公开(公告)号：US4183797A

公开(公告)日：1980-01-15

申请号：US972593

申请日：1978-12-22

申请人： Thomas N. Kennedy ,  William C. Lester ,  George W. McDonough ,  John D. Michaelsen

发明人： Thomas N. Kennedy ,  William C. Lester ,  George W. McDonough ,  John D. Michaelsen

IPC分类号： C23C14/34 ,  C23C14/35 ,  C23C14/38 ,  H01J37/34 ,  H01L21/203 ,  C23C15/00

CPC分类号： C23C14/345 ,  C23C14/3464 ,  C23C14/352 ,  H01J37/3402

摘要： Method and apparatus for coating a thin film upon a substrate in a vacuum chamber using the sputter deposition technique on both sides of the substrate without rotation of the substrate. The substrate is held between two movable rams and is located between two targets equal to or larger in size than the substrate. The rams supply power and cooling to the substrate. A glow suppression ring circumscribes the periphery of the substrate. The cathodes of the sputtering system can be magnetically enhanced for concentration of the sputtering plasma.

摘要翻译： 使用溅射沉积技术在真空室中的基板上涂覆薄膜而不旋转基板的方法和装置。 基板保持在两个可移动的公柱之间，并且位于两个等于或大于基板的尺寸之间的目标上。 公司供应电源和冷却到基板。 辉光抑制环围绕衬底的周边。 可以对溅射等离子体的浓度进行磁性增强。

公开(公告)号：US4245008A

公开(公告)日：1981-01-13

申请号：US956296

申请日：1978-10-30

申请人： John D. Michaelsen ,  Daniel A. Nepela ,  Peter B. P. Phipps

发明人： John D. Michaelsen ,  Daniel A. Nepela ,  Peter B. P. Phipps

IPC分类号： G11B5/66 ,  C22C19/07 ,  C22C38/00 ,  G11B5/64 ,  H01F10/14 ,  H01F10/16 ,  H01F41/20 ,  B32B15/04

CPC分类号： G11B5/656 ,  H01F10/14 ,  H01F41/20 ,  Y10S428/928 ,  Y10T428/12465 ,  Y10T428/12931 ,  Y10T428/12951

摘要： A thin film magnetic recording medium for deposition on a record carrier includes a ferromagnetic alloy containing iron, cobalt and chromium. The ferromagnetic alloy consists of from 0-55% cobalt, from 8-22% of chromium with the remainder iron. The preferred range of chromium is from 10-18%. The magnetic recording layer is vacuum deposited over an extended portion of a record carrier for storing information which is represented by the spatial distribution of magnetic transitions in the magnetic layer. The iron-cobalt-chromium or iron-chromium composition according to this invention, gives the best magnetic properties consistent with excellent corrosion resistance.

摘要翻译： 用于沉积在记录载体上的薄膜磁记录介质包括含铁，钴和铬的铁磁性合金。 铁磁合金由0-55％的钴组成，8-22％的铬和其余的铁组成。 铬的优选范围为10-18％。 磁记录层被真空沉积在记录载体的延伸部分上，用于存储由磁性层中的磁转变的空间分布表示的信息。 根据本发明的铁 - 钴 - 铬或铁 - 铬组合物具有与优异的耐腐蚀性一致的最佳磁性。