公开(公告)号：US5063294A

公开(公告)日：1991-11-05

申请号：US524432

申请日：1990-05-17

申请人： Yutaka Kawata ,  Ken-ichi Inoue ,  Kiyotaka Ishibashi ,  Akira Kobayashi ,  Koji Inoue ,  Norio Suzuki ,  Akio Arai ,  Kaneo Yamada ,  Keizo Tokushige ,  Hirofumi Fukuyama ,  Shigeto Adachi ,  Yukito Furukawa ,  Sunao Takahashi ,  Makoto Kimura

发明人： Yutaka Kawata ,  Ken-ichi Inoue ,  Kiyotaka Ishibashi ,  Akira Kobayashi ,  Koji Inoue ,  Norio Suzuki ,  Akio Arai ,  Kaneo Yamada ,  Keizo Tokushige ,  Hirofumi Fukuyama ,  Shigeto Adachi ,  Yukito Furukawa ,  Sunao Takahashi ,  Makoto Kimura

IPC分类号： G01Q90/00 ,  H01J37/09 ,  H01J37/256

CPC分类号： H01J37/09 ,  H01J37/256

摘要： A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

公开(公告)号：US4918928A

公开(公告)日：1990-04-24

申请号：US284547

申请日：1988-12-15

申请人： Osamu Morioka ,  Keizo Tokushige ,  Akeo Kimura ,  Takahiro Nihei

发明人： Osamu Morioka ,  Keizo Tokushige ,  Akeo Kimura ,  Takahiro Nihei

IPC分类号： F25D3/10 ,  G01R31/28

CPC分类号： G01R31/2875 ,  F25D3/102 ,  G01R31/2862

摘要： An apparatus for testing IC devices for performance at a low temperature comprises a cooling disk disposed within a test chamber and adapted to be cooled with liquid nitrogen of like refrigerant for cooling the IC device in contact or proximity therewith. A cooling bag for use as cooling means in testing IC devices at a low temperature comprises a bag adapted to intimately contact the IC device and having a refrigerant enclosed therein. Another apparatus for testing IC devices at a low temperature comprises a cooling bag reeved around a drive roller and an idler roller in the form of a belt conveyor and adapted to come into intimate contact from above with IC devices being transported on a conveyor to cool the devices.

摘要翻译： 用于测试低温性能的IC器件的装置包括设置在测试室内的冷却盘，并且适于用类似制冷剂的液氮冷却，以冷却与其接触或接近的IC器件。 用于在低温下测试IC器件的冷却装置的冷却袋包括适于与IC器件紧密接触并具有封闭在其中的制冷剂的袋子。 用于在低温下测试IC器件的另一种装置包括以带式输送机的形式围绕驱动辊和惰辊卷绕的冷却袋，并且适于从上方紧密接触，IC器件在输送机上运输以冷却 设备。