公开(公告)号：US4539554A

公开(公告)日：1985-09-03

申请号：US434876

申请日：1982-10-18

申请人： John F. Jarvis ,  Robert G. Swartz ,  Bruce A. Wooley

发明人： John F. Jarvis ,  Robert G. Swartz ,  Bruce A. Wooley

IPC分类号： G01L5/00 ,  B25J19/02 ,  H03K17/96 ,  G06F3/02 ,  H01L41/08

CPC分类号： H03K17/9643

摘要： An integrated array of pressure transducers capable of producing an analog output voltage representative of the applied pressure is proposed. The individual transducing elements (16) are defined by a three-layer structure including a thin layer of piezoelectric material (10) disposed between a reference potential plate (12) and a plurality of electrodes (15) contained in a silicon substrate (14). A force applied to a localized portion of the reference plate will cause a deflection of the piezoelectric material towards the electrodes on the substrate, inducing a capacitive charge on the electrode in the localized area. This capacitance is stores at a node A associated with the transducing element, and may be interrogated by a sensing circuit (18) located in the silicon substrate. Since the induced charge is directly proportional to the applied force, a measurement of the output voltage from node A will yield a direct indication of the localized force applied to the sensor.

摘要翻译： 提出了能够产生代表所施加的压力的模拟输出电压的集成的压力传感器阵列。 单个换能元件（16）由三层结构限定，该三层结构包括设置在参考电位板（12）和包含在硅衬底（14）中的多个电极之间的压电材料薄层， 。 施加到参考板的局部部分的力将引起压电材料朝向衬底上的电极的偏转，从而在局部区域中的电极上引起电容性电荷。 该电容存储在与转换元件相关联的节点A处，并且可以由位于硅衬底中的感测电路（18）询问。 由于感应电荷与施加的力成正比，因此来自节点A的输出电压的测量将产生施加到传感器的局部力的直接指示。