公开(公告)号：US08827548B2

公开(公告)日：2014-09-09

申请号：US13110684

申请日：2011-05-18

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01K17/02 ,  G01N25/20

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US07762719B2

公开(公告)日：2010-07-27

申请号：US11578675

申请日：2005-04-20

申请人： Chung-Wah Fon ,  Michael L. Roukes ,  Wonhee Lee ,  Hongxing Tang

发明人： Chung-Wah Fon ,  Michael L. Roukes ,  Wonhee Lee ,  Hongxing Tang

IPC分类号： G01K17/00

CPC分类号： G01K17/006 ,  B01L3/5027

摘要： Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

摘要翻译： 提供了具有低附加热容量和attojoule / Kscale分辨率的微量热计。 这些微量热计使用非常小的由热容量非常低的材料组成的量热仪。 还提供了具有热分离的试剂室的基于聚合物的微量热计。 这些微量热计使用多层聚合物膜结构来提供试剂室的改进的热隔离。

公开(公告)号：US07966898B2

公开(公告)日：2011-06-28

申请号：US11830612

申请日：2007-07-30

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01L1/22

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US20100024572A1

公开(公告)日：2010-02-04

申请号：US11830612

申请日：2007-07-30

申请人： MICHAEL L. ROUKES ,  CHUNG-WAH FON ,  WONHEE LEE ,  HONGXING TANG ,  BLAKE WATERS AXELROD ,  JOHN LIANG TAN

发明人： MICHAEL L. ROUKES ,  CHUNG-WAH FON ,  WONHEE LEE ,  HONGXING TANG ,  BLAKE WATERS AXELROD ,  JOHN LIANG TAN

IPC分类号： G01L1/18 ,  B44C1/22

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流控嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US20070286254A1

公开(公告)日：2007-12-13

申请号：US11578675

申请日：2005-04-20

申请人： Chung-Wah Fon ,  Michael Roukes ,  Wonhee Lee ,  Hongxing Tang

发明人： Chung-Wah Fon ,  Michael Roukes ,  Wonhee Lee ,  Hongxing Tang

IPC分类号： G01N25/20 ,  B01J19/00 ,  G01K17/00

CPC分类号： G01K17/006 ,  B01L3/5027

摘要： Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

摘要翻译： 提供了具有低附加热容量和attojoule / Kscale分辨率的微量热计。 这些微量热计使用非常小的由热容量非常低的材料组成的量热仪。 还提供了具有热分离的试剂室的基于聚合物的微量热计。 这些微量热计使用多层聚合物膜结构来提供试剂室的改进的热隔离。

公开(公告)号：US20110216804A1

公开(公告)日：2011-09-08

申请号：US13110684

申请日：2011-05-18

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01K17/00

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US20100059808A1

公开(公告)日：2010-03-11

申请号：US12208133

申请日：2008-09-10

申请人： Wei Zheng ,  Chung Wah Fon

发明人： Wei Zheng ,  Chung Wah Fon

IPC分类号： H01L29/00 ,  H01L21/3205

CPC分类号： H01L29/792 ,  H01L27/11565 ,  H01L29/40117 ,  H01L29/4234 ,  H01L29/513 ,  H01L29/518

摘要： A nonvolatile memory cell has charge trapping dielectric (160) which has been modified (i.e. oxidized) adjacent to edges of blocking dielectric (180). The modification reduces the charge-trapping density adjacent to the edges of the blocking dielectric, and hence reduces the leakage current at the edges. Other features are also provided.

摘要翻译： 非易失性存储单元具有电荷捕获电介质（160），其已经被邻近阻挡电介质（180）的边缘修饰（即被氧化）。 该修改减少了与阻挡电介质的边缘相邻的电荷捕获密度，因此降低了边缘处的漏电流。 还提供其他功能。