表面上。 盘将其上聚焦的照明光束通过物镜反射到偏振分束器。 入射在分束器上的光能的一部分然后被重定向以形成伺服光束,其中伺服光束的准直程度指示照明光束的聚焦位置。 具有响应于其上的光能入射角而变化的反射率的光束分离模块被定位成拦截伺服光束。 光束分离模块可操作以将伺服光束分成两束,这些光束可以是基本相似形状和强度的透射光束和反射光束。 然后可以使用由光检测元件响应于其上的透射光束和反射光束的入射而产生的电信号以差分地产生聚焦误差信号。 提供增益控制电路以补偿光束强度的不对称变化,并在差分聚焦误差信号的产生期间保持平衡的检测器通道。

    Focus sensing apparatus utilizing a reflecting surface having variable
reflectivity
    9.
    发明授权
    Focus sensing apparatus utilizing a reflecting surface having variable reflectivity 失效
    利用具有可变反射率的反射面的聚焦感测装置

    公开(公告)号:US5245174A

    公开(公告)日:1993-09-14

    申请号:US902751

    申请日:1992-06-23

    IPC分类号: G11B7/09 G11B7/135

    摘要: An apparatus for evaluation of radiation beam geometry that finds application in determining the focus of an illuminating beam relative to an optical disk is disclosed herein. In one preferred embodiment, a light source generates a linearly polarized beam which is collimated by a collimating lens. The collimated beam is then converged by an objective lens onto the surface of the optical disk. The disk reflects the illuminating beam focused thereon back through the objective lens to a beam splitter. A portion of the optical energy incident on the beam splitter is then redirected to form a servo beam, wherein the degree of collimation of the servo beam is indicative of the focus position of the illuminating beam. A beam separation module, based on frustrated total reflection, having a reflectivity which varies in response to the angle of incidence of optical energy thereon is positioned to intercept the servo beam. The beam separation module is operative to separate the servo beam into transmitted and reflected beams of substantially similar shape and intensity. Electrical signals produced by photodetective elements in response to incidence of the transmitted and reflected beams thereon may then be used to generate a focus error signal.

    摘要翻译: 本文公开了一种用于评估在确定照明光束相对于光盘的焦点的应用中的辐射束几何的装置。 在一个优选实施例中,光源产生由准直透镜准直的线偏振光束。 准直光束然后被物镜会聚到光盘的表面上。 盘将其上聚焦的照明光束反射回物镜到分束器。 入射在分束器上的光能的一部分然后被重定向以形成伺服光束,其中伺服光束的准直程度指示照明光束的聚焦位置。 基于沮丧的全反射的具有响应于其上的光能入射角而变化的反射率的光束分离模块被定位成拦截伺服光束。 光束分离模块用于将伺服光束分离成基本相似形状和强度的透射和反射光束。 然后可以使用由光敏元件响应于其上的透射光束和反射光束的入射而产生的电信号来产生聚焦误差信号。

    Hologram synthesis
    10.
    发明授权
    Hologram synthesis 失效
    全息图合成

    公开(公告)号:US4509818A

    公开(公告)日:1985-04-09

    申请号:US331867

    申请日:1981-12-17

    申请人: Ivan Prikryl

    发明人: Ivan Prikryl

    IPC分类号: G03H1/24 G03H1/26 G03H1/08

    摘要: The invention relates to hologram synthesis using a two-dimensional lattice of basic holograms, each basic hologram being formed from a two-dimensional transparency. It provides a synthetic field hologram that has a diffraction efficiency unimpared by the number of basic holograms employed. The hologram may be reconstructed in white light. The method and hologram are useful in making and reconstructing holographic land maps.

    摘要翻译: 本发明涉及使用基本全息图的二维晶格的全息图合成,每个基本全息图由二维透明度形成。 它提供了一种合成场全息图,其具有不受所使用的基本全息图的数量的限制的衍射效率。 全息图可以在白光下重建。 该方法和全息图可用于制作和重建全息地图。