公开(公告)号：US06179930B2

公开(公告)日：2001-01-30

申请号：US09011816

申请日：1998-06-15

申请人： Katsuya Ide ,  Kazuo Oike ,  Yasuhiro Kitagawa

发明人： Katsuya Ide ,  Kazuo Oike ,  Yasuhiro Kitagawa

IPC分类号： B08B300

CPC分类号： H01L21/02052 ,  H01L21/67034

摘要： A new drying method and apparatus is provided for drying a semiconductor device substrate, a liquid crystal panel substrate, or the like, which can reduce the possibility of contamination during drying, reduce facility costs and the area required for setting the facilities, and can perform drying in batches. Of the four sides of the upper end of the pull-up bath 10, two of the sides that oppose each other have a smaller height than the remaining two sides, and form overflow portions 10a where water in the pull-up bath overflows into a drainage bath 20. A rod-shaped heater 11 is mounted to the inside of the pull-up bath 10, and a heater cover 12 is disposed above the heater 11, with a pair of exhaust tubes 13 being led out to a location above the pull-up bath 10 so as to allow discharge of gas to the outside therefrom. A water supply tube 14 is connected to the bottom surface of the pull-up bath 10 to allow ultra-pure water to be supplied from a water supply system to be described later. A drainage tube 21 is connected to the lower portion of the drainage bath 20, as well as to a water supply control device 22, composed of a circulating pump, a change-over valve, or the like.

摘要翻译： 提供了一种新的干燥方法和装置，用于干燥半导体器件基板，液晶面板基板等，这可以降低干燥期间污染的可能性，降低设备成本和设置设备所需的面积，并且可以执行 分批干燥。 在上拉槽10的上端的四个侧面中，两个彼此相对的两个侧面的高度比其余的两侧具有更小的高度，并且形成溢出部分10a，其中上拉浴中的水溢出到 排水槽20.杆状加热器11安装在上拉槽10的内部，加热器盖12设置在加热器11的上方，一对排气管13被引出到 上拉浴10，以便允许气体从外部排出。 供水管14连接到上拉槽10的底面，以允许从稍后描述的供水系统供应超纯水。 排水管21连接到排水槽20的下部，以及由循环泵，转换阀等构成的供水控制装置22。

公开(公告)号：US6104459A

公开(公告)日：2000-08-15

申请号：US29913

申请日：1998-03-10

申请人： Kazuo Oike ,  Kozo Gyoda

发明人： Kazuo Oike ,  Kozo Gyoda

IPC分类号： G02F1/1335 ,  G02F1/1365

CPC分类号： G02F1/133553 ,  G02F1/133514 ,  G02F1/133516 ,  G02F1/1365 ,  G02F2001/133521

摘要： The present invention provides a liquid-crystal display device and a process for manufacturing the same, wherein the unit achieves an inhibition of reduction in the displaying brightness even when used for a color reflection-type liquid-crystal display device, and a restriction of variation in the color tone which varies depending on the quantity of incident light. For each of the pixel regions, a pixel reflective layer 13 is formed with Ta. On the surface of each of a plurality of the pixel regions, three anodic oxide films 13a, 13b and 13c are formed with mutually different thicknesses. The thicknesses of the anodic oxide films are determined such that light reflected by the pixel reflective layer 13 is colored into three different colors.

摘要翻译： PCT No.PCT / JP97 / 02426 Sec。 371日期1998年3月10日 102（e）1998年3月10日PCT PCT 1997年7月11日PCT公布。 第WO98 / 02775号公报 日期1998年1月22日本发明提供一种液晶显示装置及其制造方法，其中，即使在彩色反射式液晶显示装置中使用时，也能够抑制显示亮度的降低， 以及根据入射光量而变化的色调变化的限制。 对于每个像素区域，用Ta形成像素反射层13。 在多个像素区域中的每一个的表面上形成有相互不同厚度的三个阳极氧化膜13a，13b和13c。 确定阳极氧化膜的厚度，使得由像素反射层13反射的光被着色成三种不同的颜色。

