公开(公告)号：US08827548B2

公开(公告)日：2014-09-09

申请号：US13110684

申请日：2011-05-18

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01K17/02 ,  G01N25/20

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US07959873B1

公开(公告)日：2011-06-14

申请号：US11491394

申请日：2006-07-20

申请人： Michael Roukes ,  Hongxing Tang ,  Jessica Arlett ,  James Maloney ,  Benjamin Gudlewski

发明人： Michael Roukes ,  Hongxing Tang ,  Jessica Arlett ,  James Maloney ,  Benjamin Gudlewski

IPC分类号： G01N33/00

CPC分类号： B81B3/0021 ,  B81B2201/0214 ,  B82Y15/00 ,  B82Y30/00 ,  G01N29/036 ,  G01N33/54366 ,  G01N2291/0257

摘要： A biosensor is comprised of a free and a biofunctionalized recognition self-sensing nanocantilever, a dock adjacent to the ends of the nanocantilevers, and a gap between the nanocantilevers and dock. The self-sensing cantilevers each include a semiconductor piezoresistor defined in a pair of legs about which the cantilevers flex. A bias power or current is applied to the piezoresistor. The sensitivity of the cantilevers is optimized for a given ambient temperature and geometry of the cantilevers and dock by minimizing the force spectral density, SF, of the cantilevers to determine the optimum bias power, Pin. A sub-aN/√Hz force sensitivity is obtained by scaling down the dimensions of the cantilevers and supplying an optimum bias power as a function of temperature and geometry.

摘要翻译： 生物传感器由免费的和生物功能化的识别自感纳米聚合物，邻近纳米聚合物末端的码头以及纳米悬臂与码头之间的间隙组成。 自感悬臂各自包括限定在一对腿部的半导体压敏电阻，悬臂弯曲在该支脚周围。 偏压电源或电流施加到压敏电阻。 通过最小化悬臂的力谱密度（SF）来确定最佳偏置功率Pin，悬臂梁的灵敏度对给定的环境温度和悬臂和基座的几何形状进行了优化。 通过缩小悬臂的尺寸并提供作为温度和几何形状的函数的最佳偏置功率，可以获得sub-aN /√Hz力灵敏度。

公开(公告)号：US20110103733A1

公开(公告)日：2011-05-05

申请号：US12920631

申请日：2009-04-09

申请人： Hongxing Tang ,  Mo Li ,  Wolfram Pernice ,  Chi Xiong

发明人： Hongxing Tang ,  Mo Li ,  Wolfram Pernice ,  Chi Xiong

IPC分类号： G02F1/01 ,  G02B6/35 ,  G02B6/26 ,  G01N21/84

CPC分类号： G02B6/26 ,  B82Y20/00 ,  G02B6/12007 ,  G02B6/122 ,  G02B6/283 ,  G02B6/3504 ,  G02B6/3548 ,  G02B6/3552 ,  G02B6/356 ,  G02B6/3568 ,  G02B6/3594 ,  G02B6/3596 ,  G02B2006/12038 ,  G02B2006/12061

摘要： The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.

摘要翻译： 本发明涉及对梯度光学力进行操作的装置，特别是可由梯度光学力驱动的纳米级机械装置。 这种器件包括波导和介电体，其中波导的至少一部分与电介质本体隔开一定距离，允许波导内的光学模式与电介质体的渐逝耦合。 这导致作用在波导上并且可以在纳米尺度上的各种器件中使用的光学力，包括全光开关，光子晶体管，可调谐耦合器，光衰减器和可调谐移相器。 波导还可以包括形成两个悬臂的间隙。

公开(公告)号：US07762719B2

公开(公告)日：2010-07-27

申请号：US11578675

申请日：2005-04-20

申请人： Chung-Wah Fon ,  Michael L. Roukes ,  Wonhee Lee ,  Hongxing Tang

发明人： Chung-Wah Fon ,  Michael L. Roukes ,  Wonhee Lee ,  Hongxing Tang

IPC分类号： G01K17/00

CPC分类号： G01K17/006 ,  B01L3/5027

摘要： Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

摘要翻译： 提供了具有低附加热容量和attojoule / Kscale分辨率的微量热计。 这些微量热计使用非常小的由热容量非常低的材料组成的量热仪。 还提供了具有热分离的试剂室的基于聚合物的微量热计。 这些微量热计使用多层聚合物膜结构来提供试剂室的改进的热隔离。

公开(公告)号：US20080255439A1

公开(公告)日：2008-10-16

申请号：US11628003

申请日：2005-06-01

申请人： Hongxing Tang ,  Michael L. Roukes ,  Richard Renaud

发明人： Hongxing Tang ,  Michael L. Roukes ,  Richard Renaud

IPC分类号： A61B5/04

CPC分类号： A61B5/04001 ,  A61B5/685 ,  A61B2562/028 ,  A61N1/05 ,  B82Y15/00

摘要： An embodiment of the invention provides a neural probe (100) containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.

