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    Particle Beam Microscope and Method for Operating the Particle Beam Microscope
    1.
    发明申请
    Particle Beam Microscope and Method for Operating the Particle Beam Microscope 有权
    粒子束显微镜及粒子束显微镜的操作方法

    公开(公告)号：US20120074317A1

    公开(公告)日：2012-03-29

    申请号：US13249006

    申请日：2011-09-29

    申请人： Simon Diemer ,  Hubert Mantz ,  Jaroslaw Paluszynski

    发明人： Simon Diemer ,  Hubert Mantz ,  Jaroslaw Paluszynski

    IPC分类号： H01J37/26

    CPC分类号： H01J37/222 ,  H01J37/226 ,  H01J37/28

    摘要： A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope; generating a surface model of the structure depending on the at least one of the detected light rays and the particles; determining a position and an orientation of the surface model of the structure relative to the object region; determining a measurement location relative to the surface model of the structure; and positioning the object depending on the generated surface model of the structure, depending on the determined position and orientation of the surface model of the structure, and depending on the determined measurement location.

    摘要翻译： 一种用于操作粒子束显微镜的方法，包括检测从结构发出的光线或颗粒，其中所述结构包括以下至少一个：物体的表面的至少一部分和物体的表面的至少一部分 粒子束显微镜的夹持器; 根据检测到的光线和颗粒中的至少一个产生结构的表面模型; 确定所述结构的表面模型相对于所述对象区域的位置和取向; 确定相对于所述结构的表面模型的测量位置; 并且取决于结构的表面模型的确定的位置和取向，并且取决于所确定的测量位置，根据所生成的结构的表面模型来定位对象。

    Method of operating a scanning electron microscope
    2.
    发明授权
    Method of operating a scanning electron microscope 有权
    扫描电子显微镜的操作方法

    公开(公告)号：US08227752B1

    公开(公告)日：2012-07-24

    申请号：US13029998

    申请日：2011-02-17

    申请人： Hubert Mantz ,  Jaroslaw Paluszynski

    发明人： Hubert Mantz ,  Jaroslaw Paluszynski

    IPC分类号： H01J37/28 ,  H01J37/256

    CPC分类号： H01J37/28 ,  H01J2237/226 ,  H01J2237/2611

    摘要： A method of inspecting an object using a scanning particle beam microscope, the method comprising: operating the microscope in a high-resolution mode by laterally scanning a particle beam of the high-resolution mode; operating the microscope in a 3D-mode for acquiring a three-dimensional representation of the object by laterally scanning a particle beam of the 3D-mode; wherein the particle beam of the high-resolution mode and the particle beam of the 3D-mode have a same beam energy and a same focus distance; and wherein an aperture angle of the particle beam of the 3D-mode is at least 2 times greater, or at least 5 times greater, or at least 10 times greater, or at least 100 times greater than an aperture angle of the particle beam of the high-resolution mode.

    摘要翻译： 一种使用扫描粒子束显微镜检查物体的方法，所述方法包括：通过横向扫描高分辨率模式的粒子束以高分辨率模式操作显微镜; 以3D模式操作显微镜，用于通过横向扫描3D模式的粒子束来获取对象的三维表示; 其中高分辨率模式的粒子束和3D模式的粒子束具有相同的光束能量和相同的焦距; 并且其中所述3D模式的所述粒子束的孔径角比所述三维模式的所述粒子束的孔径角大至少为所述三维模式的所述粒子束的孔径角的2倍，或至少大于或等于5倍，或者至少大于10倍， 高分辨率模式。

    Particle beam microscope and method for operating the particle beam microscope
    3.
    发明授权
    Particle beam microscope and method for operating the particle beam microscope 有权
    粒子束显微镜及其操作方法

    公开(公告)号：US08487252B2

    公开(公告)日：2013-07-16

    申请号：US13249006

    申请日：2011-09-29

    申请人： Simon Diemer ,  Hubert Mantz ,  Jaroslaw Paluszynski

    发明人： Simon Diemer ,  Hubert Mantz ,  Jaroslaw Paluszynski

    IPC分类号： H01J37/26 ,  H01J37/10 ,  G01N23/00

    CPC分类号： H01J37/222 ,  H01J37/226 ,  H01J37/28

    摘要： A method for operating a particle beam microscope comprising detecting light rays or particles which emanate from a structure, wherein the structure comprises at least one of: at least a portion of a surface of an object and at least a portion of a surface of an object holder of the particle beam microscope; generating a surface model of the structure depending on the at least one of the detected light rays and the particles; determining a position and an orientation of the surface model of the structure relative to the object region; determining a measurement location relative to the surface model of the structure; and positioning the object depending on the generated surface model of the structure, depending on the determined position and orientation of the surface model of the structure, and depending on the determined measurement location.

    摘要翻译： 一种用于操作粒子束显微镜的方法，包括检测从结构发出的光线或颗粒，其中所述结构包括以下至少一个：物体的表面的至少一部分和物体的表面的至少一部分 粒子束显微镜的夹持器; 根据检测到的光线和颗粒中的至少一个产生结构的表面模型; 确定所述结构的表面模型相对于所述对象区域的位置和取向; 确定相对于所述结构的表面模型的测量位置; 并且取决于结构的表面模型的确定的位置和取向，并且取决于所确定的测量位置，根据所生成的结构的表面模型来定位对象。