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    Substrate transport apparatus with double substrate holders
    1.
    发明授权
    Substrate transport apparatus with double substrate holders 失效
    带双层基板支架的基板输送装置

    公开(公告)号：US06299404B1

    公开(公告)日：2001-10-09

    申请号：US08587087

    申请日：1996-01-16

    Applicant: Richard S. Muka ,  James C. Davis, Jr. ,  Christopher A. Hofmeister

    Inventor： Richard S. Muka ,  James C. Davis, Jr. ,  Christopher A. Hofmeister

    IPC: B25J1800

    CPC classification number: H01L21/67781 ,  B25J9/107 ,  H01L21/68707 ,  Y10S414/135 ,  Y10S414/137 ,  Y10T74/20305

    Abstract: A substrate processing apparatus having a supply of substrates, a substrate transport module, and a substrate processing module. The transport module has a movable arm assembly and two substrate holders mounted to the movable arm assembly. The substrate holders each have two separate holding areas for simultaneously holding two substrates. The movable arm assembly has two pairs of driven arms. Each pair of driven arms is connected to a separate one of the holders for extending and retracting the holders along a radial path relative to a center of the movable arm assembly.

    Abstract translation: 具有基板供给的基板处理装置，基板输送模块和基板处理模块。 运输模块具有可移动臂组件和安装到可动臂组件上的两个衬底保持架。 衬底保持器各具有两个独立的保持区域，用于同时保持两个衬底。 可动臂组件具有两对从动臂。 每对从动臂连接到单独的一个保持器，用于相对于可动臂组件的中心沿径向路径延伸和缩回保持器。

    Sensor for articles such as wafers on end effector
    4.
    发明授权
    Sensor for articles such as wafers on end effector 失效
    用于诸如末端执行器上的晶片的物品的传感器

    公开(公告)号：US5539323A

    公开(公告)日：1996-07-23

    申请号：US58421

    申请日：1993-05-07

    Applicant: James C. Davis, Jr.

    Inventor： James C. Davis, Jr.

    IPC: G01V3/08 ,  G01D5/24 ,  G01R27/26 ,  G01V9/00 ,  H01L21/67 ,  G01N27/00

    CPC classification number: G01D5/2405 ,  G01V9/00

    Abstract: The presence of an article at a specified location is detected by measuring a change in capacitance which is caused by the placement of the article at the specified location. The device used for this measurement includes an oscillator the frequency whereof is rendered highly sensitive to the capacitance being measured by structure which includes a triaxial cable and by electrical circuitry which includes a voltage follower circuit.

    Abstract translation: 通过测量由于在指定位置处的物品的放置而引起的电容变化来检测在指定位置处的物品的存在。 用于该测量的装置包括振荡器，其频率对由包括三轴电缆以及包括电压跟随器电路的电路测量的电容高度敏感。

    Substrate transport apparatus with dual substrate holders
    5.
    发明授权
    Substrate transport apparatus with dual substrate holders 失效
    具有双基板支架的基板输送装置

    公开(公告)号：US5647724A

    公开(公告)日：1997-07-15

    申请号：US549995

    申请日：1995-10-27

    Applicant: James C. Davis, Jr. ,  Christopher A. Hofmeister

    Inventor： James C. Davis, Jr. ,  Christopher A. Hofmeister

    IPC: B25J9/06 ,  B25J9/10 ,  B25J18/02

    CPC classification number: B25J9/107 ,  Y10S414/137 ,  Y10T74/20305

    Abstract: A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. The movable arm assembly has a general X-shaped section that has its center connected to the coaxial drive shaft assembly. The substrate holders are connected to different pairs of arm sections of the X-shaped section. The coaxial drive shaft assembly moves the arms of the X-shaped section relative to each other to move the two substrate holders in reverse unison motion between extended and retracted positions.

