公开(公告)号：US20060065831A1

公开(公告)日：2006-03-30

申请号：US11230633

申请日：2005-09-21

申请人： Hirofumi Fukuyama ,  Shoichi Mure

发明人： Hirofumi Fukuyama ,  Shoichi Mure

IPC分类号： G21K7/00

CPC分类号： G01N23/20

摘要： A spectrum analysis method is provided in which a composition distribution of a sample in the depth direction is analyzed based on an energy spectrum of scattered particles scattered at the sample by irradiation with ion beams, the sample being composed of a single layer or multiple layers. In the spectrum analysis, the thickness of an object layer of the sample is obtained by the steps of measuring an energy spectrum of scattered particles scattered in a scattering angle (specific scattering angle) direction at which an energy spectrum corresponding to the object layer independently appears, extracting an independent energy spectrum of the object layer which independently appears in the measured energy spectrum, and calculating the thickness of the object layer based on a spectrum area surrounded by the waveform of the independent energy spectrum thus extracted. Since the thickness of the object layer is analyzed based on the spectrum area instead of using the half value width of the spectrum, the analysis processing can be rapidly performed and the accuracy of the analysis can be improved.

摘要翻译： 提供了一种频谱分析方法，其中基于通过照射离子束在样品处散射的散射粒子的能谱来分析样品在深度方向上的组成分布，样品由单层或多层组成。 在频谱分析中，通过以下步骤来获得样品的物体层的厚度：测量散射角散射的散射粒子的能谱（特定散射角）方向，在该方向上分别对应于对象层的能谱 提取独立出现在测量能谱中的对象层的独立能谱，并且基于由如此提取的独立能谱的波形包围的光谱区域来计算目标层的厚度。 由于基于光谱面积分析对象层的厚度而不是使用光谱的半值宽度，因此可以快速执行分析处理，并且可以提高分析的准确性。

公开(公告)号：US08803087B2

公开(公告)日：2014-08-12

申请号：US11230633

申请日：2005-09-21

申请人： Hirofumi Fukuyama ,  Shoichi Mure

发明人： Hirofumi Fukuyama ,  Shoichi Mure

IPC分类号： G21K7/00 ,  G01N23/20

CPC分类号： G01N23/20

摘要： A spectrum analysis method is provided in which a composition distribution of a sample in the depth direction is analyzed based on an energy spectrum of scattered particles scattered at the sample by irradiation with ion beams, the sample being composed of a single layer or multiple layers. In the spectrum analysis, the thickness of an object layer of the sample is obtained by the steps of measuring an energy spectrum of scattered particles scattered in a scattering angle (specific scattering angle) direction at which an energy spectrum corresponding to the object layer independently appears, extracting an independent energy spectrum of the object layer which independently appears in the measured energy spectrum, and calculating the thickness of the object layer based on a spectrum area surrounded by the waveform of the independent energy spectrum thus extracted. Since the thickness of the object layer is analyzed based on the spectrum area instead of using the half value width of the spectrum, the analysis processing can be rapidly performed and the accuracy of the analysis can be improved.

摘要翻译： 提供了一种频谱分析方法，其中基于通过照射离子束在样品处散射的散射粒子的能谱来分析样品在深度方向上的组成分布，样品由单层或多层组成。 在频谱分析中，通过以下步骤来获得样品的物体层的厚度：测量散射角散射的散射粒子的能谱（特定散射角）方向，在该方向上分别对应于对象层的能谱 提取独立出现在测量能谱中的对象层的独立能谱，并且基于由如此提取的独立能谱的波形包围的光谱区域来计算目标层的厚度。 由于基于光谱面积分析对象层的厚度而不是使用光谱的半值宽度，因此可以快速执行分析处理，并且可以提高分析的准确性。

公开(公告)号：US5063294A

公开(公告)日：1991-11-05

申请号：US524432

申请日：1990-05-17

申请人： Yutaka Kawata ,  Ken-ichi Inoue ,  Kiyotaka Ishibashi ,  Akira Kobayashi ,  Koji Inoue ,  Norio Suzuki ,  Akio Arai ,  Kaneo Yamada ,  Keizo Tokushige ,  Hirofumi Fukuyama ,  Shigeto Adachi ,  Yukito Furukawa ,  Sunao Takahashi ,  Makoto Kimura

发明人： Yutaka Kawata ,  Ken-ichi Inoue ,  Kiyotaka Ishibashi ,  Akira Kobayashi ,  Koji Inoue ,  Norio Suzuki ,  Akio Arai ,  Kaneo Yamada ,  Keizo Tokushige ,  Hirofumi Fukuyama ,  Shigeto Adachi ,  Yukito Furukawa ,  Sunao Takahashi ,  Makoto Kimura

