摘要:
Methods of manufacturing a metal-insulator-metal capacitor are provided. An illustrated method includes: forming a lower metal electrode layer pattern for a metal-insulator-metal capacitor and a lower metal line layer pattern for a metal line on a first insulating layer on a semiconductor substrate; forming a second insulating layer covering the lower metal electrode layer pattern and the lower metal line layer pattern on the first insulating layer; forming a trench penetrating the second insulating layer and exposing the lower metal electrode layer pattern; forming a dielectric layer on the second insulating layer and on an exposed surface of the lower metal electrode layer pattern; forming a first mask layer pattern on at least a portion of the dielectric layer within the trench and on an edge portion of the trench; forming a second mask layer pattern on the first mask layer pattern and the dielectric layer, the second mask layer pattern having an opening exposing at least a portion of the dielectric layer in the metal line region; forming a via hole penetrating the dielectric layer and the second insulating layer and exposing at least a portion of the lower metal line layer pattern using the second mask layer pattern; removing the second mask layer pattern and the first mask layer pattern; and forming an upper metal electrode layer for a metal-insulator-metal capacitor on a portion of the dielectric layer within the trench, and forming a via contact connected to the lower metal line layer pattern within the via hole.
摘要:
The present invention relates to a ubiquitous sensor network-based system and method for automatically managing food sanitation. The system includes at least one sensor node (100) configured to measure and store sensing information, compare measured values with preset values, and generate a warning message. A sink node (200) mediates between the sensor node and a management server (400) and between the mobile terminal and the management server. A mobile terminal (300) reads food information using an RFID reader or a barcode reader, transmits the food information, measures and stores sensing information, compares the measured values with preset values, and generates a warning message. The management server (400) generates a control command, transmits the control command to the sensor node or the mobile terminal, and notifies a manager of an urgent situation and a location of the kitchen appliance if received data is a warning message.
摘要:
Provided is a semiconductor substrate and a method for manufacturing the same. The semiconductor substrate includes a substrate, a discontinuously formed hemispheric metal layer on the substrate, and a semiconductor layer on the hemispheric metal layer. A plurality of voids on the interface of the substrate and discontinuous hemisphere are formed to absorb or relax the stain of interface. Accordingly, even if a subsequent layer is relatively thickly formed on the substrate, substrate bow or warpage can be minimized.
摘要:
The present invention relates to a ubiquitous sensor network-based system and method for automatically managing food sanitation. The system includes at least one sensor node (100) configured to measure and store sensing information, compare measured values with preset values, and generate a warning message. A sink node (200) mediates between the sensor node and a management server (400) and between the mobile terminal and the management server. A mobile terminal (300) reads food information using an RFID reader or a barcode reader, transmits the food information, measures and stores sensing information, compares the measured values with preset values, and generates a warning message. The management server (400) generates a control command, transmits the control command to the sensor node or the mobile terminal, and notifies a manager of an urgent situation and a location of the kitchen appliance if received data is a warning message.
摘要:
Provided is a semiconductor substrate and a method for manufacturing the same. The semiconductor substrate includes a substrate, a discontinuously formed hemispheric metal layer on the substrate, and a semiconductor layer on the hemispheric metal layer. A plurality of voids on the interface of the substrate and discontinuous hemisphere are formed to absorb or relax the stain of interface. Accordingly, even if a subsequent layer is relatively thickly formed on the substrate, substrate bow or warpage can be minimized.
摘要:
Methods of manufacturing a metal-insulator-metal capacitor are provided. An illustrated method includes: forming a lower metal electrode layer pattern for a metal-insulator-metal capacitor and a lower metal line layer pattern for a metal line on a first insulating layer on a semiconductor substrate; forming a second insulating layer covering the lower metal electrode layer pattern and the lower metal line layer pattern on the first insulating layer; forming a trench penetrating the second insulating layer and exposing the lower metal electrode layer pattern; forming a dielectric layer on the second insulating layer and on an exposed surface of the lower metal electrode layer pattern; forming a first mask layer pattern on at least a portion of the dielectric layer within the trench and on an edge portion of the trench; forming a second mask layer pattern on the first mask layer pattern and the dielectric layer, the second mask layer pattern having an opening exposing at least a portion of the dielectric layer in the metal line region; forming a via hole penetrating the dielectric layer and the second insulating layer and exposing at least a portion of the lower metal line layer pattern using the second mask layer pattern; removing the second mask layer pattern and the first mask layer pattern; and forming an upper metal electrode layer for a metal-insulator-metal capacitor on a portion of the dielectric layer within the trench, and forming a via contact connected to the lower metal line layer pattern within the via hole.
摘要:
A venturi-type composite nozzle device for suctioning and removing air pollutants is disclosed. The venturi-type composite nozzle device suctions air pollutants in the vicinity thereof by using negative pressure formed through the venturi principle, and then mixes same with water, jets the mixed water and brings same into contact with the air pollutants again, so as to have a large adsorption ratio of air pollutants in comparison to the amount of water usage, and enables water to be reduced by that amount, and thus has excellent operating performance. To perform such functions, the device employs a venturi-type intake casing, an introducing-spray nozzle, and an impeller.
摘要:
A thrust enhancing device is disclosed. The thrust enhancing device enhances thrust of a thrust generation part in a state coupled to the thrust generation part configured to obtain a propulsive force by using a reaction force of a fluid. The thrust enhancing device includes a venturi part configured to receive a basic fluid allowed to flow by the thrust generation part and allow the basic fluid to pass through the inside thereof, and an ejection induction part disposed in an inner flow field of the venturi part and configured to linearize a flow of a fluid to be ejected to the outside of the venturi part.
摘要:
An intake-type smoke removal system is disclosed. The intake-type smoke removal system discharges gas flowing into a smoke removal zone to the outside of the smoke removal zone and includes a vacuum generating multistage Venturi configured to allow water provided from the outside to pass therethrough, the vacuum generating multistage Venturi being configured to generate negative pressure based on the Venturi effect while the water passes therethrough to suck the gas in the smoke removal zone, mix the sucked gas with the water, and discharge the gas mixed with the water.