    Abstract translation: 具有可移动臂组件，两个基板保持件和同轴驱动轴组件的基板输送装置。 可动臂组件具有其中心连接到同轴驱动轴组件的通用X形截面。 衬底保持器连接到X形截面的不同臂部分。 同轴驱动轴组件相对于彼此移动X形部分的臂以使两个基板保持器在延伸位置和缩回位置之间反向一致地运动。

    Valve
    6.
    发明授权
    Valve 失效
    阀

    公开(公告)号：US5120019A

    公开(公告)日：1992-06-09

    申请号：US701512

    申请日：1991-05-16

    Applicant: James C. Davis, Jr.

    Inventor： James C. Davis, Jr.

    IPC: F16K3/18

    CPC classification number: F16K3/184 ,  F16K51/02

    Abstract: Valve mechanism for high-vacuum clean environments, wherein a slot aperture is closed by a gage having a lever. Motion of the gate which covers and uncovers the slot is imparted to the gate by longitudinal movement of the lever. Motion of the gate which seals and unseals the slot is imparted by pivoting movement of the level about a fulcrum near the center of the lever. The pivoting movement is imparted at a time different from that at which the longitudinal movement is imparted, and the pivoting movement may be imparted by means separate from that which imparts the longitudinal movement.

    Abstract translation: 用于高真空清洁环境的阀机构，其中槽孔由具有杠杆的量具封闭。 通过杠杆的纵向运动将盖子和盖子的门的运动传递给门。 通过围绕杠杆中心附近的支点的水平位置的枢转运动来施加密封和开封槽的门的运动。 在与施加纵向运动的时间不同的时间施加枢转运动，并且可以通过与施加纵向运动的方式分离的方式来赋予枢转运动。

    Articulated arm transfer device
    7.
    发明授权
    Articulated arm transfer device 失效
    铰接臂转移装置

    公开(公告)号：US5431529A

    公开(公告)日：1995-07-11

    申请号：US997773

    申请日：1992-12-28

    Applicant: Richard H. Eastman ,  James C. Davis, Jr.

    Inventor： Richard H. Eastman ,  James C. Davis, Jr.

    IPC: B25J17/00 ,  B25J9/06 ,  B25J9/10 ,  B25J17/02 ,  B25J18/00 ,  B25J18/02 ,  B65G49/07 ,  H01L21/677

    CPC classification number: B25J18/00 ,  B25J17/0241 ,  B25J9/104 ,  B25J9/1065 ,  Y10T74/20329 ,  Y10T74/20335

    Abstract: An articulated arm transfer device employs a pair of upper arms each upper arm being rotatable at its shoulder end, and a pair of forearms each forearm being rotatable at its wrist end. The elbow ends of each pair are connected to each other by a link means. The shoulder ends are mounted on a support in such a manner that one upper arm is rotated by a drive means, and holding means for an object to be transferred is mounted on the wrist ends. The link means includes shafts upon which the elbow ends are mounted and at least two S-bands connecting the shafts in such a manner that rotation of one shaft in either direction causes rotation of the other shaft in the opposite direction. The elbow end of one upper arm is fixed to its shaft, while the elbow end of the other upper arm is rotatably mounted on its shaft. The elbow end of one forearm is rotatably mounted on the shaft to which the elbow end of an upper arm is fixed, and the elbow end of the other forearm is fixed to the shaft on which the elbow end of the other upper arm is rotatably mounted.

    Abstract translation: 关节式臂转移装置采用一对上臂，每个上臂可在其肩端旋转，一对前臂每个前臂可在其腕端旋转。 每对的肘端通过连接装置相互连接。 肩端部以这样的方式安装在支撑件上，即一个上臂由驱动装置旋转，并且用于待传送物体的保持装置安装在手腕端部上。 连杆装置包括安装肘部端的轴和至少两个连接轴的S形带，使得一个轴在任一方向上的旋转导致另一轴在相反方向上的旋转。 一个上臂的肘端固定在其轴上，而另一个上臂的肘端可旋转地安装在其轴上。 一个前臂的肘端可旋转地安装在上臂的肘端固定到的轴上，另一个前臂的肘端固定到另一个上臂的肘端可旋转地安装在其上的轴上 。

    Articulated arm transfer device
    8.
    发明授权
    Articulated arm transfer device 失效
    铰接臂转移装置

    公开(公告)号：US4909701A

    公开(公告)日：1990-03-20

    申请号：US050520

    申请日：1987-05-18

    Applicant: E. Brian Hardegen ,  Todd E. Bottomley ,  James C. Davis, Jr.