IPC分类号： G01Q90/00 ,  H01J37/09 ,  H01J37/256

CPC分类号： H01J37/09 ,  H01J37/256

摘要： A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

公开(公告)号：US5350920A

公开(公告)日：1994-09-27

申请号：US994953

申请日：1992-12-22

申请人： Hirofumi Fukuyama ,  Tatuya Noguchi ,  Kenichi Inoue ,  Kiyotaka Ishibashi ,  Shigeto Adachi

发明人： Hirofumi Fukuyama ,  Tatuya Noguchi ,  Kenichi Inoue ,  Kiyotaka Ishibashi ,  Shigeto Adachi

IPC分类号： G01N23/225 ,  G01Q90/00 ,  H01J37/04 ,  H01J37/09 ,  H01J37/22 ,  H01J37/252 ,  H01J37/256 ,  H01J37/28

CPC分类号： H01J37/263 ,  H01J37/22 ,  H01J37/256

摘要： An ion beam analyzing apparatus wherein a scan image displayed on display means and the profile of an ion beam can be made coincide with each other readily to assure a high operability. Slit members for X and Y directions of an objector collimator are provided for movement to vary the dimensions of slits defined thereby, and dimensions A and B of the slits in the X and Y directions are detected. Dimensions X' and Y' of a spot of an ion beam irradiated upon a specimen on a target are calculated by multiplying the dimensions A and B by reduction ratios fx and fy of quadruple pole magnetic lenses, respectively, and then the dimensions X' and Y' are multiplied by values obtained by division of conditions Cx and Cy of an image apparatus by current scanning widths Sx and Sy of deflecting electrodes to calculate enlarged beam spot diameters X" and Y" respectively. An image having the diameters X" and Y" is displayed on a cathode ray tube so that an operator can visually grasp it. Consequently, a scan image of the specimen and the profile of the ion beam can be made coincide readily with each other by manual operation of a manually operable mechanism of a beam position setter.

摘要翻译： 一种离子束分析装置，其中可以使显示装置上显示的扫描图像和离子束的轮廓彼此一致，以确保高可操作性。 提供了用于移动以使由此限定的狭缝的尺寸变化的反射器准直器的X和Y方向的狭缝构件，并且检测X和Y方向上狭缝的尺寸A和B. 通过将尺寸A和B分别乘以四极磁性透镜的减速比fx和fy分别计算照射到目标上的样本上的离子束点的尺寸X'和Y'，然后将尺寸X'和 Y'乘以通过用偏转电极的当前扫描宽度Sx和Sy分割图像装置的条件Cx和Cy分割获得的值，以分别计算扩大的光点直径X“和Y”。 具有直径X“和Y”的图像显示在阴极射线管上，使得操作者可以在视觉上掌握它。 因此，可以通过手动操作光束位置设定器的手动操作的机构，使样本的扫描图像和离子束的轮廓容易地彼此一致。

公开(公告)号：US07041975B2

公开(公告)日：2006-05-09

申请号：US10944769

申请日：2004-09-21

申请人： Hirofumi Fukuyama ,  Takahiro Yuki

发明人： Hirofumi Fukuyama ,  Takahiro Yuki

IPC分类号： H01J32/282

CPC分类号： G01N23/203

摘要： A sample analyzer such as a Rutherford backscattering spectrometer for detecting ions that are elastically scattered by a sample is provided. A spectrum-measuring unit is shifted so that it can be positioned in accordance with a plurality of the scattering directions of the scattered ions in the sample analyzer. For example, the spectrum-measuring unit is shifted in an arc about the irradiation point of the ion beams along a guide rail. Alternatively, a vacuum container is composed of a fixed container holding the sample therein and a movable container hermitically and slidably connected to the fixed container and provided with detection ports. The movable container slides and thus the detection ports are shifted so that the detection ports can be positioned in accordance with the scattering directions. Accordingly, the detection ports, in turn, detection angles are easily changed, whereby a large sample can be analyzed.

摘要翻译： 提供了用于检测由样品弹性散射的离子的诸如卢瑟福背散射光谱仪的样品分析仪。 频谱测量单元被移位，使得其可以根据样本分析仪中的散射离子的多个散射方向定位。 例如，光谱测量单元围绕离子束的照射点沿导轨移动。 或者，真空容器由将样品保持在其中的固定容器和可移动容器以可滑动的方式连接到固定容器并设置有检测口。 可移动容器滑动，因此检测端口移动，使得检测端口可以根据散射方向定位。 因此，检测端口又能够容易地改变检测端口，从而可以分析大的样品。