公开(公告)号：US07371972B2

公开(公告)日：2008-05-13

申请号：US10833258

申请日：2004-04-27

申请人： Satoshi Taguchi ,  Kazuo Oike ,  Hideki Uehara ,  Katsuhiro Imai ,  Chihiro Tanaka

发明人： Satoshi Taguchi ,  Kazuo Oike ,  Hideki Uehara ,  Katsuhiro Imai ,  Chihiro Tanaka

IPC分类号： H01R12/14

CPC分类号： G02F1/13458 ,  G02F1/1345 ,  G02F1/1365 ,  Y10T29/49174 ,  Y10T29/49194 ,  Y10T29/49208

摘要： An electrical wiring structure is provided which can be formed simultaneously when non-linear elements containing corrosion resistant metal wires and non-corrosion resistant metal wires are formed. In addition, a manufacturing method of the electrical wiring structure, an electro-optical device substrate provided with the electrical wiring structure, an electro-optical device, and a manufacturing method thereof are also provided. In particular, an oxide layer and the non-corrosion resistant metal wire are sequentially formed on a surface of the corrosion resistant metal wire. An exposed portion of the corrosion resistant metal wire is formed by removing part of the oxide layer. An electrical connection auxiliary member, such as a through-hole formed at the exposed portion or a conductive inorganic oxide film formed on the corrosion resistant metal wire and the exposed portion, is formed to electrically connect the corrosion resistant metal wire and the non-corrosion resistant metal wire.

摘要翻译： 提供了一种电气布线结构，当形成包含耐腐蚀金属线和不耐腐蚀金属线的非线性元件时，可以同时形成。 此外，还提供了电气布线结构的制造方法，设置有电布线结构的电光装置基板，电光装置及其制造方法。 特别地，在耐腐蚀金属线的表面上依次形成氧化物层和非耐腐蚀金属线。 通过去除部分氧化物层形成耐腐蚀金属线的暴露部分。 形成在暴露部分处形成的通孔的电连接辅助构件或形成在耐腐蚀金属线和暴露部分上的导电无机氧化物膜，以形成电连接耐腐蚀金属线和非腐蚀性 耐金属丝。

公开(公告)号：US06618100B2

公开(公告)日：2003-09-09

申请号：US09269039

申请日：1999-03-18

申请人： Kazuo Oike ,  Yoshio Yamaguchi ,  Naoki Makino

发明人： Kazuo Oike ,  Yoshio Yamaguchi ,  Naoki Makino

IPC分类号： G02F1136

CPC分类号： G02F1/1362 ,  G02F1/13439 ,  G02F1/136209 ,  G02F2001/133354

摘要： A liquid crystal device comprises a plurality of pixel electrodes (6), and nonlinear elements (11) including element-side electrodes (14) electrically connected to the pixel electrodes (6). An element-side electrode (14) is shaped in a pattern (14a) formed along the edge of a pixel electrode (6). The presence of the element-side electrode pattern (14a) makes it possible to prevent etchant from entering between said pixel electrode (6) and the element-side electrode (14) and causing a wire break therebetween in patterning the pixel electrode (6). When the element-side electrode pattern (14a) is made of a substance having a higher light-shielding ability than that of the pixel electrode (6), it may be used as a mark for adjusting position in bonding an element substrate and an opposite substrate.

摘要翻译： 液晶装置包括多个像素电极（6），以及包括电连接到像素电极（6）的元件侧电极（14）的非线性元件（11）。 元件侧电极（14）成形为沿像素电极（6）的边缘形成的图案（14a）。 元件侧电极图案（14a）的存在使得可以防止蚀刻剂在像素电极（6）图案化之间在所述像素电极（6）和元件侧电极（14）之间进入并引起断线， 。 当元件侧电极图案（14a）由具有比像素电极（6）的屏蔽能力更高的物质制成时，可以将其用作在元件基板的接合和相对的位置的调整位置的标记 基质。