公开(公告)号：US20090146773A1

公开(公告)日：2009-06-11

申请号：US11952794

申请日：2007-12-07

申请人： Joon Won Kang

发明人： Joon Won Kang

IPC分类号： H01H61/00 ,  H01L21/00

CPC分类号： H01H1/0036 ,  H01H5/20 ,  H01H2001/0078 ,  H01H2061/006

摘要： A MEMS micro-switch with a lateral snap action includes a laterally bowed beam and an electro thermal actuator. The electro thermal actuator can be activated in response to the application of an actuation voltage and a push rod pushes the laterally bowed beam to a transition point through a push-pull connector. The bowed beam can be snapped to an opposite position at the transition point and a moving electrode makes strong contact to fixed electrodes, which makes the switch turn on with strong contact force. The actuator can be deactivated and the push rod pulls the bowed beam back to the transition point and snapped back to an original position, which makes the switch turn off. The switch can be fabricated utilizing glass and SOI wafer bonding technique.

摘要翻译： 具有横向卡扣动作的MEMS微型开关包括横向弓形梁和电热致动器。 电热致动器可以响应于施加致动电压而被激活，并且推杆将横向弓形梁推动到通过推挽式连接器的过渡点。 弯曲梁可以在过渡点被卡扣到相对的位置，并且移动的电极与固定电极形成强烈的接触，这使得开关以强的接触力打开。 执行器可以停用，推杆将弓形梁拉回到过渡点，并且卡扣回到原始位置，这使开关关闭。 该开关可以利用玻璃和SOI晶片接合技术制造。

公开(公告)号：US20060091484A1

公开(公告)日：2006-05-04

申请号：US11163630

申请日：2005-10-25

申请人： Joon-Won Kang

发明人： Joon-Won Kang

IPC分类号： H01L29/84

CPC分类号： H01H1/0036 ,  H01H37/52 ,  H01H61/00 ,  H01H2037/008

摘要： A Micro Electro-Mechanical Systems (MEMS) thermal switch. The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate, wherein the beam is a monolithic beam. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.

摘要翻译： 微机电系统（MEMS）热开关。 开关包括在衬底中具有源极和漏极的FET和从衬底隔离的光束，其中光束是整体光束。 光束定位在源极和漏极上并且间隔开预定的间隙。 当到达热设定点时，光束移动以将源电连接到漏极。

公开(公告)号：US07034375B2

公开(公告)日：2006-04-25

申请号：US10371572

申请日：2003-02-21

申请人： Joon-Won Kang

发明人： Joon-Won Kang

IPC分类号： H01L31/058

CPC分类号： H01H1/0036 ,  H01H37/52 ,  H01H61/00 ,  H01H2037/008

摘要： A Micro Electro-Mechanical Systems (MEMS) thermal switch. The switch includes a FET having a source and drain in a substrate and a beam isolated from the substrate. The beam is positioned over the source and the drain and spaced by a predefined gap. When the thermal set point is reached, the beam moves to electrically connect the source to the drain.

摘要翻译： 微机电系统（MEMS）热开关。 开关包括在衬底中具有源极和漏极的FET和从衬底隔离的光束。 光束定位在源极和漏极上并且间隔开预定的间隙。 当到达热设定点时，光束移动以将源电连接到漏极。

公开(公告)号：US06720634B2

公开(公告)日：2004-04-13

申请号：US10040543

申请日：2002-01-07

申请人： Joon-Won Kang

发明人： Joon-Won Kang

IPC分类号： H01L2984

CPC分类号： H01L29/84 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/124 ,  H01H35/141

摘要： A contactless acceleration switch detects a threshold acceleration value when a mass attached to a spring, moves towards a source, a drain, and a threshold adjustment channel implanted in a substrate layer. The threshold adjustment channel is located between the source and the drain. The implanted area is located between insulator posts. A spring is attached to the insulator posts. A mass is held above the implanted area by the spring. When the threshold acceleration value is detected, the mass moves towards the substrate layer. The threshold adjustment channel then inverts causing current to flow between the source and the drain, providing an electrical signal indicating that the threshold acceleration value has been reached.