    Inventor： E. Brian Hardegen ,  Todd E. Bottomley ,  James C. Davis, Jr.

    IPC: B25J9/00 ,  B25J9/10 ,  B25J15/06 ,  B25J21/00 ,  H01L21/677

    CPC classification number: B25J9/107 ,  B25J15/0616 ,  B25J21/005 ,  H01L21/67766

    Abstract: In a material transfer device, an articulated arm assembly extends and retracts in a "froglike" motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction to align the object with the intended destination. A greater degree of axial mobility may be provided, for example by a rotating lift screw. A vacuum chamber may be provided, with the arm assembly moving the object between locations in the chamber.

    Abstract translation: 在材料转移装置中，铰接臂组件以“青蛙状”运动延伸和缩回以在多个位置之间传送物体。 铰接臂组件可绕径向平面中的枢转点旋转，并且可以在轴向方向上升高或降低以使物体与预期目的地对准。 可以提供更大程度的轴向迁移率，例如通过旋转提升螺钉。 可以设置真空室，其中臂组件将物体移动到室中的位置之间。

    Articulated arm transfer device
    9.
    发明授权
    Articulated arm transfer device 失效
    铰接臂转移装置

    公开(公告)号：US5577879A

    公开(公告)日：1996-11-26

    申请号：US421533

    申请日：1995-04-13

    Applicant: Richard H. Eastman ,  James C. Davis, Jr.

    Inventor： Richard H. Eastman ,  James C. Davis, Jr.

    IPC: B25J17/00 ,  B25J9/06 ,  B25J9/10 ,  B25J17/02 ,  B25J18/00 ,  B25J18/02 ,  B65G49/07 ,  H01L21/677

    CPC classification number: B25J18/00 ,  B25J17/0241 ,  B25J9/104 ,  B25J9/1065 ,  Y10T74/20329 ,  Y10T74/20335

    Abstract: An articulated arm transfer device having a pair of upper arms and a pair of forearms. Each upper arm is rotatable at its shoulder end. Each forearm is rotatable at its wrist end. The elbow ends of the upper arms and the forearms are connected to each other by a link. The shoulder ends are mounted on a support in such a manner that one upper arm is rotated by a drive, and a holder for an object to be transferred is mounted on the wrist ends. The link includes shafts upon which the elbow ends are mounted. At least two S-bands connect the shafts in such a manner that rotation of one shaft in either direction causes rotation of the other shaft in the opposite direction. The elbow end of one upper arm is fixed to its shaft, while the elbow end of the other upper arm is rotatably mounted on its shaft. The elbow end of one forearm is rotatably mounted on the shaft to which the elbow end of an upper arm is fixed, and the elbow end of the other forearm is fixed to the shaft on which the elbow end of the other upper arm is rotatably mounted.

    Abstract translation: 具有一对上臂和一对前臂的关节臂转移装置。 每个上臂可在其肩端旋转。 每个前臂都可以在其腕端旋转。 上臂和前臂的肘部端部通过连杆相互连接。 肩端部以这样的方式安装在支撑件上，即一个上臂由驱动器旋转，并且用于待传送物体的保持器安装在手腕端部上。 该连杆包括安装有肘部端部的轴。 至少两个S形带以这样的方式连接轴，即一个轴在任一方向的旋转导致另一个轴在相反方向上的旋转。 一个上臂的肘端固定在其轴上，而另一个上臂的肘端可旋转地安装在其轴上。 一个前臂的肘端可旋转地安装在上臂的肘端固定到的轴上，另一个前臂的肘端固定到另一个上臂的肘端可旋转地安装在其上的轴上 。

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