公开(公告)号：US20050067567A1

公开(公告)日：2005-03-31

申请号：US10944769

申请日：2004-09-21

申请人： Hirofumi Fukuyama ,  Takahiro Yuki

发明人： Hirofumi Fukuyama ,  Takahiro Yuki

IPC分类号： G01N23/203 ,  G21K5/04 ,  G01N23/00 ,  G21K7/00

CPC分类号： G01N23/203

摘要： A sample analyzer such as a Rutherford backscattering spectrometer for detecting ions that are elastically scattered by a sample is provided. A spectrum-measuring unit is shifted so that it can be positioned in accordance with a plurality of the scattering directions of the scattered ions in the sample analyzer. For example, the spectrum-measuring unit is shifted in an arc about the irradiation point of the ion beams along a guide rail. Alternatively, a vacuum container is composed of a fixed container holding the sample therein and a movable container hermitically and slidably connected to the fixed container and provided with detection ports. The movable container slides and thus the detection ports are shifted so that the detection ports can be positioned in accordance with the scattering directions. Accordingly, the detection ports, in turn, detection angles are easily changed, whereby a large sample can be analyzed.

摘要翻译： 提供了用于检测由样品弹性散射的离子的诸如卢瑟福背散射光谱仪的样品分析仪。 频谱测量单元被移位，使得其可以根据样本分析仪中的散射离子的多个散射方向定位。 例如，光谱测量单元围绕离子束的照射点沿导轨移动。 或者，真空容器由将样品保持在其中的固定容器和可移动容器以可滑动的方式连接到固定容器并设置有检测口。 可移动容器滑动，因此检测端口移动，使得检测端口可以根据散射方向定位。 因此，检测端口又能够容易地改变检测端口，从而可以分析大的样品。

公开(公告)号：US6025449A

公开(公告)日：2000-02-15

申请号：US31659

申请日：1998-02-27

申请人： Masashi Enomoto ,  Nobushige Numa ,  Tomokuni Ihara ,  Hirofumi Fukuyama ,  Hajime Sukejima ,  Hiroto Takeuchi

发明人： Masashi Enomoto ,  Nobushige Numa ,  Tomokuni Ihara ,  Hirofumi Fukuyama ,  Hajime Sukejima ,  Hiroto Takeuchi

IPC分类号： C08F220/18 ,  C08F220/28 ,  C09D4/00 ,  C09D7/45 ,  C08F18/00

CPC分类号： C09D7/02 ,  C08F220/18 ,  C08F220/28 ,  C09D4/00

摘要： A water-soluble acrylic resin which is prepared by neutralizing with a neutralizing agent an acrylic copolymer formed by copolymerizing (a) an alkylene oxide group-containing (meth)acrylate, (b) a cyclic saturated hydrocarbon group-containing (meth)acrylate, (c) a hydroxyl group-containing unsaturated monomer other than the monomer (a), and (d) other unsaturated monomer; a resin composition used for a water-based coating composition and containing, as a vehicle component, the above water-soluble acrylic resin; a water-based coating composition containing, as major components, (A) at Least one resin selected from the group consisting of a water-soluble resin and a water-dispersible resin and (B) a pigment, said pigment (B) being subjected to dispersion treatment; with a water-soluble acrylic resin (C), which is prepared by neutralizing with a neutralizing agent an acrylic copolymer formed by copolymerizing (a) an alkylene oxide group-containing (meth)acrylate, (b) a cyclic saturated hydrocarbon group-containing (meth)acrylate, and (e) other unsaturated monomer, followed by being mixed with the resin (A) to form a water-based coating composition; a coating method comprising coating a base coat coating composition onto a substrate followed by coating a top clear coating composition, the above water-based coating composition being used as the base coat coating composition.

摘要翻译： （a）含环氧烷基的（甲基）丙烯酸酯，（b）含环状饱和烃基的（甲基）丙烯酸酯，（甲基）丙烯酸酯，（甲基）丙烯酸酯， （c）除单体（a）以外的含羟基的不饱和单体，和（d）其它不饱和单体; 用于水性涂料组合物并含有上述水溶性丙烯酸树脂作为载体组分的树脂组合物; 一种水性涂料组合物，其含有（A）至少一种选自水溶性树脂和水分散性树脂的树脂作为主要成分，（B）颜料，所述颜料（B）经受 分散处理; 与（a）含烯氧化物基团的（甲基）丙烯酸酯共聚形成的丙烯酸共聚物，（b）含有环状饱和烃基的（甲基）丙烯酸酯， （甲基）丙烯酸酯和（e）其它不饱和单体，然后与树脂（A）混合形成水性涂料组合物; 一种涂覆方法，包括将底涂层涂料组合物涂布在基材上，然后涂覆顶部透明涂料组合物，上述水基涂料组合物用作底涂涂料组合物。