公开(公告)号：US06388299B1

公开(公告)日：2002-05-14

申请号：US09208781

申请日：1998-12-10

申请人： Joon-Won Kang ,  Kelly J. Simonette

发明人： Joon-Won Kang ,  Kelly J. Simonette

IPC分类号： H01L2982

CPC分类号： H01L29/84 ,  G01L9/0073

摘要： A sensor device that provides a relatively uniform electric field between a diaphragm and a substrate, regardless of the displacement of the diaphragm is disclosed. The sensor device provides a uniform spacing between the diaphragm and the substrate over a selected range of diaphragm displacements. A double layer diaphragm is disclosed that includes an upper support member and a lower electrode plate. The lower electrode plate is attached to the upper support member by a post member, and the post member is only attached to the center region of the support member. In another embodiment, an electro-mechanically controlled switch sensor is provided that uses an electrostatic force between the diaphragm and the substrate to produce a bi-stable snapping action.

摘要翻译： 公开了一种在膜片和基板之间提供相对均匀的电场的传感器装置，而不管膜片的位移如何。 传感器装置在选定的隔膜位移范围内在隔膜和基底之间提供均匀的间隔。 公开了一种双层隔膜，其包括上支撑构件和下电极板。 下电极板通过柱构件附接到上支撑构件，并且柱构件仅附接到支撑构件的中心区域。 在另一个实施例中，提供一种电机械控制的开关传感器，其使用隔膜和基板之间的静电力产生双稳态卡扣动作。

公开(公告)号：US06858458B2

公开(公告)日：2005-02-22

申请号：US10777002

申请日：2004-02-11

申请人： Joon-Won Kang

发明人： Joon-Won Kang

IPC分类号： G01P15/08 ,  G01P15/12 ,  H01H35/14 ,  H01L29/84 ,  H01L21/00

CPC分类号： H01L29/84 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/124 ,  H01H35/141

摘要： A contactless acceleration switch detects a threshold acceleration value when a mass attached to a spring, moves towards a source, a drain, and a threshold adjustment channel implanted in a substrate layer. The threshold adjustment channel is located between the source and the drain. The implanted area is located between insulator posts. A spring is attached to the insulator posts. A mass is held above the implanted area by the spring. When the threshold acceleration value is detected, the mass moves towards the substrate layer. The threshold adjustment channel then inverts causing current to flow between the source and the drain, providing an electrical signal indicating that the threshold acceleration value has been reached.

摘要翻译： 非接触式加速开关在附接到弹簧的质量朝着源极移动，漏极和植入衬底层中的阈值调节通道时检测阈值加速度值。 阈值调节通道位于源极和漏极之间。 植入区域位于绝缘子柱之间。 一个弹簧连接到绝缘子柱上。 通过弹簧将质量块保持在植入区域上方。 当检测到阈值加速度值时，质量向基底层移动。 然后阈值调节通道反转，使电流在源极和漏极之间流动，提供指示已经达到阈值加速度值的电信号。

公开(公告)号：US06301795B1

公开(公告)日：2001-10-16

申请号：US09152162

申请日：1998-09-11

申请人： Joon-Won Kang

发明人： Joon-Won Kang

IPC分类号： G01C910

CPC分类号： G01C9/06 ,  G01C9/10 ,  G01C2009/064

摘要： A tilt sensor capable of sensing tilt in two axes includes an outer shell, a magnet at a fixed position inside the shell, and a reference element movable within the shell in response to gravity. Magnetic flux follows a plurality of paths from a pole of the magnet, around the shell, through the reference element, to the opposite pole of the magnet. Magnetic sensors detect changes in reluctance of the flux paths resulting from the movement of the reference element within the shell, from which the angle of tilt can be determined.

摘要翻译： 能够感测两轴倾斜的倾斜传感器包括外壳，外壳内部固定位置处的磁体和可响应于重力在壳体内移动的参考元件。 磁通量遵循从磁体的磁极，围绕壳体通过参考元件到磁体的相对磁极的多个路径。 磁传感器检测由外壳内的参考元件的运动导致的磁通路径的磁阻变化，从该角度来确定倾斜角。