摘要翻译： 本发明的实施例提供了一种包含多个纳米级记录电极的神经探针（100）。 记录电极具有1微米或更小的宽度，并且相邻记录电极之间的距离为10微米或更小。 本发明的另一个实施方案提供了一种神经探针，其包含位于聚合物基材上的多个微细加工的记录电极，例如柔性聚合物悬臂。

公开(公告)号：US08639074B2

公开(公告)日：2014-01-28

申请号：US12920631

申请日：2009-04-09

申请人： Hongxing Tang ,  Mo Li ,  Wolfram Pernice ,  Chi Xiong

发明人： Hongxing Tang ,  Mo Li ,  Wolfram Pernice ,  Chi Xiong

IPC分类号： G02B6/26

CPC分类号： G02B6/26 ,  B82Y20/00 ,  G02B6/12007 ,  G02B6/122 ,  G02B6/283 ,  G02B6/3504 ,  G02B6/3548 ,  G02B6/3552 ,  G02B6/356 ,  G02B6/3568 ,  G02B6/3594 ,  G02B6/3596 ,  G02B2006/12038 ,  G02B2006/12061

摘要： The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.

摘要翻译： 本发明涉及对梯度光学力进行操作的装置，特别是可由梯度光学力驱动的纳米级机械装置。 这种器件包括波导和介电体，其中波导的至少一部分与电介质本体隔开一定距离，允许波导内的光学模式与电介质体的渐逝耦合。 这导致作用在波导上并且可以在纳米尺度上的各种器件中使用的光学力，包括全光开关，光子晶体管，可调谐耦合器，光衰减器和可调谐移相器。 波导还可以包括形成两个悬臂的间隙。

公开(公告)号：US20110216804A1

公开(公告)日：2011-09-08

申请号：US13110684

申请日：2011-05-18

申请人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

发明人： Michael L. Roukes ,  Chung-Wah Fon ,  Wonhee Lee ,  Hongxing Tang ,  Blake Waters Axelrod ,  John Liang Tan

IPC分类号： G01K17/00

CPC分类号： G01N33/54373 ,  B82Y35/00 ,  G01L1/044 ,  G01N33/5026 ,  G01N33/5029 ,  G01N33/5032 ,  Y10S977/724 ,  Y10S977/956 ,  Y10S977/958

摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

摘要翻译： 微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。 力传感器包含与应变传感器集成的可变形构件。 应变传感器将可变形部件的变形转换为电信号。 微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。 此外，还提供了微流体嵌入式真空绝缘生物量热计。 量热器室包含聚对二甲苯膜。 在测量样品期间，室的两侧都处于真空状态。 使用微流控管（由聚对二甲苯构建）将样品输送到室中。 用作温度计的热电堆位于两层聚对二甲苯之间。

公开(公告)号：US20100098967A1

公开(公告)日：2010-04-22

申请号：US12526792

申请日：2008-02-13

申请人： Jan Schroers ,  Golden Kumar ,  Hongxing Tang

发明人： Jan Schroers ,  Golden Kumar ,  Hongxing Tang

IPC分类号： B32B3/30 ,  B22D23/00

CPC分类号： G11B3/705 ,  C21D6/04 ,  C21D2221/00 ,  C22C45/00 ,  C22C45/001 ,  C22C45/003 ,  C22C45/02 ,  C22C45/04 ,  C22C2200/02 ,  Y10T428/12389

摘要： The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.

摘要翻译： 本发明涉及使用非晶金属材料进行压印光刻的材料，方法和装置。 非晶金属材料可用作压印介质，并且在图案转移过程期间施加热塑性成形工艺以在非晶金属层中产生微米级和纳米尺度图案。 图案转印是直接掩模压花或通过连续纳米压痕工艺的形式。 还公开了重写过程，其包括通过第二热塑性成型工艺实现的擦除机构。 非晶金属材料也可以直接用作压印光刻中的压花模具，以允许高体积压印纳米制造。 本发明还包括在单独的表面张力的作用下平滑表面的方法。

公开(公告)号：US07434476B2

公开(公告)日：2008-10-14

申请号：US11010578

申请日：2004-12-14

申请人： Hongxing Tang ,  Mo Li ,  Michael L. Roukes

发明人： Hongxing Tang ,  Mo Li ,  Michael L. Roukes

IPC分类号： G01B7/16

CPC分类号： G01L1/18 ,  G01L1/20 ,  G01N33/54346 ,  G01N33/54373 ,  G01Q20/04 ,  G01Q60/38

摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

摘要翻译： 薄金属膜用作微机电和纳米机电系统中的压阻自感元件。 演示了AFM探针的具体应用。

公开(公告)号：US20070286254A1

公开(公告)日：2007-12-13

申请号：US11578675

申请日：2005-04-20

申请人： Chung-Wah Fon ,  Michael Roukes ,  Wonhee Lee ,  Hongxing Tang

发明人： Chung-Wah Fon ,  Michael Roukes ,  Wonhee Lee ,  Hongxing Tang

IPC分类号： G01N25/20 ,  B01J19/00 ,  G01K17/00

CPC分类号： G01K17/006 ,  B01L3/5027

摘要： Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

摘要翻译： 提供了具有低附加热容量和attojoule / Kscale分辨率的微量热计。 这些微量热计使用非常小的由热容量非常低的材料组成的量热仪。 还提供了具有热分离的试剂室的基于聚合物的微量热计。 这些微量热计使用多层聚合物膜结构来提供试剂室的改进的热隔离。